Displacement sensor, spectral characteristic measuring apparatus, color measuring apparatus, planar measured object quality monitoring apparatus, displacement measuring method, spectral characteristic measuring method, and color measuring method

Patent metadata

Field	Value
Publication number	US-9488468-B2
Application number	US-201314051855-A
Country	US
Kind code	B2
Filing date	Oct 11, 2013
Priority date	Oct 12, 2012
Publication date	Nov 8, 2016
Grant date	Nov 8, 2016

Abstract

A displacement sensor includes a light source unit configured to apply light with different plural wavelengths in a direction oblique to a measurement region of a planar measured object, a spectroscope configured to measure spectral distribution of light reflected by the measurement region, a feature amount extracting module configured to extract a feature amount of the spectral distribution, and a displacement calculating module configured to calculate displacement of the measurement region based on the extracted feature amount and a relation between displacement and a feature amount acquired previously.

First claim

What is claimed is:

1. A spectral characteristic measuring apparatus comprising:
a first light source unit configured to apply first light for spectral characteristic measurement to a measurement region of a planar measured object;
a second light source unit configured to apply second light for displacement measurement from a reference point of the planar measured object, in a direction oblique to a surface including the measurement region, the second light having a wavelength range that does not overlap with a wavelength range of the first light;
a spectroscope configured to measure a first spectral distribution of first light applied from the first light source unit and then reflected by the measurement region and a second spectral distribution of second light applied from the second light source unit and then reflected by the measurement region;
a feature amount extractor configured to extract a feature amount of the second spectral distribution of the second light related to the second light source unit;
a spectral characteristic calculator configured to calculate spectral characteristics based on the first spectral distribution of the first light related to the first light source unit; and
a spectral characteristic corrector configured to correct the spectral characteristics based on the extracted feature amount and a relation between spectral characteristics and a feature amount acquired previously,
wherein the second light source unit includes a light source configured to emit light with a wavelength of a predetermined range, and an optical element in which a transmission wavelength or a reflection wavelength changes according to an incidence angle or an incidence position,
wherein the second light is light whose wavelength changes according to an emission direction, which is generated by applying the light from the light source to the optical element obliquely at an angle where an optical axis of the light source is constant,
wherein a wavelength distribution is generated on the surface including the measurement region by the second light so that the light reflected from the measurement region is changed according to the displacement of the planar measured object, and
wherein the feature amount is a peak wavelength or a peak frequency of the second spectral distribution.

2. The spectral characteristic measuring apparatus as claimed in claim 1 , wherein the second light source unit includes a plurality of light sources with different wavelengths.

3. A color measuring apparatus comprising:
a spectral characteristic measuring apparatus as claimed in claim 1 in which the spectral characteristic is spectral reflectance; and
a color operator configured to measure a color of the measurement region based on the corrected spectral reflectance.

4. The color measuring apparatus as claimed in claim 3 , wherein the second light source unit applies the light, whose wavelength changes according to an emission direction, in the direction oblique to the measurement region.

5. The color measuring apparatus as claimed in claim 3 , wherein the second light source unit includes a plurality light sources with different wavelengths.

6. A planar measured object quality monitoring apparatus, comprising:
a scanning head; and
a color measuring apparatus as claimed in claim 3 mounted in the scanning head.

7. A spectral characteristic measuring method comprising:
applying first light, by a first light source unit, for spectral characteristic measurement to a measurement region of a planar measured object;
measuring spectral characteristics based on spectral distribution of the first light reflected by the measurement region;
applying second light, by a second light source unit, for displacement measurement from a reference point of the planar measured object in a direction oblique to a surface including the measurement region, the second light having a wavelength range that does not overlap with a wavelength range of the first light source unit;
extracting a feature amount of spectral distribution of the second light reflected by the measurement region; and
correcting the measured spectral characteristics based on the extracted feature amount and a relation between spectral characteristics and a feature amount acquired previously,
wherein the second light source unit includes a light source configured to emit light with a wavelength of a predetermined range, and an optical element in which a transmission wavelength or a reflection wavelength changes according to an incidence angle or an incidence position,
wherein the second light is light whose wavelength changes according to an emission direction, which is generated by applying the light from the light source to the optical element obliquely at an angle where an optical axis of the light source is constant,
wherein a wavelength distribution is generated on the surface including the measurement region by the second light so that the light reflected from the measurement region is changed according to the displacement of the planar measured object, and
wherein the feature amount is a peak wavelength or a peak frequency of the second spectral distribution.

8. A color measuring method comprising:
applying first light, by a first light source unit, for spectral characteristic measurement to a measurement region of a planar measured object;
calculating spectral reflectance based on spectral distribution of the first light reflected by the measurement region;
applying second light, by a second light source unit, for displacement measurement from a reference point of the planar measured object, in a direction oblique to a surface including the measurement region, the second light having a wavelength range that does not overlap with a wavelength range of the first light source unit;
extracting a feature amount of spectral distribution of the second light reflected by the measurement region;
correcting the calculated spectral reflectance based on the extracted feature amount and a relation between spectral reflectance and a feature amount acquired previously; and
measuring a color of the measurement region based on the corrected spectral reflectance,
wherein the second light source unit includes a light source configured to emit light with a wavelength of a predetermined range, and an optical element in which a transmission wavelength or a reflection wavelength changes according to an incidence angle or an incidence position,
wherein the second light is light whose wavelength changes according to an emission direction, which is generated by applying the light from the light source to the optical element obliquely at an angle where an optical axis of the light source is constant,
wherein a wavelength distribution is generated on the surface including the measurement region by the second light so that the light reflected from the measurement region is changed according to the displacement of the planar measured object, and
wherein the feature amount is a peak wavelength or a peak frequency of the second spectral distribution.

9. The spectral characteristic measuring apparatus as claimed in claim 1 , wherein the optical element is an optical filter using a dielectric multilayer film.

Assignees

• Yokogawa Electric Corp

Inventors

• Tsujii Atsushi
• Chida Naomichi
• Nishida Kazufumi

Classifications

• G01J3/0291 Primary

  Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements · CPC title

• G01J3/50

  using electric radiation detectors · CPC title

• G01B2210/50

  Using chromatic effects to achieve wavelength-dependent depth resolution · CPC title

• G01J3/10

  Arrangements of light sources specially adapted for spectrometry or colorimetry · CPC title

• G01B11/026

  by measuring distance between sensor and object (G01B11/0608 takes precedence) · CPC title