Acoustic lens for micromachined ultrasound transducers

Patent metadata

Field	Value
Publication number	US-9502023-B2
Application number	US-201414205123-A
Country	US
Kind code	B2
Filing date	Mar 11, 2014
Priority date	Mar 15, 2013
Publication date	Nov 22, 2016
Grant date	Nov 22, 2016

Abstract

Matching layers configured for use with ultrasound transducers are disclosed herein. In one embodiment, a transducer stack can include a capacitive micromachined ultrasound transducer (CMUT), an acoustic lens, and a matching layer therebetween. The matching layer can be made from a compliant material (e.g. an elastomer and/or an liquid) and configured for use with CMUTs. The matching layer can include a bottom surface overlying a top surface of the transducer and a top surface underlying a bottom surface of the lens.

First claim

We claim:

1. An ultrasound transducer stack comprising:
a transducer layer having an upper surface, wherein the transducer layer includes a micromachined ultrasound transducer, and wherein the upper surface of the transducer layer comprises an upper portion of the ultrasound transducer;
a lens layer having a lower surface overlying the upper surface of the transducer layer, wherein the lens layer comprises a lens material; and
an intermediate layer having an upper surface and a lower surface, wherein the upper surface of the intermediate layer underlies the lower surface of the lens layer, wherein a lower surface of the intermediate layer overlies the upper surface of the transducer layer, and wherein the intermediate layer comprises a material having a compliance greater than the compliances of the lens material and the upper portion of the ultrasound transducer.

2. An ultrasound transducer stack comprising:
a first layer having a top surface and a bottom surface, wherein the first layer comprises a PDMS-type silicone, and wherein the first layer has a first thickness and a first acoustic impedance;
a lens layer having a bottom surface overlying the top surface of the first layer, wherein the lens layer includes a top surface, a second thickness and a second acoustic impedance; and
a transducer layer having a top surface underlying the bottom surfaces of the first layer and the lens layer, wherein the transducer layer includes a micromachined ultrasound transducer configured to generate ultrasound at a center frequency, and wherein the top surface of the transducer layer comprises an upper membrane of the transducer.

3. The transducer stack of claim 1 wherein the intermediate layer comprises a material having a Young's Modulus of less than 100 MPa.

4. The transducer stack of claim 1 wherein the lens material comprises polymethylpentene.

5. The transducer stack of claim 1 wherein the lens material comprises a thermoset cross-linked styrene copolymer.

6. The transducer stack of claim 1 wherein the intermediate layer has a first thickness and the lens layer has a second thickness, and wherein the first thickness is less than the second thickness.

7. The transducer stack of claim 1 wherein the intermediate layer has a thickness that is less than ¼ wavelength of the center frequency.

8. The transducer stack of claim 1 wherein the micromachined ultrasound transducer is configure to generate ultrasound having a center frequency of 15 Megahertz (MHz) or greater.

9. The transducer stack of claim 1 wherein the bottom surface of the lens layer includes a plurality of ridges and a plurality of grooves therebetween.

10. The transducer stack of claim 1 wherein the intermediate layer comprises a matrix material loaded with a first plurality of micron-sized particles and a second plurality of nano-sized particles.

11. The transducer stack of claim 10 wherein the first plurality of micron-sized particles are selected based on a desired acoustic impedance of the intermediate layer.

12. The transducer stack of claim 1 , further comprising a matching layer disposed between the intermediate layer and the lens layer.

13. The transducer stack of claim 12 wherein the matching layer is configured to provide an acoustic impedance gradient between an acoustic impedance of the intermediate layer and an acoustic impedance of the lens layer.

14. The transducer stack of claim 1 wherein the lens layer is removably attached to the intermediate layer.

15. An ultrasound transducer stack for external use, the ultrasound transducer stack comprising:
a lens layer having an upper surface configured to be placed against a subject's skin, wherein the lens layer comprises a lens material having a first acoustic impedance and a first compliance;
a micromachined ultrasound transducer that includes an upper portion having a second compliance; and
an intermediate layer between the lens layer and the upper portion of the micromachined ultrasound transducer, wherein the intermediate layer includes a first material having a second acoustic impedance different from the first acoustic impedance, and wherein the first material has a compliance greater than the first and second compliances.

16. The transducer stack of claim 15 wherein the first material is a PDMS-type silicone.

17. The transducer stack of claim 15 wherein the first material includes water.

18. The transducer stack of claim 15 wherein the upper portion of the micromachined ultrasound transducer comprises an anti-corrosive material.

19. The transducer stack of claim 15 wherein the lens layer is removably attached to the intermediate layer.

20. The transducer stack of claim 15 wherein the lens layer further includes a lower surface having a plurality of ridges, and wherein adjacent ridges are separated by a groove.

21. The transducer stack of claim 15 wherein the first material includes a first plurality of micron-sized and a second plurality of nano-sized particles.

22. The transducer stack of claim 15 wherein the first material includes a fluid.

23. The transducer stack of claim 15 wherein the micromachined ultrasound transducer is a capacitive micromachined ultrasound transducer (CMUT).

24. The transducer stack of claim 15 wherein the micromachined ultrasound transducer is a piezoelectric micromachined ultrasound transducer (PMUT).

25. The transducer stack of claim 2 wherein the first layer comprises a material having a Young's Modulus of less than 100 MPa.

26. The transducer stack of claim 2 wherein the lens layer comprises polymethylpentene.

27. The transducer stack of claim 2 wherein the lens layer comprises a thermoset cross-linked styrene copolymer.

28. The transducer stack of claim 2 wherein the first thickness is less than the second thickness.

29. The transducer stack of claim 2 wherein the first thickness is less than ¼ wavelength of the center frequency.

30. The transducer stack of claim 2 wherein the center frequency is 15 MHz or greater.

Assignees

• Fujifilm Sonosite Inc

Inventors

• Li Wei
• Dunham Paul
• Aw Chak-Yoon
• Chaggares N Chris

Classifications

• G01N29/221

  Arrangements for directing or focusing the acoustical waves (electronic orientation or focusing G01N29/262; sound directing or focusing G10K11/26; mechanical steering of sound transducers or their beams G10K11/35) · CPC title

• G01N29/06

  Visualisation of the interior, e.g. acoustic microscopy {(medical or veterinary diagnosis using sonic waves A61B8/00; representation of acoustic wave distribution G01H3/125, G01H9/002; short-range imaging systems using reflection of acoustic waves G01S15/8906)} · CPC title

• G01N29/2406

  Electrostatic or capacitive probes, e.g. electret or cMUT-probes · CPC title

• G01N29/2437

  Piezoelectric probes · CPC title

• G10K11/30 Primary

  using refraction, e.g. acoustic lenses · CPC title