Differential pressure type flowmeter and flow controller provided with the same

Patent metadata

Field	Value
Publication number	US-9500503-B2
Application number	US-201514625200-A
Country	US
Kind code	B2
Filing date	Feb 18, 2015
Priority date	Feb 20, 2014
Publication date	Nov 22, 2016
Grant date	Nov 22, 2016

Abstract

There is provided a differential pressure type flowmeter that includes an orifice provided in a main flow channel, a first pressure sensor configured to detect pressure of fluid on an upstream side of the orifice, a second pressure sensor configured to detect pressure of fluid on a downstream side of the orifice, a first pressure introduction flow channel configured to guide the fluid on the upstream side of the orifice to the first pressure sensor, and a second pressure introduction flow channel configured to guide the fluid on the downstream side of the orifice to the second pressure sensor, wherein a flow channel length and a flow channel diameter of the first pressure introduction flow channel coincide with those of the second pressure introduction flow channel, respectively, and a ratio of the flow channel length to the flow channel diameter is not less than 20 times and not more than 30 times.

First claim

The invention claimed is:

1. A differential pressure type flowmeter comprising:
a main flow channel configured to allow fluid to flow;
an orifice provided in the main flow channel;
an upstream pressure sensor configured to detect pressure of fluid on an upstream side of the orifice;
a downstream pressure sensor configured to detect pressure of fluid on a downstream side of the orifice;
a first flow channel communicating with the main flow channel, and configured to guide the fluid on the upstream side of the orifice to the upstream pressure sensor; and
a second flow channel communicating with the main flow channel, and configured to guide the fluid on the downstream side of the orifice to the downstream pressure sensor, wherein
the upstream pressure sensor includes a first sensor body that detects pressure of fluid which flows from the main flow channel into a first fluid chamber through the first flow channel,
the downstream pressure sensor includes a second sensor body that detects pressure of fluid which flows from the main flow channel into a second fluid chamber through the second flow channel,
a first flow channel length of the first flow channel coincides with a second flow channel length of the second flow channel, the first flow channel length being a length from the main flow channel to an inlet of the first fluid chamber, the second flow channel length being a length from the main flow channel to an inlet of the second fluid chamber,
a first flow channel diameter of the first flow channel coincides with a second flow channel diameter of the second flow channel, and
a ratio of the first flow channel length to the first flow channel diameter and a ratio of the second flow channel length to the second flow channel diameter are not less than 20 times and not more than 30 times, respectively.

2. The differential pressure type flowmeter according to claim 1 , wherein
the ratio of the first flow channel length to the first flow channel diameter and the ratio of the first flow channel length to the first flow channel diameter are 25 times, respectively.

3. The differential pressure type flowmeter according to claim 2 , wherein
the flow channel length is 50 mm, and the flow channel diameter is 2 mm.

4. The differential pressure type flowmeter according to claim 1 , wherein
the main flow channel, the first flow channel, and the second flow channel are formed inside a body part formed by a resin material.

5. The differential pressure type flowmeter according to claim 4 , wherein
a cooling structure in which a contact area with outside air is increased is formed on an outer peripheral surface of the body part that forms the first flow channel and the second flow channel.

6. The differential pressure type flowmeter according to claim 5 , wherein
the cooling structure is a fin structure in which annular recessed parts and annular protruding parts are alternately arranged along a flow channel direction of the first flow channel and the second flow channel.

7. The differential pressure type flowmeter according to claim 1 , comprising:
a first outset configured to discharge the fluid guided to the upstream pressure sensor through the first flow channel, to outside; and
a second outlet configured to discharge the fluid guided to the downstream pressure sensor through the second flow channel, to the outside.

8. A flow controller comprising:
the differential pressure type flowmeter according to claim 1 ; and
a control unit configured to control a flow rate of fluid that flows out of a flow channel outlet, by using a measured value of the differential pressure type flowmeter.

Assignees

• Surpass Ind Co Ltd

Inventors

• Igarashi Hiroki

Classifications

• G01F1/42 Primary

  Orifices or nozzles · CPC title

• Y10T137/7722

  Line condition change responsive valves · CPC title

• Y10T137/7759

  Responsive to change in rate of fluid flow · CPC title

• G05D7/00

  Control of flow (level control G05D9/00; control of flow ratio G05D11/00) · CPC title

• G01F5/005

  by measuring pressure or differential pressure, created by the use of flow constriction · CPC title