Utilization of Mechanical Quadrature in Silicon MEMS Vibratory Gyroscope to Increase and Expand the Long Term In-Run Bias Stability
US-2015285658-A1 · Oct 8, 2015 · US
US9482553B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9482553-B2 |
| Application number | US-201414501083-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 30, 2014 |
| Priority date | Sep 30, 2014 |
| Publication date | Nov 1, 2016 |
| Grant date | Nov 1, 2016 |
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Methods and apparatus for calibrating a gyroscope without rotating the instrument. In one example, a calibration method includes operating the gyroscope in a self-oscillation loop to generate x-axis and y-axis drive signals, adding forcing signals to the x-axis and y-axis drive signals to produce pick-off x-axis and y-axis signals, measuring the pick-off x-axis and y-axis signals to produce measurement data, determining a relative phase between the pick-off x-axis and y-axis signals, based on the measurement data and the relative phase, estimating parameters of the gyroscope, based on the measurement data and the estimated parameters, calculating estimated position signals to calibrate the gyroscope.
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What is claimed is: 1. A method of calibrating a gyroscope comprising: operating the gyroscope in a self-oscillation loop to generate x-axis and y-axis drive signals; adding sideband forcing signals to the x-axis and y-axis drive signals to produce pick-off x-axis and y-axis signals; measuring the pick-off x-axis and y-axis signals to produce measurement data; determining a relative phase between the pick-off x-axis and y-axis signals; based on the measurement data and the relative phase, estimating parameters of the gyroscope; and based on the measurement data and the estimated parameters, calculating estimated position signals to calibrate the gyroscope. 2. The method of claim 1 , further comprising removing feed forward noise from the pick-off x-axis and y-axis signals. 3. The method of claim 1 , wherein operating the gyroscope in the self-oscillation loop includes configuring the gyroscope with the self-oscillation loop on the x-axis and the y-axis as a closed-loop sensing channel. 4. The method of claim 3 , wherein operating gyroscope in the self-oscillation loop includes applying off-resonant voltage signals to the gyroscope and measuring feed forward terms. 5. The method of claim 4 , further comprising exciting gyroscope sidebands using a plurality of input frequencies and recording the measurement data as a function of time, the measurement data including the input frequencies, an x-axis drive voltage (V fx ), a y-axis drive voltage (V fy ), an x-axis pick-off voltage (V x ), a y-axis pick-off voltage (V y ), and a phase reference voltage. 6. The method of claim 5 , wherein the plurality of input frequencies are equally spaced. 7. The method of claim 5 , further comprising: reversing the axes of the self-oscillation loop and the closed-loop sensing channel; and repeating the step of exciting the gyroscope sidebands to produce second measurement data, the second measurement data including a reversed x-axis drive voltage, a reversed y-axis drive voltage, a reversed x-axis pick-off voltage, a reversed y-axis pick-off voltage, and a reversed phase reference voltage. 8. The method of claim 1 , further comprising, based on the measurement data and the estimated parameters, determining an angular rate of the gyroscope. 9. The method of claim 1 , estimating the parameters includes estimating coupling terms of the sideband forcing signals, damping terms, cross-damping terms, cross-stiffness terms, a phase variation of the oscillator loop from −π/2, and a magnitude of a ratio of the pick-off x-axis and y-axis signals. 10. The method of claim 9 , wherein the coupling terms of the sideband forcing signals include forcing signal misalignments. 11. The method of claim 1 , wherein adding the sideband forcing signals includes modulating the pick-off x-axis and y-axis signals.
Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces · CPC title
Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass (testing, calibrating or compensating compasses G01C17/38) · CPC title
Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719 · CPC title
initial alignment, calibration or starting-up of inertial devices · CPC title
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