Fabrication of optical elements and modules incorporating the same

Patent metadata

Field	Value
Publication number	US-9478681-B2
Application number	US-201314140712-A
Country	US
Kind code	B2
Filing date	Dec 26, 2013
Priority date	Dec 27, 2012
Publication date	Oct 25, 2016
Grant date	Oct 25, 2016

Abstract

Fabricating a wafer-scale spacer/optics structure includes replicating optical replication elements and spacer replication sections directly onto an optics wafer (or other wafer) using a single replication tool. The replicated optical elements and spacer elements can be composed of the same or different materials.

First claim

What is claimed is:

1. A method of fabricating a wafer-scale spacer/optics structure, the method comprising:
providing a replication tool having optical element replication sections and spacer replication sections;
using the replication tool to form negatives of the optical element replication sections on a wafer so as to provide replicated optical elements of a first material; and
injecting a liquid, viscous or plastically deformable material into the spacer replication sections of the replication tool to form negatives of the spacer replication sections on the wafer so as to provide replicated spacer elements of a second material different from the first material.

2. The method of claim 1 wherein using the replication tool to form negatives of the optical element replication sections on the wafer includes:
providing a first liquid, viscous or plastically deformable material onto the optical element replication sections of the replication tool;
bringing the wafer into contact with the replication tool so that the first liquid, viscous or plastically deformable material is pressed between a surface of the wafer and the optical element replication sections; and
causing the first liquid, viscous or plastically deformable material to transform into a solid state.

3. The method of claim 2 wherein causing the first liquid, viscous or plastically deformable material to transform into a solid state includes an optical or thermal curing step.

4. The method of claim 2 including bringing the wafer into contact with the replication tool so as to emboss the optical element replication sections of the replication tool onto the wafer.

5. The method of claim 1 including:
bringing the wafer into contact with the replication tool so as to replicate the optical element replication sections of the replication tool onto a front side of the wafer;
while the wafer remains in contact with the replication tool, providing the liquid, viscous or plastically deformable material in areas corresponding to locations for the replicated spacer elements; and
causing the liquid, viscous or plastically deformable material to harden so as to form the replicated spacer elements.

6. The method of claim 5 including:
bringing a vacuum sealing chuck into contact with a backside of the wafer while the wafer is in contact with the replication tool; and
injecting the liquid, viscous or plastically deformable material through an inlet of the vacuum sealing chuck so as to substantially fill the locations for the replicated spacer elements.

7. The method of claim 6 wherein causing the liquid, viscous or plastically deformable material to harden includes an optical or thermal curing step.

8. The method of claim 1 :
wherein using the replication tool to form negatives of the optical element replication sections on the wafer includes:
providing a first liquid, viscous or plastically deformable material onto the optical element replication sections of the replication tool;
bringing the wafer into contact with the replication tool so that the first liquid, viscous or plastically deformable material is pressed between a surface of the wafer and the optical element replication sections; and
causing the first liquid, viscous or plastically deformable material to transform into a solid state;

the method including:
while the wafer remains in contact with the replication tool, providing a second liquid, viscous or plastically deformable material in areas corresponding to locations for the replicated spacer elements; and
causing the second liquid, viscous or plastically deformable material to transform into a solid state.

9. The method of claim 8 including:
bringing a vacuum sealing chuck into contact with a backside of the wafer while the wafer is in contact with the replication tool; and
injecting the second liquid, viscous or plastically deformable material through an inlet of the vacuum sealing chuck so as to substantially fill the locations for the replicated spacer elements.

10. The method of claim 1 wherein the optical elements include lens structures and wherein the spacer elements are substantially non-transparent.

11. A method of fabricating a wafer-scale spacer/optics structure, the method comprising:
providing a replication tool having optical element replication sections and spacer replication sections;
providing a first liquid, viscous or plastically deformable material onto the optical element replication sections of the replication tool;
bringing a wafer into contact with the replication tool so that the first liquid, viscous or plastically deformable material is pressed between a surface of the wafer and the optical element replication sections;
hardening the first liquid, viscous or plastically deformable material to form replicated optical elements on a surface of the wafer;
bringing a vacuum sealing chuck into contact with a backside of the wafer while the wafer remains in contact with the replication tool;
injecting a second liquid, viscous or plastically deformable material through an inlet of the vacuum sealing chuck so as to substantially fill locations for replicated spacer elements; and
hardening the second liquid, viscous or plastically deformable material to form the replicated spacer elements on the surface of the wafer.

12. The method of claim 11 wherein the first and second liquid, viscous or plastically deformable materials are different from one another.

13. The method of claim 11 including releasing the wafer, having the replicated optical elements and the replicated spacer elements formed thereon, from the replication tool and the vacuum sealing chuck.

14. The method of claim 11 wherein at least portions of the replicated optical elements are in direct contact with the replicated spacer elements.

Assignees

• Heptagon Micro Optics Pte Ltd

Inventors

• Gubser Simon
• Karpuz Hakan

Classifications

• H10H20/855

  Optical field-shaping means, e.g. lenses · CPC title

• H10F77/413

  directly associated or integrated with the devices, e.g. back reflectors (directly associated or integrated with photovoltaic cells H10F77/42) · CPC title

• H10F77/407 Primary

  indirectly associated with the devices · CPC title

• H10F39/8063

  Microlenses · CPC title

• H10F39/806

  Optical elements or arrangements associated with the image sensors · CPC title