Acid generator compounds and photoresists comprising same
US-2016347709-A1 · Dec 1, 2016 · US
US9481643B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9481643-B2 |
| Application number | US-201314416003-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 16, 2013 |
| Priority date | Jul 18, 2012 |
| Publication date | Nov 1, 2016 |
| Grant date | Nov 1, 2016 |
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The present invention relates to novel compounds containing fluorinated end groups, to the use thereof as surface-active substances, and to compositions comprising these compounds.
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The invention claimed is: 1. A compound of formula (I) (R f -A a -C c ) n -(spacer) m -X o (I) wherein either a) or b) provides the definitions for the elements of formula (I) a) Rf=CF 3 —CF 2 —CF 2 —O—CF(CF 3 )—CH 2 —, A=—O—CH 2 —CHR′—, R′=H or alkyl, C=alkylene, O, —OCO— or —NR″—, R″=H, alkyl or (CH 2 CHR′″) m′ —R″″, m′=an integer of 1 to 100, R′″ and R″″=independently of one another, H or alkyl, in which one or more non-adjacent C atoms are optionally replaced by O or N, spacer=a saturated or unsaturated, branched or unbranched hydrocarbon unit, optionally containing heteroatoms, X=an anionic, cationic, non-ionic or amphoteric hydrophilic group, non-ionic hydrophilic group=is R 4 —(O—CH 2 CHR 5 ) m″ —, —CH(OH)—CH 2 —NH-Sach, or —Y—(CH 2 —CH 2 —O) v —R 4′ , m″=an integer of 1 to 100, R 4 and R 5 =independently of one another H or C 1 -C 4 -alkyl, Sach=a sugar, Y=S, O or NH, R 4′ =H or alkyl and v=1-100, a=0 or 1, and a=1, if X=an anionic hydrophilic group, n=2, 3, 4, 5 or 6, c=0 or 1, m=0 or 1, and o=1, 2, 3 or 4, and o=0 if R″=—(CH 2 CHR′″) m′ —R″″, wherein R′″ and/or R″″=alkyl, wherein one or more non-adjacent C atoms have been replaced by O or N, or b) Rf=CF 3 —CF 2 —CF 2 —O—CF(CF 3 )—CO—, A=—O—CH 2 —CHR′—, R′=H or alkyl, C=alkylene, O, —OCO— or —NR″—, R″=H, alkyl or (CH 2 CHR′″) m′ —R″″, m′=an integer of 1 to 100, R′″ and R″″=independently of one another, H or alkyl, in which one or more non-adjacent C atoms are optionally replaced by O or N, spacer=a saturated or unsaturated branched or unbranched hydrocarbon unit, optionally containing heteroatoms, X=an anionic, cationic, non-ionic or amphoteric hydrophilic group, non-ionic hydrophilic group=is R 4 —(O—CH 2 CHR 5 ) m″ —, —CH(OH)—CH 2 —NH-Sach, or —Y—(CH 2 —CH 2 —O) v —R 4′ , m″=an integer of 1 to 100, R 4 and R 5 =independently of one another H or C 1 -C 4 -alkyl, Sach=a sugar, Y=S, O or NH, R 4′ =H or alkyl, v=1-100, a=0 or 1, n=2, 3, 4, 5 or 6, c=0 or 1, m=1, and o=1, 2, 3 or 4, and o=0 if R″=—(CH 2 CHR′″) m′ —R″″, wherein where R′″ and/or R″″=alkyl, wherein one or more non-adjacent C atoms have been replaced by O or N, and wherein the following compounds are excluded: Rf′—O—CH 2 CH(OSO 3 Na)—CH 2 —O—CH 2 —CH—(C 2 H 5 )—C 4 H 9 , Rf′—O—CH 2 CH(OSO 3 H)—(CH 2 ) 5 —CH 3 , Rf′—O—CO—CH 2 —CH(OSO 3 Na)—CO—O—Rf′, Rf″—CH 2 —CH(SO 3 Na)—Rf″, Rf″—CH 2 —CH(CH 2 SO 3 Na)—Rf″ and Rf″—CH—(CH 3 )CH(SO 3 Na)—Rf″, wherein Rf′=CF 3 CF 2 CF 2 —O—CF(CF 3 )—CH 2 —, and Rf″=CF 3 CF 2 CF 2 —O—CF(CF 3 )—CO—NHCH 2 CH 2 —O—CO—. 2. The compound of claim 1 , wherein a) provides the definitions for the elements of formula (I), and wherein R′=H or CH 3 , C=C 1 -C 4 -alkylene, O or —OCO—, spacer=aliphatic or aromatic hydrocarbon unit, optionally containing Heteroatoms, n=1, 2, or 3, c=1, and o=1 or 2. 3. A compound of claim 1 , wherein a) provides the definitions for the elements of formula (I), and which is of formula (II) wherein Rf=CF 3 —CF 2 —CF 2 —O—CF(CF 3 )—CH 2 —, A=—O—CH 2 —CHR′—, R′=H, CH 3 , C 2 H 5 , a=0 or 1, X=an anionic, cationic non-ionic or amphoteric hydrophilic group, non-ionic hydrophilic group=R 4 —(O—CH 2 CHR 5 ) m″ —,—CH(OH)—CH 2 —NH-Sach, or —Y—(CH 2 —CH 2 —O) v —R 4′ , m″=an integer of 1 to 100, R 4 and R 5 =independently of one another H or C 1 -C 4 -alkyl, Sach=a sugar, Y=S, O or NH, R 4′ =H or alkyl, v=1-100, R 1 =hydrogen or —CH 2 —COO—(A) a —Rf, and R 2 =hydrogen, —CH 2 —COO—(A) a —Rf or X. 4. The compound of claim 3 , which is of formula (II-a): wherein Rf=CF 3 —CF 2 —CF 2 —O—CF(CF 3 )—CH 2 —, A=—O—CH 2 —CHR′—, R′=H, CH 3 , C 2 H 5 , a=0 or 1, and X=as defined for the compound of formula (II). 5. The compound of claim 3 , which is of formula (II-b): wherein Rf=CF 3 —CF 2 —CF 2 —O—CF(CF 3 )—CH 2 —, A=—O—CH 2 —CHR′—, R′=H, CH 3 , C 2 H 5 , a=0 or 1, and X=as defined for the compound of formula (II). 6. The compound of claim 3 , which is of formula (II-c): wherein Rf=CF 3 —CF 2 —CF 2 —O—CF(CF 3 )—CH 2 —, A=—O—CH 2 —CHR′—, R′=H, CH 3 , C 2 H 5 , a=0 or 1, and X=as defined for the compound of formula (II). 7. The compound of claim 3 , which is of formula (II-d): wherein a) provides the definitions for the elements of formula (I), and wherein Rf=CF 3 —CF 2 —CF 2 —O—CF(CF 3 )—CH 2 —, A=—O—CH 2 —CHR′—, R′=H, CH 3 , C 2 H 5 , a=0 or 1, and X=as defined for the compound of formula (II). 8. The compound of claim 1 , wherein b) provides the definitions for the elements of formula (I), and wherein characterised C=NR″—, R″=H, alkyl or —(CH 2 CHR″′) m′ —R″″, m′=an integer of 1 to 100, R′″=H or C 1 -C 4 -alkyl, R″″=alkyl, in which one or more non-adjacent C atoms have been replaced by O, spacer=linear or branched alkylene, X=as defined for the compound of formula (I), a=0, n=2 or 3, c=1, m=1, and o=1 or 2, and o=0 if R″=—(CH 2 CHR′″) m′ —R″″. 9. A compound of claim 1 , wherein b) provides the definitions for the elements of formula (I), and which is of formula (III) wherein Rf=CF 3 —CF 2 —CF 2 —O—CF(CF 3 )—CO— or =Rf′, Rf′=CF 3 —CF 2 —CF 2 —O—CF(CF 3 )—CH 2 —O—CH 2 —CHR′—, p=1-10, q=1-10, R′=H or alkyl, R″=H, alkyl or (CH 2 CHR′″) m′ —R″″, m′=an integer of 1 to 100, R′″ and R″″=independently of one another, H or alkyl, in which one or more non-adjacent C atoms are optionally replaced by O or N, D and D′=H or X, wherein at least one group is equal to X if R″=H or alkyl, X=an anionic, cationic, non-ionic or amphoteric hydrophilic group, non-ionic hydrophilic group=R 4 —(O—CH 2 CHR 5 ) m″ —, —CH(OH)—CH 2 —NH-Sach, or —Y—(CH 2 —CH 2 —O) v —R 4′ , m″=an integer of 1 to 100, R 4 and R 5 =independently of one another H or C 1 -C 4 -alkyl, Sach=a sugar, Y=S, O or NH, R 4′ =H or alkyl, v=1-100. 10. The compound of claim 9 , wherein X is not —SO 3 − . 11. The compound of claim 9 , wherein Rf=CF 3 —CF 2 —CF 2 —O—CF(CF 3 )—CO—, R″=H or alkyl and D and/or D′=X. 12. A compound of claim 1 , wherein a) provides the definitions for the elements of formula (I), and which is of claim 1 , formula (IV) R f -A a -C-(spacer)mX (IV) wherein Rf=CF 3 —CF 2 —CF 2 —O—CF(CF 3 )—CH 2 —, A=—O—CH 2 —CHR′—, R′=H or alkyl, C=alkylene or O, X=an anionic ,cationic non-ionic or amphoteric hydrophilic group, non-ionic hydrophilic group=R 4 —(O—CH 2 CHR 5 ) m″ —, —CH(OH)—CH 2 —NH-Sach, or —Y—(CH 2 —CH 2 —O) v —R 4′ , m″=an integer of 1 to 100, R 4 and R 5 =independently of one another H o
containing halogen · CPC title
containing fluorine · CPC title
containing halogen · CPC title
the carbon skeleton being further substituted by halogen atoms or by nitro or nitroso groups · CPC title
containing carboxyl groups bound to the carbon skeleton · CPC title
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