Inspection method, inspection apparatus, and inspection program for disk-shaped graduation plate
US-2024212126-A1 · Jun 27, 2024 · US
US9506782B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9506782-B2 |
| Application number | US-201313869595-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 24, 2013 |
| Priority date | Apr 24, 2013 |
| Publication date | Nov 29, 2016 |
| Grant date | Nov 29, 2016 |
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A method of controlling a system using a hybrid feedback signal includes providing an input signal with a predetermined waveform to the system and measuring an output of the system with a sensor. An output signal of the sensor is used in a first frequency band as a first portion of a feedback signal. A simulated signal is created in a second frequency band that has one or more of substantially reduced (i) resonances, (ii) phase delay and (iii) noise when compared to the output signal of the sensor in the second frequency band. The simulated signal is used in the second frequency band as a second portion of the feedback signal.
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What is claimed is: 1. A method of controlling a system using a hybrid feedback signal, comprising: providing an input signal with a predetermined waveform to the system; measuring an output of the system with a sensor; using an output signal of the sensor in a first frequency band as a first portion of a feedback signal; creating a simulated signal in a second frequency band that has one or more of substantially reduced (i) resonances, and (ii) phase delay when compared to…
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