Transmission Line RF Applicator for Plasma Chamber
US-2015340204-A1 · Nov 26, 2015 · US
US9490516B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9490516-B2 |
| Application number | US-201414564140-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 9, 2014 |
| Priority date | Jun 28, 2012 |
| Publication date | Nov 8, 2016 |
| Grant date | Nov 8, 2016 |
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A transmission line portion of a flat cable includes first regions and second regions connected alternately. In the first region, the transmission line portion is a flexible tri-plate transmission line including a dielectric element including a signal conductor, a first ground conductor including opening portions, and a second ground conductor which is a solidly filled conductor. In the second region, the transmission line portion is a hard tri-plate transmission line including a wide dielectric element including a meandering conductor, and a first ground conductor and a second ground conductor which are solidly filled conductors. A variation width of the characteristic impedance in the second region is larger than a variation width of the characteristic impedance in the first region.
Opening claim text (preview).
What is claimed is: 1. A high-frequency transmission line comprising: a flexible planar dielectric element elongated in one direction, the dielectric element having a predetermined width in a direction perpendicular or substantially perpendicular to a longitudinal direction and having a predetermined thickness; a signal conductor disposed in the dielectric element and configured to extend along the longitudinal direction; and a first ground conductor opposing the signal line conductor and extending in the longitudinal direction; wherein at least one of the signal conductor and the first ground conductor has a characteristic impedance cyclically varied along the longitudinal direction, and includes a first region and a second region with different variation widths of the characteristic impedance; the variation width of the characteristic impedance in the second region is larger than the variation width of the characteristic impedance in the first region; and the flexible planar dielectric element is bent or curved only at the first region in a direction of the predetermined thickness of the flexible planar dielectric element. 2. An electronic device comprising: the high-frequency transmission line according to claim 1 ; a plurality of circuit boards connected to each other by the high-frequency transmission line; and a housing that houses the circuit boards. 3. The electronic device according to claim 2 , wherein in the first region, the first ground conductor is configured to extend along the longitudinal direction, and includes two elongated conductors disposed at both ends in the width direction with a space between each other and configured to extend in the longitudinal direction, and a plurality of bridge conductors that connect between the two elongated conductors at intervals along the longitudinal direction. 4. The electronic device according to claim 3 , wherein the second region is configured to rotate a phase of a high-frequency signal by a predetermined amount through transmission between an input end and an output end. 5. The electronic device according to claim 4 , wherein in the second region, the signal conductor is a conductor line with a length that rotates the phase of the high-frequency signal by the predetermined amount and the first ground conductor is a conductor arranged to extend over an entirety or substantially the entirety of one end surface of the dielectric element. 6. The electronic device according to claim 4 , further comprising: a third ground conductor provided in the second region and located at or substantially at a same position as the signal conductor in a thickness direction, the third ground conductor being configured to extend in parallel or substantially in parallel with the signal conductor with a constant or a substantially constant gap therebetween, and the third ground conductor being connected to the first ground conductor. 7. The electronic device according to claim 2 , wherein the high-frequency transmission line is bent at at least one location in the first region. 8. The electronic device according to claim 7 , wherein a width of the second region is larger than a width of the first region. 9. The electronic device according to claim 7 , wherein the second region is provided at a plurality of locations along the longitudinal direction, and a plurality of the second regions have the same or substantially the same variation width of the characteristic impedance. 10. The electronic device according to claim 7 , further comprising a second ground conductor opposite to the first ground conductor with the signal conductor interposed therebetween. 11. The electronic device according to claim 7 , further comprising a connector member configured to be connected to the signal conductor provided at at least one end in the longitudinal direction. 12. The high-frequency transmission line according to claim 1 , wherein in the first region, the first ground conductor is configured to extend along the longitudinal direction, and includes two elongated conductors disposed at both ends in the width direction with a space between each other and configured to extend in the longitudinal direction, and a plurality of bridge conductors that connect between the two elongated conductors at intervals along the longitudinal direction. 13. The high-frequency transmission line according to claim 12 , wherein the second region is configured to rotate a phase of a high-frequency signal by a predetermined amount through transmission between an input end and an output end. 14. The high-frequency transmission line according to claim 13 , wherein in the second region, the signal conductor is a conductor line with a length that rotates the phase of the high-frequency signal by the predetermined amount and the first ground conductor is a conductor arranged to extend over an entirety or substantially the entirety of one end surface of the dielectric element. 15. The high-frequency transmission line according to claim 13 , further comprising: a third ground conductor provided in the second region and located at or substantially at a same position as the signal conductor in a thickness direction, the third ground conductor being configured to extend in parallel or substantially in parallel with the signal conductor with a constant or a substantially constant gap therebetween, and the third ground conductor being connected to the first ground conductor. 16. The high-frequency transmission line according to claim 1 , wherein a width of the second region is larger than a width of the first region. 17. The high-frequency transmission line according to claim 1 , wherein the second region is provided at a plurality of locations along the longitudinal direction, and a plurality of the second regions have the same or substantially the same variation width of the characteristic impedance. 18. The high-frequency transmission line according to claim 1 , further comprising a second ground conductor opposite to the first ground conductor with the signal conductor interposed therebetween. 19. The high-frequency transmission line according to claim 1 , further comprising a connector member configured to be connected to the signal conductor provided at at least one end in the longitudinal direction.
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