Method of correcting measurement error of shape measuring apparatus, and shape measuring apparatus
US-2016018218-A1 · Jan 21, 2016 · US
US9506736B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9506736-B2 |
| Application number | US-201514643076-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 10, 2015 |
| Priority date | Apr 10, 2014 |
| Publication date | Nov 29, 2016 |
| Grant date | Nov 29, 2016 |
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A measurement system identifies geometric errors by using an initial position measurement step for specifying coordinates and dimensions of a target sphere, and an indexing measurement step for positioning rotary axes according to a plurality of indexing conditions and identifying geometric errors from sensor measured coordinate values corresponding to coordinate values obtained by measuring the target sphere with a sensor of a touch probe. Then, in the indexing measurement step, coordinates of the target sphere can be obtained by simply measuring the target sphere with the sensor only three times, using dimensions of the target sphere obtained in the initial position measurement step.
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What is claimed is: 1. A measurement system for measuring geometric errors of a multi-axis machine tool having three linear axes and two rotary axes, the multi-axis machine tool having a sensor provided in one of a main spindle and a table and a target provided in the other one, using an initial position measurement step for specifying coordinates of the target or the sensor and dimensions of the target, and an indexing measurement step for positioning the rotary axes according to a plurality of indexing conditions and identifying geometric errors from sensor measured coordinate values corresponding to coordinate values obtained by measuring the target with the sensor, wherein in the indexing measurement step, the target is measured with the sensor only three times to obtain center coordinates of the target, using the dimensions of the target obtained in the initial position measurement step. 2. The measurement system according to claim 1 , wherein: the target is a sphere; the dimensions of the target obtained in the initial position measurement step correspond to a diameter value or a radius value; and in the indexing measurement step, the diameter value or the radius value is referenced to obtain the sensor measured coordinate values so as to obtain center coordinates of the target. 3. The measurement system according to claim 2 , wherein the sensor performs a uniaxial operation along each of the three linear axes to approach the target, and center coordinates of the target are obtained by subtracting the diameter value or the radius value of the sphere serving as the target in the case of making the sensor approach the target from a plus direction of any of the linear axes, or center coordinates of the target are obtained by adding the diameter value or the radius value of the sphere serving as the target in the case of making the sensor approach the target from a minus direction of any of the linear axes.
using coordinate measuring machines · CPC title
Calibration or calibration artifacts (G01B3/30, G01B9/02072 take precedence) · CPC title
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