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Process for disposal of hexachlorodisilane-containing vapors
US9504959B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9504959-B2 |
| Application number | US-201113634508-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 9, 2011 |
| Priority date | Mar 12, 2010 |
| Publication date | Nov 29, 2016 |
| Grant date | Nov 29, 2016 |
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- Title
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Abstract
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Hexachlorodisilane and residues formed therefrom are disposed of without generating pyrophoric compositions by reaction with urea and alcohol in nonpolar solvent.
First claim
Opening claim text (preview).
The invention claimed is: 1. A process for disposing of hexachlorodisilane-containing vapors, comprising introducing hexachlorodisilane-containing vapors into a mixture comprising a nonpolar hydrocarbon which is liquid at 900 to 1100 hPa and 25° C., urea, and an alcohol which is liquid at 900 to 1100 hPa and 25° C. 2. The process for disposing of hexachlorodisilane-containing vapors of claim 1 , wherein the hydrocarbon has a boiling point below 100° C. at a pressure of 900 to 1100 hPa. 3. The process for disposing of hexachlorodisilane-containing vapors of claim 1 , wherein the hydrocarbon has 1 to 20 carbon atoms. 4. The process for disposing of hexachlorodisilane-containing vapors of claim 3 , wherein the hydrocarbon has 6 to 12 carbon atoms. 5. The process for disposing of hexachlorodisilane-containing vapors of claim 1 , wherein the hydrocarbon comprises xylene. 6. The process for disposing of hexachlorodisilane-containing vapors of claim 1 , wherein the alcohol has 1 to 6 carbon atoms. 7. The process for disposing of hexachlorodisilane-containing vapors of claim 1 , wherein at least one alcohol is selected from the group consisting of 1-pentanol, 2-pentanol, 3-pentanol, 1-butanol, 2-butanol, 3-butanol, 1-propanol, and 2-propanol.
Assignees
Inventors
Classifications
Inorganic halogen compounds · CPC title
Urea · CPC title
Hydrocarbons · CPC title
- B01D53/68Primary
Halogens or halogen compounds · CPC title
from CVD treatment or semi-conductor manufacturing · CPC title
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Frequently asked questions
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- What does patent US9504959B2 cover?
- Hexachlorodisilane and residues formed therefrom are disposed of without generating pyrophoric compositions by reaction with urea and alcohol in nonpolar solvent.
- Who is the assignee on this patent?
- Knies Wolfgang, Boegershausen Karin, Eiblmeier Hans, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification B01D53/68. Mapped technology areas include Operations & Transport.
- When was this patent published?
- Publication date Tue Nov 29 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).