Charged particle beam apparatus, stage controlling method, and stage system

Patent metadata

Field	Value
Publication number	US-9502208-B2
Application number	US-201514747364-A
Country	US
Kind code	B2
Filing date	Jun 23, 2015
Priority date	Jul 7, 2014
Publication date	Nov 22, 2016
Grant date	Nov 22, 2016

Abstract

A stage system includes a stage that holds an object, a linear motor mechanism that moves the stage by a thrust force generated by a current flowing through the coil, and a control section that controls the current flowing through the coil. The current flowing through the coil in a state where the stage is maintained in the static state be greater than a minimum current amount required for generating the thrust force greater than a maximum static friction force of the stage with respect to the guide rails.

First claim

We claim:

1. A charged particle beam apparatus for obtaining an image by applying a charged particle beam to an object, the charged particle beam apparatus comprising:
a stage that moves the object along guide rails;
a linear motor mechanism that is made of a coil and a magnet, and moves the stage by a thrust force generated by a current flowing through the coil;
a control section that controls the current flowing through the coil; and
a brake that fixes the stage,
wherein…

Assignees

• Hitachi High Tech Corp

Inventors

• Mizuochi Masaki
• Nishioka Akira
• Nakagawa Shuichi
• Ogawa Hironori

Classifications

• H01J37/20 Primary

  Electricity · mapped topic

• H01J2237/20221

  Electricity · mapped topic

• H01J2237/20278

  Electricity · mapped topic