Vaporizer, ion source, ion beam irradiation apparatus, and an operating method for a vaporizer
US-2024186101-A1 · Jun 6, 2024 · US
US9478403B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9478403-B2 |
| Application number | US-201414336814-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 21, 2014 |
| Priority date | May 6, 2008 |
| Publication date | Oct 25, 2016 |
| Grant date | Oct 25, 2016 |
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An ionic liquid ion source can include a microfabricated body including a base and a tip. The body can be formed of a porous material compatible with at least one of an ionic liquid or room-temperature molten salt. The body can have a pore size gradient that decreases from the base of the body to the tip of the body, such that the at least one of an ionic liquid or room-temperature molten salt is capable of being transported through capillarity from the base to the tip.
Opening claim text (preview).
What is claimed is: 1. An electrospray emitter comprising: a porous emitter body with a base and a tip, wherein the porous emitter body is formed at least partially from a porous xerogel. 2. The electrospray emitter of claim 1 , wherein the porous xerogel is a porous ceramic xerogel. 3. The electrospray emitter of claim 2 , wherein the porous ceramic xerogel is an alumina xerogel. 4. The electrospray emitter of claim 1 , wherein a pore size gradient of the porous emitter body decreases in a direction from the base of the porous emitter body toward the tip of the porous emitter body. 5. The electrospray emitter of claim 1 , further comprising a source of ions in fluid communication with the porous emitter body. 6. The electrospray emitter of claim 5 , further comprising a first electrode electrically connected to the porous emitter body through the source of ions and a second electrode positioned downstream relative to the porous emitter body and the first electrode. 7. An electrospray emitter array comprising: a porous substrate; and a plurality of porous emitters, wherein each porous emitter extends up from the porous substrate to a tip, and wherein the plurality of porous emitters are formed at least partially from a porous xerogel. 8. The electrospray emitter array of claim 7 , wherein the porous xerogel is a porous ceramic xerogel. 9. The electrospray emitter array of claim 8 , wherein the porous ceramic xerogel is an alumina xerogel. 10. The electrospray emitter array of claim 7 , and wherein each porous emitter has a pore size gradient that decreases in a direction from the substrate toward the tip of the porous emitter. 11. The electrospray emitter array of claim 7 , further comprising a source of ions in fluid communication with the plurality of porous emitters through the porous substrate. 12. The electrospray emitter array of claim 11 , further comprising a first electrode electrically connected to the plurality of porous emitters through the source of ions and at least a second electrode positioned downstream relative to the porous emitters and the first electrode. 13. A method of forming an electrospray emitter comprising: pouring a gel solution into a mold shaped to form one or more emitter bodies with a base and a tip; drying the gel solution in the mold to form the one or more emitter bodies at least partially from a porous xerogel. 14. The method of claim 13 , wherein the porous xerogel is a porous ceramic xerogel. 15. The method of claim 14 , wherein the porous ceramic xerogel is an alumina xerogel. 16. The method of claim 13 , wherein the gel solution is a sol gel solution. 17. The method of claim 16 , wherein the sol gel solution includes a solvent, an acidic aluminum salt, a polymer, and a proton scavenger. 18. A method of forming an electrospray emitter comprising: pouring a slurry including ground porous xerogel into a mold shaped to form one or more emitter bodies with a base and a tip; freezing the slurry in the mold to form a frozen slurry; freeze-drying the frozen slurry to form the one or more emitter bodies at least partially from a porous xerogel. 19. The method of claim 18 , wherein the porous xerogel is a porous ceramic xerogel. 20. The method of claim 19 , wherein the porous ceramic xerogel is an alumina xerogel. 21. The method of claim 18 , further comprising sintering the one or more emitter bodies. 22. The method of claim 18 , wherein freezing the slurry further comprises freezing the slurry in the mold with a temperature gradient that increases in a direction from the tip of the one or more emitter bodies toward the base of the one or more emitter bodies.
Field ionization sources · CPC title
characterised by material · CPC title
characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces · CPC title
Ion sources; Ion guns · CPC title
with means for introducing as a spray, a jet or an aerosol (electrospray ion sources H01J49/165) · CPC title
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