Multilayer solar selective coating for high temperature solar thermal applications

Patent metadata

Field	Value
Publication number	US-9476115-B2
Application number	US-201514820104-A
Country	US
Kind code	B2
Filing date	Aug 6, 2015
Priority date	Aug 6, 2014
Publication date	Oct 25, 2016
Grant date	Oct 25, 2016

Abstract

A multilayer solar selective coating on metallic and non-metallic substrates suitable for high temperature solar thermal power applications. The optimized solar selective coating of the present invention on stainless steel substrate exhibits absorptance of 0.954 and emittance of 0.07. A five layer coating is deposited using the sputtering process, and includes tungsten (W), titanium aluminum nitride (TiAlN), titanium aluminum silicon nitride (TiAlSiN), titanium aluminum silicon oxy-nitride (TiAlSiON), and titanium aluminum silicon oxide (TiAlSiO) layers. The first layer (W) acts an infrared reflector, the second layer (TiAlN), the third layer (TiAlSiN) and the fourth layer (TiAlSiON) act as the absorber layer and the fifth layer (TiAlSiO) acts as the anti-reflection layer. The high-temperature solar selective coating exhibits average emittance of 0.10 at 400° C. on stainless steel substrate in the wavelength range of 2.5-25 μm, thus is suitable for applications in concentrating collectors like evacuated receiver tubes for solar thermal power generation.

First claim

The invention claimed is:

1. An improved multilayer solar selective coating suitable for high temperature solar thermal applications comprising an infrared reflector layer of tungsten (W) being deposited on a substrate followed in succession by deposition of a first absorber layer of titanium aluminum nitride (TiAlN), a second absorber layer of titanium aluminum silicon nitride (TiAlSiN), a third semi-absorber layer of titanium aluminum oxy-nitride (TiAlSiON) and an anti-reflection layer of titanium aluminum silicon oxide (TiAlSiO) using a sputtering process.

2. The coating as claimed in claim 1 , wherein the elements for the deposition of absorber layers, semi-absorber layer, and antireflection layer are selected from Ti, Al, Si, N, O and combinations thereof.

3. The coating as claimed in claim 1 , wherein the first absorber layer contains Ti in the range of 25-30 at %, Al in the range of 25-20 at % and N in the range of 40-60 at %.

4. An improved multilayer solar selective coating as claimed in claim 1 , wherein the second absorber layer contains Ti in the range of 20-25 at %, Al in the range of 15-20 at %, Si in the range 5-10 at % and N in the range of 40-60 at %.

5. An improved multilayer solar selective coating as claimed in claim 1 , wherein the semi-absorber layer contains Ti in the range of 20-25 at %, Al in the range of 15-20 at %, Si in the range of 8-10 at %, nitrogen in the range of 30-40 at % and O in the range of 20-30 at %.

6. An improved multilayer solar selective coating as claimed in claim 1 , wherein the antireflection layer contains Ti in the range of 20-25 at %, Al in the range of 15-20 at %, Si in the range of 5-10 at % and O in the range of 40-60 at %.

7. An improved multilayer solar selective coating as claimed in claim 1 , wherein the thicknesses of the infrared reflector layer, first, second, third absorber layers the first absorber layer, the second absorber layer, and the third semi-absorber layer are in the ranges of 800-1000 nm, 40-50 nm, 30 nm, 30 nm and the thickness of the anti-reflection layer is in the range of 25-30 nm.

8. A process for the deposition of a multilayer solar selective coating as claimed in claim 1 comprising the steps of:
i. metallographic preparation of a substrate to reduce surface roughness to <0.10 μm;
ii. chemical cleaning of the substrate;
iii. placing the substrate in a balanced magnetron sputtering system comprising a vacuum chamber and creating a vacuum of 5.0×10 −4 Pa;
iv. cleaning of the substrate using Ar plasma with a bias voltage of 600-700 V;
v. depositing a W layer at temperature in the range of 25 to 60° C. at a power density of 2.26 to 4.52 W/cm 2 ;
vi. placing the W coated substrate in a four cathode reactive pulsed direct current magnetron sputtering system consisting of two Ti, one Al and one Si targets and to achieve a vacuum of 5.0×10 −4 Pa;
vii. depositing the first absorber layer (TiAlN) using two titanium and one Al targets at a substrate temperature in the range of 275-350° C., substrate bias in the range of −50 to −150V and nitrogen flow rate in the range of 10-20 sccm;
viii. depositing the second absorber layer (TiAlSiN) using two titanium, one Al and one silicon targets at a substrate temperature in the range of 275 to 350° C., substrate bias in the range of −50 to −150V and nitrogen flow rate in the range of 10-30 sccm;
ix. depositing the third semi-absorber layer (TiAlSiON) using two titanium, one Al and one silicon targets at a substrate temperature in the range of 275-350° C., substrate bias in the range of −50 to −150V, nitrogen flow rate in the range of 10-20 sccm and oxygen flow rate in the range of 2-10 sccm;
x. depositing the anti-reflection layer (TiAlSiO) using two titanium, one Al and one silicon targets at a substrate temperature in the range of 275-350° C. and oxygen flow rate in the range of 5-20 sccm; and
xi. etching the anti-reflection layer in Ar plasma for a duration of 20-40 minutes at a substrate temperature of 250-350° C. and substrate bias in the range of −500 to 1200 V to obtain the multilayer solar selective coating.

9. A process as claimed in claim 8 , wherein the solar selective coating was deposited at sputtering power density of 2.26-3.96, 1.98-3.96 and 1.13-2.26 W/cm 2 for Ti, Al and Si targets, respectively.

10. A process as claimed in claim 8 , wherein the vacuum chamber was maintained at the base pressure of 5.0×10 −4 Pa and operating pressure in the range of 0.1-0.5 Pa.

Assignees

• Council Scient Ind Res

Inventors

• Chandra Barshilia Harish

Classifications

• C23C14/5806

  Thermal treatment · CPC title

• Y02E10/40

  Solar thermal energy, e.g. solar towers · CPC title

• H01J37/3405

  Magnetron sputtering · CPC title

• C23C14/0676

  Oxynitrides · CPC title

• C23C14/022

  by means of bombardment with energetic particles or radiation · CPC title