Phase corrector for laser trimming, an integrated circuit including such a phase corrector, and a method of providing phase correction in an integrated circuit

Patent metadata

Field	Value
Publication number	US-9478359-B2
Application number	US-201314102132-A
Country	US
Kind code	B2
Filing date	Dec 10, 2013
Priority date	Dec 10, 2013
Publication date	Oct 25, 2016
Grant date	Oct 25, 2016

Abstract

A phase corrector for laser trimming a component, the phase corrector comprising:
a first correction structure located to a first side of the component, the first correction structure comprising first and second correction regions at first and second distances from the component; and a second correction structure located to a second side the component, the second correction structure comprising third and fourth correction regions at third and fourth distances from the component.

First claim

What is claimed is:

1. A phase corrector for laser trimming a component, the phase corrector comprising:
a first correction structure located beneath the component, the first correction structure comprising first and second correction regions at first and second distances from the component; and
a second correction structure located above the component, the second correction structure comprising third and fourth correction regions at third and fourth distances from the component.

2. A phase corrector as claimed in claim 1 , wherein the difference between the first and second distances is substantially a quarter of a wavelength of a laser light used to trim the component or an odd multiple thereof.

3. A phase corrector for laser trimming a component, the phase corrector comprising:
a first correction structure located to a first side of the component, the first correction structure comprising first and second correction regions at first and second distances from the component; and
a second correction structure located to a second side of the component, the second correction structure comprising third and fourth correction regions at third and fourth distances from the component, wherein the first and third correction regions are aligned at a first position.

4. A phase corrector as claimed in claim 1 , in which the first correction structure comprises a first repeating pattern of the first and second correction regions.

5. A phase corrector as claimed in claim 4 , in which the first repeating pattern repeats along a first direction with a first period.

6. A phase corrector as claimed in claim 4 , in which the second correction structure comprises a second repeating pattern of the third and fourth correction regions.

7. A phase corrector as claimed in claim 6 , in which the second repeating pattern repeats along a second direction with a second period.

8. A phase corrector as claimed in claim 1 , in which the first, second, third and fourth correction regions are positioned such that:
at a first position the first and third correction regions are aligned;
at a second position the first and fourth correction regions are aligned;
at a third position the second and third correction regions are aligned; and
at a fourth position the second and fourth correction regions are aligned.

9. A phase corrector as claimed in claim 1 , in which the phase corrector is provided as a part of an integrated circuit.

10. A phase corrector as claimed in claim 9 , in which the first correction structure is formed as a first layer of variable thickness beneath the component, and the second correction structure is provided as a second layer of variable thickness above the component.

11. A phase corrector as claimed in claim 10 , in which either or both of the first and second layer are discontinuous.

12. An integrated circuit comprising the phase corrector as claimed in claim 1 , wherein the component is a laser trimmable resistor or capacitor.

13. An integrated circuit as claimed in claim 12 , in which a difference between the first and second distances is substantially a positive odd integer multiple of 0.17 or 0.18 microns when the component is separated from the first correction structure by silicon dioxide, or substantially a positive odd integer multiple of 0.13 microns when the component is separated from the first correction structure by nitride.

14. An integrated circuit comprising the phase corrector as claimed in claim 3 , wherein the component is a resistor or a capacitor, and in which a difference between the third and fourth distances is substantially a positive odd integer multiple of 0.17 or 0.18 microns when the component is separated from the second correction structure by silicon dioxide or substantially a positive odd integer multiple of 0.13 microns when the component is separated from the second correction structure by nitride.

15. An integrated circuit comprising:
a component; and
a phase corrector arranged for laser trimming the component at a wavelength of laser light, the phase corrector comprising:
a first correction structure disposed on a first side of the component between the component and a substrate, the first correction structure comprising a first correction region at a first distance from the component and a second correction region at a second distance from the component; and
a second correction structure disposed on a second side of the component that opposes the first side, the second correction structure comprising a third correction region at a third distance from the component and a fourth correction region at a fourth distance from the component;
wherein the first correction structure and the second correction structure are arranged so as to cause interference from reflections associated with laser trimming to be reduced, and
wherein a difference between the first distance and the second distance is substantially a first positive odd integer multiple of a quarter of the wavelength of the laser light used to trim the component, and wherein a difference between the third distance and the fourth distance is substantially a second positive odd integer multiple of the quarter of the wavelength of the laser light used to trim the component.

16. An integrated circuit as claimed in claim 15 , wherein the first positive odd integer multiple and the second positive odd integer multiple are the same.

17. An integrated circuit as claimed in claim 15 , wherein the component comprises a resistor or a capacitor.

18. A phase corrector as claimed in claim 3 , wherein the difference between the third and fourth distances is substantially a quarter of a wavelength of a laser light used to trim the component or an odd multiple thereof.

19. A phase corrector as claimed in claim 3 , wherein the first and fourth correction regions are aligned at a second position.

20. A method of laser trimming comprising applying laser light to the phase corrector of claim 3 .

Assignees

• Analog Devices Global

Inventors

• Stenson Bernard Patrick
• Lambkin Paul Martin
• Blaney Colette J
• Beatty John

Classifications

• H01G4/33 Primary

  Thin- or thick-film capacitors {(thin- or thick-film circuits; capacitors without a potential-jump or surface barrier specially adapted for integrated circuits, details thereof, multistep manufacturing processes therefor)} · CPC title

• H01C7/006

  Thin film resistors · CPC title

• H01G4/255

  Means for correcting the capacitance value · CPC title

• H01C17/242

  by laser · CPC title