Production method for laminate film, laminate film, and production method for semiconductor device employing same

Patent metadata

Field	Value
Publication number	US-9475962-B2
Application number	US-201414780092-A
Country	US
Kind code	B2
Filing date	Mar 25, 2014
Priority date	Mar 26, 2013
Publication date	Oct 25, 2016
Grant date	Oct 25, 2016

Abstract

Provided is a manufacture method of a laminate film accurately precut into a desired shape. The manufactured laminate film comprises an elongated release film having thereon a plurality of insular adhesive films (A) and (B) mutually adjacent in the lengthwise direction, and the method includes: obtaining an elongated laminate having a release film and an adhesive film; precutting the adhesive film to obtain a first peeling part; and peeling off the first peeling part from the release film. The first peeling part includes peripheral parts (A 1 ) and (B 2 ) of insular adhesive films (A) and (B) respectively positioned at one and the other widthwise end side of the release film; and connection part (C) connecting peripheral parts (A 1 ) and (B 2 ), but not including peripheral parts (A 2 ) and (B 1 ) of insular adhesive films (A) and (B) respectively positioned at the other and the one widthwise end side of the release film.

First claim

The invention claimed is:

1. A method of manufacturing a laminate film comprising an elongated release film and a plurality of insular adhesive films, the insular adhesive film being either an insular adhesive film A or an insular adhesive film B which is adjacent to each other on the release film along a lengthwise direction thereof, the method comprising:
obtaining an elongated laminate comprising the elongated release film and an elongated adhesive film,
precutting the adhesive film in the laminate to thereby obtain a first peeling part surrounded by a cut line, and
peeling off the first peeling part from the release film,
wherein:
the first peeling part includes a peripheral part A 1 of the insular adhesive film A at one widthwise end side of the release film, a peripheral part B 2 of the insular adhesive film B at the other widthwise end side of the release film and a connection part C connecting the peripheral part A 1 and the peripheral part B 2 , but does not include a peripheral part A 2 of the insular adhesive film A at the other widthwise end side of the release film and a peripheral part B 1 of the insular adhesive film B at the one widthwise end side of the release film, or alternatively
the first peeling part includes the peripheral part A 1 of the insular adhesive film A at the one widthwise end side of the release film, the peripheral part B 1 of the insular adhesive film B at the one widthwise end side of the release film and a connection part C connecting the peripheral part A 1 and the peripheral part B 1 , but does not include the peripheral part A 2 of the insular adhesive film A at the other widthwise end side of the release film and the peripheral part B 2 of the insular adhesive film B at the other widthwise end side of the release film.

2. The method of manufacturing a laminate film according to claim 1 , wherein
the first peeling part includes a peripheral part A 1 of the insular adhesive film A at one widthwise end side of the release film, a peripheral part B 2 of the insular adhesive film B at the other widthwise end side of the release film and the connection part C connecting the peripheral part A 1 and the peripheral part B 2 , but does not include the peripheral part A 2 of the insular adhesive film A at the other widthwise end side of the release film and the peripheral part B 1 of the insular adhesive film B at the other widthwise end side of the release film.

3. The method of manufacturing a laminate film according to claim 2 , wherein:
the first peeling part is peeled off along the lengthwise direction of the release film in an order of the peripheral part A 1 , the connection part C and the peripheral part B 2 , and
the connection part C constituting the first peeling part is in contact with the insular adhesive film A at a lower end thereof in the peeling direction of the peeling part.

4. The method of manufacturing a laminate film according to claim 2 , wherein the connection part C extends in an oblique direction relative to the lengthwise direction of the release film.

5. The method of manufacturing a laminate film according to claim 1 , wherein a line connecting centers of the insular adhesive films is parallel to the lengthwise direction of the release film.

6. The method of manufacturing a laminate film according to claim 2 , further comprising:
precutting the adhesive film in the laminate to thereby obtain a second peeling part surrounded by a cut line, and
peeling off the second peeling part from the release film,
wherein:
the second peeling part is provided at the other widthwise end side of the release film as defined for the first peeling part, and includes a peripheral part A 2 of the insular adhesive film A at the other widthwise end side of the release film, an outer peripheral part B 2 ′ provided adjacent to the outer periphery of a peripheral part B 2 of the insular adhesive film B at the other widthwise end side of the release film and a connection part C 2 connecting the peripheral part A 2 and the outer peripheral part B 2 ′.

7. The method of manufacturing a laminate film according to claim 2 , further comprising:
precutting the adhesive film in the laminate to thereby obtain a third peeling part surrounded by a cut line, and
peeling off the third peeling part from the release film,
wherein:
the third peeling part is provided at the one widthwise end side of the release film as defined for the first peeling part, and includes an outer peripheral part A 1 ′ provided adjacent to the outer periphery of a peripheral part A 1 of the insular adhesive film A at the one widthwise end side of the release film, a peripheral part B 1 of the insular adhesive film B at the one widthwise end side of the release film and a connection part C 1 connecting the outer peripheral part A 1 ′ and the peripheral part B 1 .

8. The method of manufacturing a laminate film according to claim 1 , wherein the insular adhesive film has a circular shape.

9. The method of manufacturing a laminate film according to claim 1 , wherein the laminate film further comprises a side part which is surrounding an outer periphery of the plurality of insular adhesive films and which is provided continuously along the lengthwise direction of the release film.

10. The method of manufacturing a laminate film according to claim 1 , wherein a peel strength between the release film and the insular adhesive film is 1 to 35 g/50 mm.

11. The method of manufacturing a laminate film according to claim 1 , wherein the insular adhesive film is for attaching to a semiconductor wafer.

12. The method of manufacturing a laminate film according to claim 1 , wherein:
the insular adhesive film comprises an expandable substrate layer which contains:
a 1-butene.α-olefin copolymer (A) having a tensile elasticity of 100 to 500 MPa at 23° C., and
a propylene-based elastomer composition (B) containing a propylene.α-olefin copolymer (b 1 ) and having a tensile elasticity of 8 to 500 MPa at 23° C.,
a content of the propylene-based elastomer composition (B) is 30 to 70 parts by weight based on 100 parts by weight of a total of the 1-butene.α-olefin copolymer (A) and the propylene-based elastomer composition (B).

13. The method of manufacturing a laminate film according to claim 1 , wherein:
the insular adhesive film further comprises an adhesive layer provided on a surface which is in contact with the release film, and
adhesive force of the adhesive layer measured in accordance with JIS Z0237 is 0.1 to 10 N/25 mm, the measurement being made by attaching the adhesive layer to a surface of a SUS-304-BA plate, allowing to stand still for 60 minutes and peeling off the adhesive layer from the surface of the SUS-304-BA plate.

14. A laminate film comprising an elongated release film and a plurality of insular adhesive films, the insular adhesive film being either an insular adhesive film A or an insular adhesive film B which is adjacent to each other on the release film along a lengthwise direction thereof,
the laminate film further comprising an exposed part of the release film which is provided between the insular adhesive film A and the insular adhesive film B,
wherein the exposed part of the release film extends in an oblique direction relative to the lengthwise direction of the release film.

15. A laminate film comprising an elongated release film and a plurality of insular adhesive films, the insular adhesive film being either an insular adhesive film A or an insular adhesive film B which is adjacent to each other on the release film along a lengthwise direction thereof,
the laminate f

Assignees

• Mitsui Chemicals Tohcello Inc

Inventors

• Hayashishita Eiji

Classifications

• H10P72/7416

  used during dicing or grinding · CPC title

• H10P72/7402 Primary

  Wafer tapes, e.g. grinding or dicing support tapes · CPC title

• H10P54/00

  Cutting or separating of wafers, substrates or parts of devices · CPC title

• H10P72/7404

  the wafer tape being a laminate of three or more layers, e.g. including additional layers beyond a base layer and an uppermost adhesive layer · CPC title

• C09J2201/28

  Chemistry & Metallurgy · mapped topic