Fast response humidity sensor

Patent metadata

Field	Value
Publication number	US-9500615-B2
Application number	US-201414456614-A
Country	US
Kind code	B2
Filing date	Aug 11, 2014
Priority date	Aug 9, 2013
Publication date	Nov 22, 2016
Grant date	Nov 22, 2016

Abstract

A water content sensor is disclosed. The sensor includes a wire filament configured with a Péclet number of 1 or less. The wire filament has an electrically conductive material with an electrical resistance that varies as a function of temperature. The sensor includes a pair of electrically conductive prongs coupled to opposite ends of the wire filament. Electrically conductive stubs may be coupled to the prongs. A structural support may be coupled to the prongs. The structural support structure may be comprised of silicon. The wire filament may be coupled to driving circuitry configured to supply an electric current to the wire filament to maintain the wire filament at one of an approximately constant current, an approximately constant voltage and an approximately constant temperature. The wire filament may be platinum or titanium.

First claim

What is claimed is:

1. A sensor system configured to measure water content of a fluid stream, the sensor system comprising:
a wire filament configured with a Peclet number of 1 or less across a predetermined operating range of fluid velocities of the fluid stream, the wire filament being comprised of an electrically conductive material and further configured to have an electrical resistance which varies as a function of temperature;
a pair of electrically conductive prongs coupled to opposite ends of the wire filament; and
a measuring circuit configured to measure at least one of a voltage or a current of the sensor system,
wherein the sensor system is further configured to correlate the at least one of a voltage or a current with at least one of a humidity or a thermal conductivity of the fluid stream using previously stored sensor characteristics.

2. The sensor system of claim 1 , further comprising electrically conductive stubs coupled to the prongs.

3. The sensor system of claim 1 , further comprising a structural support coupled to the prongs.

4. The sensor system of claim 3 , wherein the structural support structure is comprised of silicon.

5. The sensor system of claim 1 , wherein the wire filament is coupled to circuitry configured to supply an electric current to the wire filament to maintain the wire filament at one of an approximately constant current, an approximately constant voltage and an approximately constant temperature.

6. The sensor system of claim 1 , wherein the wire filament is comprised of at least one of platinum and titanium.

7. The sensor system of claim 1 , wherein the wire filament has at least one of a circular and rectangular cross section.

8. The sensor system of claim 1 , wherein the prongs are tapered or shaped on one end to reduce aerodynamical interference.

9. The sensor system of claim 1 , further comprising a second sensor having a second pair of electrically conductive prongs, the water content sensor being coupled to the second sensor by an electrically insulating connecting substrate.

10. The sensor system of claim 9 , wherein the connecting substrate has opposite sides, each side being formed with electrical connections that are electrically coupled to the pair of electrically conductive prongs and second pair of electrically conductive prongs respectively.

11. A method of forming a sensor system configured to measure water content of a fluid stream, the method comprising:
forming a wire filament configured with a Peclet number of 1 or less across a predetermined operating range of fluid velocities of the fluid stream, the wire filament being comprised of an electrically conductive material and further configured to have an electrical resistance which varies as a function of temperature;
coupling the wire filament to a pair of electrically conductive prongs coupled to opposite ends of the wire filament;
providing a measuring circuit to measure at least one of a voltage or a current of the sensor; and
storing sensor characteristics relating to a correlation between the at least one of a voltage or a current with at least one of a humidity or a thermal conductivity of the fluid stream.

12. The method of claim 11 , further comprising coupling electrically conductive stubs to the prongs.

13. The method of claim 11 , further comprising forming a structural support coupled to the prongs.

14. The method of claim 13 , wherein the structural support structure is comprised of silicon.

15. The method of claim 11 , further comprising coupling the wire filament to circuitry configured to supply an electric current to the wire filament to maintain the wire filament at one of an approximately constant current, an approximately constant voltage and an approximately constant temperature.

16. The method of claim 11 , wherein the wire filament is comprised of at least one of platinum and titanium.

17. The method of claim 11 , further comprising forming the wire filament with at least one of a circular and rectangular cross section.

18. The method of claim 11 , further comprising forming prongs that are tapered or shaped on one end to reduce aerodynamical interference.

19. The method of claim 11 , further comprising providing a second sensor having a second pair of electrically conductive prongs, the water content sensor being coupled to the second sensor by an electrically insulating connecting substrate.

20. The method of claim 19 , wherein the connecting substrate has opposite sides, each side being formed with electrical connections that are electrically coupled to the pair of electrically conductive prongs and second pair of electrically conductive prongs respectively.

21. A method of detecting water content in a fluid flow, the method comprising:
establishing a current flow in a wire filament in a first sensor, the wire filament being configured with a Peclet number of 1 or less across a predetermined operating range of fluid velocities, the wire filament being comprised of an electrically conductive material and further configured to have an electrical resistance which varies as a function of temperature;
disposing the wire filament in the fluid flow;
measuring at least one of a voltage across or a current flowing through the wire filament; and
correlating at least one of the measured voltage or current to at least one of a humidity or a thermal conductivity of the fluid flow using previously stored sensor characteristics.

Assignees

• Hultmark Marcus
• Arwatz Gilad
• Fan Yuyang
• Vallikivi Margit
• Univ Princeton

Inventors

• Hultmark Marcus
• Arwatz Gilad
• Fan Yuyang
• Vallikivi Margit

Classifications

• G01N27/125

  Composition of the body, e.g. the composition of its sensitive layer · CPC title

• G01N27/121 Primary

  for determining moisture content, e.g. humidity, of the fluid (moisture content of the tested material G01N27/048) · CPC title

• Y10T29/49085

  Thermally variable · CPC title