Field emission device having field emitter including photoelectric material and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-9478385-B2
Application number	US-201414339004-A
Country	US
Kind code	B2
Filing date	Jul 23, 2014
Priority date	Nov 26, 2013
Publication date	Oct 25, 2016
Grant date	Oct 25, 2016

Abstract

Provided are a field emission device and a method of manufacturing the same. The field emission device includes an anode electrode and a cathode electrode which are opposite to each other, a counter layer provided on the anode electrode, and a field emitter provided on the cathode electrode and facing the counter layer. Herein, the field emitter includes a carbon nanotube emitting cold electrons and a photoelectric material emitting photo electrons.

First claim

What is claimed is:

1. A field emission device comprising:
an anode electrode and a cathode electrode which are opposite to each other;
a counter layer provided on the anode electrode; and
a field emitter provided on the cathode electrode and facing the counter layer,
wherein the field emitter comprises a carbon nanotube that emits cold electrons and a photoelectric material that emits photo electrons.

2. The device of claim 1 , further comprising a first photoelectric material layer provided between the cathode electrode and the field emitter,
wherein the first photoelectric material layer totally or partially covers a surface of the cathode electrode, the surface of the cathode electrode facing the anode electrode.

3. The device of claim 2 , wherein at least one of the photoelectric material and the first photoelectric material layer comprises one of potassium oxide, cesium oxide, gallium phosphide, gallium nitride, aluminum, indium arsenide, germanium, silicon, gallium arsenide, cesium telluride, cesium iodide, cesium-potassium-tellurium (Cs—K—Te), potassium-tellurium (K—Te), silver-oxygen-cesium (Ag—O—Cs), indium-gallium-arsenic (In—Ga—As), and a combination thereof.

4. The device of claim 1 , wherein the counter layer comprises one of a florescent layer and a metallic target.

5. The device of claim 1 , further comprising a gate electrode provided between the cathode electrode and the anode electrode.

6. The device of claim 5 , further comprising a second photoelectric material layer provided on a surface of the gate electrode, the surface of the gate electrode facing the anode electrode.

7. The device of claim 6 , further comprising a first photoelectric material layer provided between the cathode electrode and the field emitter,
wherein the second photoelectric material layer comprises the same material as the first photoelectric material layer.

8. The device of claim 6 , wherein the second photoelectric material layer totally or partially covers the surface of the gate electrode facing the anode electrode.

9. The device of claim 5 , wherein the field emitter comprises a plurality of local field emitters distributed on the cathode electrode.

10. The device of claim 9 , wherein the gate electrode comprises a plurality of holes aligned with the plurality of local field emitters.

11. The device of claim 1 , wherein the field emitter further comprises nanowires, and
wherein the nanowires each comprises one of gold (Au), silver (Ag), gallium arsenide, and a combination thereof.

12. A field emission device comprising:
an anode electrode provided with a counter layer;
a cathode electrode spaced from the anode electrode and provided with a field emitter facing the counter layer; and
a first photoelectric material layer provided between the cathode electrode and the field emitter,
wherein the field emitter comprises:
a field emission paste formed by melting and curing a photoelectric material and metal particles; and
a carbon nanotube provided on the field emission paste and projecting from the field emitter toward the anode electrode,
wherein cold electron emission caused by a field effect is generated from the carbon nanotube, and
wherein photo electron emission caused by incident light is generated from the photoelectric material.

13. The device of claim 12 , wherein the field emitter further comprises nanowires provided on the field emission paste, the nanowires projecting from the field emission paste.

14. The device of claim 12 , further comprising a gate electrode provided between the cathode electrode and the anode electrode and spaced from the cathode electrode and the anode electrode,
wherein the gate electrode includes a gate hole through which the cold electron emission and the photo electron emission pass.

15. The device of claim 14 , further comprising a second photoelectric material layer totally or partially covering a surface of the gate electrode, the surface of the gate electrode facing the anode electrode,
wherein the second photoelectric material layer comprises the same material as the first photoelectric material.

16. A method of manufacturing a field emission device, comprising:
forming a carbon nanotube paste, which consists of carbon nanotubes, a photoelectric material, metal particles, an organic binder, and a solvent, on a cathode electrode;
removing the solvent by drying the carbon nanotube paste;
removing the organic binder by firing the carbon nanotube paste and melting the photoelectric material and the metal particles; and
treating a field emitter formed by melting the photoelectric material and the metal particles to allow a surface of the field emitter to be activated,
wherein the photoelectric material comprises a material having a lower critical frequency than a frequency of light incident on the field emitter.

17. The method of claim 16 , wherein the photoelectric material comprises one of potassium oxide, cesium oxide, gallium phosphide, gallium nitride, aluminum, indium arsenide, germanium, silicon, gallium arsenide, cesium telluride, cesium iodide, cesium-potassium-tellurium (Cs—K—Te), potassium-tellurium (K—Te), silver-oxygen-cesium (Ag—O—Cs), indium-gallium-arsenic (In—Ga—As), and a combination thereof.

18. The method of claim 16 , further comprising:
providing an anode electrode opposite to the cathode electrode; and
forming a counter layer on the anode electrode to face the field emitter,
wherein the counter layer comprises one of a fluorescent layer and a metallic target.

19. The method of claim 18 , further comprising, before the forming of the carbon nanotube paste, forming a first photoelectric material layer on the cathode electrode.

20. The method of claim 19 , further comprising:
forming a gate electrode between the cathode electrode and the anode electrode, which are separated spatially; and
forming, on the gate electrode, a second photoelectric material layer facing the counter layer.

Assignees

• Electronics & Telecommunications Res Inst

Inventors

• Kim Jae-Woo
• Song Yoon-Ho
• Jeong Jin Woo
• Kang Jun Tae
• Choi Sungyoul
• Choi Jeong Yong

Classifications

• H01J1/34

  Photo-emissive cathodes (H01J1/35 takes precedence) · CPC title

• H01J35/065

  Field emission, photo emission or secondary emission cathodes · CPC title

• B82Y30/00

  Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title

• Y10S977/939

  Electron emitter, e.g. spindt emitter tip coated with nanoparticles · CPC title

• Y10S977/742

  Carbon nanotubes, CNTs · CPC title