Vacuum deposition device and method of manufacturing organic EL device

Patent metadata

Field	Value
Publication number	US-9496527-B2
Application number	US-201314421418-A
Country	US
Kind code	B2
Filing date	Aug 2, 2013
Priority date	Aug 13, 2012
Publication date	Nov 15, 2016
Grant date	Nov 15, 2016

Abstract

The present invention relates to a vacuum deposition device that includes a film forming chamber and a series of discharge circuit which evaporates the film forming materials and discharges the evaporated film forming materials toward a substrate. The discharge circuit is constituted of: evaporating parts, a manifold group; a film forming material discharge part; and a shutter member. In the film forming material discharge part, discharge openings which are communicated with manifold portions are distributed. Flow restrictions are provided in the vicinity of open ends of the discharge openings. Open areas of the flow restrictions differ from each other for the respective manifold portions. Consideration is taken such that the film forming materials which are formed into layers having similar film thicknesses are filled into the evaporating parts belonging to the same group.

First claim

The invention claimed is:

1. A method of manufacturing an organic EL device where an organic Electro Luminescence (EL) device including a plurality of co-deposition organic layers is manufactured by performing a co-deposition step for forming the co-deposition organic layers by simultaneously discharging a main film forming material and a sub film forming material using a vacuum deposition device a plurality of times, the vacuum deposition device comprising a first single evaporating part belonging to a first single discharge system; a second single evaporating part belonging to a second single discharge system; a film forming chamber where a pressure is reducible and a substrate is disposed; and a film forming material discharge part having a plurality of first discharge openings belonging to the first single discharge system and a plurality of second discharge openings belonging to the second single discharge system, the method comprising for the plurality of times: evaporating the main film forming material in the first single evaporating part belonging to the first single discharge system;
evaporating the sub film forming material in the second single evaporating part belonging to the second single discharge system;
discharging vapor of the main film forming material from the material discharge part to the substrate in the film forming chamber through the first discharge openings belonging to the first single discharge system; and
at the same time as discharging vapor of the main film forming material, discharging vapor of the sub film forming material from the material discharge part to the substrate in the film forming chamber through the second discharge openings belonging to the second single discharge system, thereby forming film on the substrate, wherein
a plurality of kinds of main film forming materials are selectively charged into evaporating parts which belong to the same evaporating part group, a plurality of kinds of sub film forming materials are selectively charged into evaporating parts which belong to another evaporating part group, and the co-deposition organic layers are formed as films on a substrate by evaporating the respective film forming materials in the evaporating parts.

2. The method of manufacturing an organic EL device according to claim 1 , wherein in the co-deposition step, a main film forming material is evaporated in a single evaporating part belonging to a single discharge system, and vapor of the main film forming material is discharged through the discharge openings belonging to the discharge system, while the sub film forming material is evaporated in a single evaporating part belonging to a single discharge system which differs from the discharge system, and vapor of the sub film forming material is discharged through the discharge openings belonging to the discharge system.

3. The method of manufacturing an organic EL device according to claim 1 , wherein
the vacuum deposition device comprises: a large capacity discharge system where a total area of discharge openings in an opening group to which the discharge openings belong is large; and a small capacity discharge system where a total area of discharge openings in an opening group to which the discharge openings belong is smaller than the total area of discharge openings of the large capacity discharge system,
the main film forming material is a component contained in a large amount in the layer formed as a film, the sub film forming material is a content contained in a smaller amount than the main film forming material in the layer formed as a film,
the main film forming material is selectively charged into the evaporating part belonging to the large capacity discharge system, and
the sub film forming material is selectively charged into the evaporating part belonging to the small capacity discharge system.

4. The method of manufacturing an organic EL device according to claim 1 , wherein the vacuum deposition device is configured such that a film thickness sensor and a checking discharge opening for checking a film thickness are disposed in the inside of the film forming chamber, and a manifold portion and the checking discharge opening for checking a film thickness are communicated with each other, a co-deposition step for forming a co-deposition organic layer is performed by discharging a main film forming material through the discharge openings belonging to one or more discharge systems and, simultaneously, by discharging a sub film forming material through the discharge openings belonging to one or more other discharge systems, and a state where a film is formed by using only the main film forming material and/or a state where a film is formed by using only the sub film forming material is detectable at the time of performing the co-deposition step.

5. The method of manufacturing an organic EL device according to claim 1 , wherein the organic EL device is configured such that a functional layer is interposed between two electrode layers,
the functional layer includes a plurality of light emitting layers in each of which a host material which is the main film forming material is doped with a fluorescent material or a phosphorescent material which is the sub film forming material, and
at least two light emitting layers are formed as a film in the inside of the film forming chamber.

Assignees

• Kaneka Corp

Inventors

• Kako Shuhei

Classifications

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

• C23C14/24 Primary

  Vacuum evaporation · CPC title

• H01L51/56 Primary

  Electricity · mapped topic

• C23C14/12

  Organic material · CPC title

• C23C14/243

  Crucibles for source material (C23C14/28, C23C14/30 take precedence) · CPC title