Non-volatile memory device having asymmetrical control gates surrounding a floating gate and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-9502257-B2
Application number	US-201414337418-A
Country	US
Kind code	B2
Filing date	Jul 22, 2014
Priority date	Apr 23, 2014
Publication date	Nov 22, 2016
Grant date	Nov 22, 2016

Abstract

A non-volatile memory device and a method of manufacturing the non-volatile memory device, where the non-volatile memory device includes a floating gate insulating layer and a floating gate disposed on a substrate, a dielectric layer formed perpendicular to the floating gate insulating layer and at two sides of the floating gate, and a first control gate at a first side of the dielectric layer distal from the floating gate and a second control gate at a second side of the dielectric layer distal from the floating gate, wherein the first control gate and the second control gate are connected to each other, and a second width of the second control gate is wider than a first width of the first control gate. A length of a control gate of a non-volatile memory device may be extended to effectively preventing the generation of leakage current when a control gate is off.

First claim

What is claimed is:

1. A non-volatile memory device, the device comprising:
a floating gate insulating layer disposed on a substrate;
a floating gate insulated from the substrate by the floating gate insulating layer;
a first dielectric region formed perpendicular to the floating gate insulating layer on a first sidewall of the floating gate;
a second dielectric region formed perpendicular to the floating gate insulating layer on a second sidewall of the floating gate;
a f…

Assignees

• Magnachip Semiconductor Ltd

Inventors

• Cho Jeong Ho
• Kim Se Woon
• Kim Kyung Min
• Park Jung Goo

Classifications

• H10D30/6891

  Electricity · mapped topic

• H10D30/681

  Electricity · mapped topic

• H10D64/035 Primary

  Electricity · mapped topic

• H01L29/7881

  Electricity · mapped topic

• H01L27/11534

  Electricity · mapped topic