Nanogap transducers with selective surface immobilization sites

Patent metadata

Field	Value
Publication number	US-9500617-B2
Application number	US-201113977405-A
Country	US
Kind code	B2
Filing date	Dec 28, 2011
Priority date	Dec 28, 2011
Publication date	Nov 22, 2016
Grant date	Nov 22, 2016

Abstract

Embodiments of the invention provide transducers capable of functioning as electronic sensors and redox cycling sensors. Transducers comprise two electrodes separated by a nanogap. Molecular binding regions proximate to and within the nanogap are provided. Methods of fabricating nanogap transducers and arrays of nanogap transducers are also provided. Arrays of individually addressable nanogap transducers can be disposed on integrated circuit chips and operably coupled to the integrated circuit chip.

First claim

We claim:

1. A device comprising,
a substrate having a surface, and
a transducer disposed on the substrate surface, wherein the transducer comprises:
a first electrode and a second electrode wherein the first and the second electrodes are each coupled to conducting lines through which voltage can be applied to the first and second electrodes independently and a current measured from each of the first and second electrodes independently, and wherein the first electrode has a face and the second electrode has a face and the face of the first electrode is separated from the face of the second electrode by a distance that is less than 500 nm,
a cavity capable of containing a fluid between the face of the first electrode and the face of the second electrode,
an access hole through the second electrode that is capable of allowing a fluid to enter and leave the cavity,
a layer of preferentially functionalizable dielectric material disposed on the second electrode wherein the preferentially functionalizable dielectric layer has an exposed surface within the access hole, and
a layer of dielectric material that is not preferentially functionalizable disposed on the layer of preferentially functionalizable dielectric material.

2. The device of claim 1 wherein the face of the first electrode is separated from the face of the second electrode by a distance that is between 10 and 200 nm.

3. The device of claim 1 wherein the exposed surface of the preferentially functionalizable dielectric layer comprises a surface-attached silane or sulfur-containing molecule.

4. The device of claim 1 wherein the first or the second electrode is comprised of conducting diamond.

5. The device of claim 1 wherein both the first and second electrodes are comprised of conducting diamond.

6. The device of claim 1 wherein the first electrode is comprised of nanocrystalline conducting diamond.

7. The device of claim 1 wherein the first and the second electrodes are comprised of a material selected from the group consisting of conducting diamond, gold, and platinum.

8. The device of claim 1 wherein the substrate is an integrated circuit chip and the first electrode and the second electrode are independently electrically coupled to electronics within the integrated circuit chip through the conducting lines.

9. A device comprising,
a substrate having a surface, and
a transducer disposed on the substrate surface, wherein the transducer comprises:
a first electrode and a second electrode wherein the first and the second electrodes are each coupled to conducting lines through which voltage can be applied to the first and second electrodes independently and a current measured from each of the first and second electrodes independently, and wherein the first electrode has a face and the second electrode has a face and the face of the first electrode is separated from the face of the second electrode by a distance that is less than 500 nm,
a cavity capable of containing a fluid between the face of the first electrode and the face of the second electrode,
an access hole through the second electrode that is capable of allowing a fluid to enter and leave the cavity,
a preferentially functionalizable dielectric region disposed on a region of the face of the first electrode wherein the preferentially functionalizable dielectric region comprises an exposed surface, and
a layer of dielectric material that is not preferentially functionalizable coupled to the preferentially functionalizable dielectric region.

10. The device of claim 9 wherein the face of the first electrode is separated from the face of the second electrode by a distance that is between 10 and 200 nm.

11. The device of claim 9 wherein the preferentially functionalizable dielectric region has an exposed surface area of 40 nm.sup.2 to 500,000 nm.sup.2.

12. The device of claim 9 wherein the exposed surface of the preferentially functionalizable dielectric region comprises a surface-attached silane or sulfur-containing molecule.

13. The device of claim 9 wherein the first or the second electrode is comprised of conducting diamond.

14. The device of claim 9 wherein the first electrode is comprised of nanocryastalline conducting diamond.

15. The device of claim 9 wherein both the first and second electrodes are comprised of conducting diamond.

16. The device of claim 9 wherein the first and the second electrodes are comprised of a material selected from the group consisting of conducting diamond, gold, and platinum.

17. A device comprising,
a substrate having a surface, and
a transducer disposed on the substrate surface, wherein the transducer comprises:
a first electrode and a second electrode wherein the first and the second electrodes are each coupled to conducting lines through which voltage can be applied to the first and second electrodes independently and a current measured from each of the first and second electrodes independently, and wherein the first electrode has a face and the second electrode has a face and the face of the first electrode is separated from the face of the second electrode by a distance that is less than 500 nm,
a cavity capable of containing a fluid between the face of the first electrode and the face of the second electrode,
an access hole through the second electrode that is capable of allowing a fluid to enter and leave the cavity,
a preferentially functionalizable region in the first electrode wherein the first electrode is disposed on the substrate surface, wherein the first electrode comprises a hole, wherein the preferentially functionalizable region comprises a region of the substrate surface that is exposed through the hole in the first electrode, and
a layer of dielectric material that is not preferentially functionalizable coupled to the layer of preferentially functionalizable dielectric region.

18. The device of claim 17 wherein the face of the first electrode is separated from the face of the second electrode by a distance that is between 10 and 200 nm.

19. The device of claim 17 wherein the preferentially functionalizable region has an exposed surface area of 40 nm.sup.2 to 500,000 nm.sup.2.

20. The device of claim 17 wherein the preferentially functionalizable region comprises a surface-attached silane or sulfur-containing molecule.

21. The device of claim 17 wherein the first or the second electrode is comprised of conducting diamond.

22. The device of claim 17 wherein the first electrode is comprised of nanocryastalline conducting diamond.

23. The device of claim 17 wherein both the first and second electrodes are comprised of conducting diamond.

24. The device of claim 17 wherein the first and the second electrodes are comprised of a material selected from the group consisting of conducting diamond, gold, and platinum.

25. A system comprising,
a computer operably coupled to a integrated circuit chip wherein the integrated circuit chip comprises an array of transducers disposed on a surface of the integrated circuit chip,
a fluidic system capable of supplying fluids to the surface of the integrated circuit chip comprising the array of transducers,
wherein transducers that make up the array are electrically coupled to and individually addressable through electronics in the integrated circuit chip, and wherein a transducer comprises:
a first electrode and a second electrode wherein the first and the second electrodes are

Assignees

• Credo Grace M
• Elibol Oguz H
• Intel Corp

Inventors

• Credo Grace M
• Elibol Oguz H

Classifications

• G01N27/3278 Primary

  involving nanosized elements, e.g. nanogaps or nanoparticles (nanopores G01N33/48721; magnetic beads G01N27/745) · CPC title

• B82Y15/00 Primary

  Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors · CPC title

• G01N27/308 Primary

  at least partially made of carbon · CPC title

• G01N27/26

  by investigating electrochemical variables; by using electrolysis or electrophoresis · CPC title

• G01N27/3277 Primary

  being a redox reaction, e.g. detection by cyclic voltammetry (voltammetry per se G01N27/42, G01N27/48) · CPC title