Temperature measurement device

Patent metadata

Field	Value
Publication number	US-9494466-B2
Application number	US-201414169651-A
Country	US
Kind code	B2
Filing date	Jan 31, 2014
Priority date	Feb 4, 2013
Publication date	Nov 15, 2016
Grant date	Nov 15, 2016

Abstract

A temperature measurement device is provided with: light collection means; extraction means; optical intensity calculation means; and temperature measurement means. The light collection means collects the emission spectrum of a measurement subject. The extraction means extracts light having the wavelength of the atomic spectral lines and light having a wavelength in a wavelength region where there are no atomic spectral lines, from the emission spectrum collected by the aforementioned light collection means. The optical intensity calculation means calculates the optical intensities of the light extracted by the aforementioned extraction means. The temperature measurement means calculates the temperature of the aforementioned measurement subject, based on the intensities of the beams calculated by the aforementioned optical intensity calculation means.

First claim

What is claimed is:

1. A temperature measurement device that measures temperature using an emission spectrum of a measurement subject, comprising:
a light collection means for collecting an emission spectrum of said measurement subject;
an extraction means for extracting light having a wavelength of atomic spectral lines and light having another wavelength in a wavelength region where there are no atomic spectral lines, from said emission spectrum collected by said light collection means;
an optical intensity calculation means for calculating an intensity of light for each of wavelength extracted by said extraction means; and
a temperature measurement means for calculating a temperature of said measurement subject based on an intensity of each of beams calculated by said optical intensity calculation means,
wherein said extraction means extracts two beams having atomic spectral line wavelengths and at least one beam having said another wavelength in the wavelength region where there are no atomic spectral lines,
wherein said temperature measurement means further comprises:
an optical intensity ratio calculation means for calculating an intensity ratio of an atomic spectral line pair emitted by said measurement subject, based on said intensity of said two beams having wavelengths of said atomic spectral lines extracted by said extraction means, and said at least one beam intensity having a wavelength in the wavelength region in which there are no atomic spectral lines, extracted by said extraction means, and
a temperature calculation means for calculating a temperature of said measurement subject, based on said intensity ratio of said atomic spectral line pair calculated by said optical intensity ratio calculation means,

wherein said optical intensity ratio calculation means calculates two or more intensity ratios of atomic spectral line pairs emitted by said measurement subject, and
wherein said temperature calculation means calculates the temperature of said measurement subject by deciding on said intensity ratio that is to be used for temperature calculation, of said two or more intensity ratios calculated by said optical intensity ratio calculation means based on temperature measurement regions of said atomic spectral line pairs used for intensity ratio calculation by said optical intensity ratio calculation means, from said intensity ratio that is thus decided upon.

2. The temperature measurement device according to claim 1 ,
wherein said temperature calculation means identifies an intensity ratio of an atomic spectral line pair as an intensity ratio that is to be used for calculation of a temperature of said measurement subject on the basis that said temperature of said measurement subject is included in an appropriate temperature measurement range of said atomic spectral line pair.

3. The temperature measurement device according to claim 1 ,
wherein said optical intensity ratio calculation means calculates an intensity ratio of atomic spectral lines by calculating a ratio of two values obtained by respectively subtracting an intensity of a beam from a wavelength region where there are no atomic spectral lines from intensities of two beams having wavelengths of atomic spectral lines.

4. The temperature measurement device according to claim 1 ,
wherein said measurement subject is constituted by arc plasma generated in a gas containing sulfur hexafluoride, using electrodes containing copper, and
said atomic spectral line wavelengths are any of 493 nm, 500 nm, 502 nm, 504 nm, 507 nm, 511 nm, 515 nm, 518 nm, 522 nm, 540 nm, 548 nm, 553 nm, 561 nm, 565 nm, 567 nm, 571 nm, 579 nm, 586 nm, 625 nm, 636 nm, 642 nm, 657 nm, 658 nm, 677 nm, 688 nm, 684 nm, 686 nm, 689 nm, 691 nm, 705 nm, 714 nm, 721 nm, 732 nm, 734 nm, 741 nm, 743 nm, 744 nm, 749 nm, 750 nm, 755 nm, 757 nm, 776 nm, or 781 nm.

5. The temperature measurement device according to claim 1 ,
wherein said measurement subject is constituted by arc plasma generated in a gas containing carbon dioxide, using electrodes containing copper, and
said atomic spectral line wavelengths are any of 493 nm, 502 nm, 504 nm, 507 nm, 511 nm, 515 nm, 522 nm, 561 nm, 579 nm, 741 nm, and 743 nm.

6. The temperature measurement device according to claim 1 , wherein said light collection means further comprises a light collection restriction means for restricting a range of collection of the emission spectrum of said measurement subject.

7. The temperature measurement device according to claim 6 ,
wherein said light collection restriction means is of tubular shape with openings at a top and bottom, having an inside surface processed to a specular finish and provided with a mounting port for fixing said light collection means in a side face thereof, and
in said light collection means, said light collection restriction means is fixed by connecting with said mounting port, and said light collection means collects the emission spectrum of light from the measurement subject flowing into an interior of said light collection restriction means.

Assignees

• Toshiba Kk

Inventors

• Uchii Toshiyuki
• Mori Tadashi

Classifications

• G01J5/0821

  Optical fibres · CPC title

• G01J2005/0074

  having separate detection of emissivity · CPC title

• G01K11/12

  using changes in colour, translucency or reflectance · CPC title

• G01J5/602 Primary

  using selective, monochromatic or bandpass filtering · CPC title

• G01J5/0896

  using a light source, e.g. for illuminating a surface · CPC title