Method for Sludge Control in Wet Acid Etching
US-2015136736-A1 · May 21, 2015 · US
US9505651B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9505651-B2 |
| Application number | US-201314400919-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 29, 2013 |
| Priority date | May 31, 2012 |
| Publication date | Nov 29, 2016 |
| Grant date | Nov 29, 2016 |
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Described herein are various systems and methods for using acidic media to enhance the surface characteristics of glass articles while reducing the adverse effects of precipitate/sludge formation. The systems and methods generally implement a precipitation-capturing device that is configured to 1) permit formation of sludge thereon and 2) reduce formation of the sludge on other solid surfaces involved in the systems and methods.
Opening claim text (preview).
What is claimed is: 1. A system for treating a glass article, the system comprising: an etching vessel; an acidic medium disposed in the etching vessel; and a precipitation-capturing device disposed in the etching vessel and in fluid communication with the acidic medium; wherein the precipitation-capturing device is formed from a material that is not soluble in the acidic medium and is thermally stable to at least 60 degrees Celsius; wherein the precipitation-capturing device is configured to permit formation thereon of precipitates of constituent components of the glass article that are dissolved in the acidic medium; wherein the precipitation-capturing device is non-porous; wherein at least one surface of the precipitation-capturing device is a non-porous surface for nucleating said precipitates of the constituent components of the glass article on the at least one non-porous surface; and wherein the precipitation-capturing device is configured to reduce formation of the precipitates on a surface of the etching vessel, the glass article, and any other solid article disposed in the etching vessel relative to an identical system for treating the glass article that lacks the precipitation-capturing device. 2. The system of claim 1 , wherein the acidic medium comprises one or more of HF, H 2 SO 4 , H 2 S0 3 , H 3 PO 4 , H 3 P0 2 , HNO 3 , HCl, HBr, HOAc (acetic acid), citric acid, tartaric acid, ascorbic acid, ethylenediaminetetraacetic acid (EDTA), methanesulfonic acid, or toluenesulfonic acid. 3. The system of claim 1 , wherein the acidic medium comprises HF and one or more of HCl, HNO 3 or H 2 SO 4 . 4. The system of claim 1 , wherein the precipitation-capturing device comprises polyvinyl chloride, polytetrafluoroethylene, polyvinylidene fluoride, polypropylene, natural rubber, synthetic nitrile butadiene rubber, graphitic carbon, a fluoropolyrner elastomer, hexafluoropropylene, or perfluoromethylvinylether. 5. The system of claim 1 , wherein the precipitation-capturing device is at least partially submerged in the acidic medium. 6. The system of claim 1 , further comprising a temperature-increasing mechanism configured to elevate a temperature of the acidic medium, the glass article, the precipitation-capturing device, and/or the etching vessel. 7. A method for treating a glass article, the method comprising: providing a system for treating the glass article, the system comprising: an etching vessel; an acidic medium disposed in the etching vessel; and a precipitation-capturing device disposed in the etching vessel and in fluid communication with the acidic medium; wherein the precipitation-capturing device is formed from a material that is not soluble in the acid medium and is thermally stable to at least 60 degrees Celsius; wherein the precipitation-capturing device is configured to permit formation thereon of precipitates of constituent components of the glass article that are dissolved in the acidic medium; wherein the precipitation-capturing device is non-porous; wherein at least one surface of the precipitation-capturing device is a non-porous surface for nucleating said precipitates of the constituent components of the glass article on the at least one non-porous surface; and wherein the precipitation-capturing device is configured to reduce formation of the precipitates on a surface of the etching vessel, the glass article, and any other solid article disposed in the etching vessel relative to an identical system for treating the glass article that lacks the precipitation-capturing device; contacting the glass article with the acidic medium for a time effective to dissolve a portion of the glass article; nucleating precipitates of the constituent components of the glass article on the at least one non-porous surface. 8. The method of claim 7 , wherein the portion of the glass article comprises less than about 10 micrometers of a surface layer of the glass article. 9. The method of claim 7 , wherein the contacting comprises submerging at least a portion of the glass article in the acidic medium. 10. The method of claim 7 , wherein the contacting comprises spraying the acidic medium on at least a portion of the glass article in the etching vessel. 11. The method of claim 7 , further comprising elevating a temperature of the acidic medium, the glass article, the precipitation-capturing device, and/or the etching vessel. 12. The method of claim 11 , wherein the temperature of the acidic medium is about 40 degrees Celsius to about 60 degrees Celsius. 13. The method of claim 7 , further comprising seeding the precipitation-capturing device with a plurality of precipitates of constituent components of the glass article prior to contacting the glass article with the acidic medium. 14. The method of claim 13 , wherein seeding the precipitation-capturing device comprises: contacting a surface of the precipitation-capturing device with a seeding solution to wet the surface therewith, wherein the seeding solution comprises dissolved glass article constituent components; and drying the wetted seeding solution on the surface of the precipitation-capturing device. 15. The method of claim 7 , further comprising: removing the precipitation-capturing device from the etching vessel after the precipitation-capturing device is saturated with the precipitates of constituent components of the glass article. 16. The method of claim 15 , further comprising: cleaning the saturated precipitation-capturing device to remove at least a portion of the precipitates of constituent components of the glass article therefrom; and inserting the cleaned precipitation-capturing device into the etching vessel. 17. The method of claim 16 , further comprising: seeding the cleaned precipitation-capturing device with a plurality of precipitates of constituent components of the glass article prior to inserting. 18. The system of claim 1 , wherein the non-porous surface for nucleating said precipitates of the constituent components of the glass article is a roughened non-porous surface comprising at least one nucleation site.
with the semiconductor substrates being dipped in baths or vessels · CPC title
using mainly spraying means, e.g. nozzles · CPC title
Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work (B05C7/00 takes precedence; essentially involving spraying or electrostatic projection B05B) · CPC title
Electricity · mapped topic
Electricity · mapped topic
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