Substrate delivery device and strong acid or strong base etching adequate for wet process

Patent metadata

Field	Value
Publication number	US-9474165-B2
Application number	US-201414398447-A
Country	US
Kind code	B2
Filing date	Aug 15, 2014
Priority date	Jul 8, 2014
Publication date	Oct 18, 2016
Grant date	Oct 18, 2016

Abstract

The present invention provides a substrate delivery device and a strong acid or strong base etching adequate for a wet process. The substrate delivery device comprises: a plurality of first delivery rollers ( 2 ) parallel to one another in an etching chamber ( 1 ), a plurality of second delivery rollers ( 4 ) parallel to one another in a cleaning chamber ( 3 ) and a carrier ( 5 ) employed for carrying a substrate ( 100 ); the carrier ( 5 ) comprises two first side frames ( 51 ) located along a direction of delivering the substrate ( 100 ), two second side frames ( 53 ) connected to ends of the two first side frames ( 51 ), a plurality of first and second connection parts ( 55, 57 ) which are intercrossing and orthogonal in an area surrounded by the two first side frames ( 51 ) and the two second side frames ( 53 ) and a plurality of supports ( 59 ) at joins of the plurality of first and second connection parts ( 55, 57 ); the plurality of first and second connection parts ( 55, 57 ) are intercrossing and orthogonal with one another to form a plurality of hollow parts ( 52 ); the substrate ( 100 ) is located on the carrier ( 5 ).

First claim

What is claimed is:

1. A substrate delivery device for delivering a substrate between an etching chamber and a cleaning chamber, the substrate delivering device comprising: a plurality of first delivery rollers parallel to one another in an etching chamber, a plurality of second delivery rollers parallel to one another in a cleaning chamber and a carrier employed for carrying a substrate; the carrier comprises two first side frames located along a direction of delivering the substrate, two second side frames connected to ends of the two first side frames, a plurality of first connection parts and a plurality of second connection parts which are intercrossing and orthogonal in an area surrounded by the two first side frames and the two second side frames and a plurality of supports at joins of the plurality of first connection parts and the plurality of second connection parts; the plurality of first connection parts and the plurality of second connection parts are intercrossing and orthogonal with one another to form a plurality of hollow parts; the substrate is located on the carrier;
wherein, the substrate delivery device further comprising a support frame, and the support frame comprises a plurality of first support plates parallel with the first side frames and a plurality of second support plates perpendicularly connected to the plurality of first support plates, and the second support plates are located below the plurality of supports; the support frame is located on the plurality of first delivery rollers and the plurality of second delivery rollers, and the carrier is located on the support frame; and
wherein, a first distance formed between two of the plurality of first support plates is greater than a second distance formed between the two first side frames, and only the plurality of first support plates of the support frame are located on the plurality of first delivery rollers and the plurality of second delivery rollers; the support frame is made of polyfluortetraethylene (PTFE).

2. The substrate delivery device according to claim 1 , wherein heights of the two first side frames, the two second side frames and plurality of supports are the same; the substrate is located on the two first side frames, the two second side frames and plurality of supports.

3. The substrate delivery device according to claim 2 , wherein the two first side frames comprise protruding columns positioned at the end edges, and the amount of the protruding columns is four, and the protruding columns are centrally symmetric relative to the carrier, and the protruding columns are employed for locating the substrate.

4. The substrate delivery device according to claim 2 , wherein the heights of the two first side frames and the two second side frames are about 5˜10 cm.

5. The substrate delivery device according to claim 4 , wherein the two first side frames and the two second side frames are inward tilted 15˜30° relative to the direction of the heights.

6. The substrate delivery device according to claim 1 , wherein the carrier is made of polyfluortetraethylene (PTFE).

7. The substrate delivery device according to claim 1 , further comprising a plurality of lifting rollers parallel to one another in the cleaning chamber; a dimension of each of the lifting rollers is smaller than dimensions of the second delivery rollers; as the lifting rollers are relatively raised, the lifting rollers penetrate the hollow parts of the carrier to lift and deliver the substrate.

8. The substrate delivery device according to claim 1 , wherein cross sectional shapes of the plurality of supports are rectangular.

9. A substrate delivery device for delivering a substrate between an etching chamber and a cleaning chamber, the substrate delivering device comprising: a plurality of first delivery rollers parallel to one another in an etching chamber, a plurality of second delivery rollers parallel to one another in a cleaning chamber and a carrier employed for carrying a substrate; the carrier comprises two first side frames located along a direction of delivering the substrate, two second side frames connected to ends of the two first side frames, a plurality of first connection parts and a plurality of second connection parts which are intercrossing and orthogonal in an area surrounded by the two first side frames and the two second side frames and a plurality of supports at joins of the plurality of first connection parts and the plurality of second connection parts; the plurality of first connection parts and the plurality of second connection parts are intercrossing and orthogonal with one another to form a plurality of hollow parts; the substrate is located on the carrier;
wherein heights of the two first side frames, the two second side frames and plurality of supports are the same; the substrate is located on the two first side frames, the two second side frames and plurality of supports;
wherein the two first side frames comprise protruding columns positioned at the end edges, and the amount of the protruding columns is four, and the protruding columns are centrally symmetric relative to the carrier, and the protruding columns are employed for locating the substrate;
wherein the heights of the two first side frames and the two second side frames are about 5˜10 cm;
wherein the two first side frames and the two second side frames are inward tilted 15˜30° relative to the direction of the heights;
wherein the carrier is made of polyfluortetraethylene (PTFE);
the substrate delivery device further comprises a support frame, and the support frame comprises a plurality of first support plates parallel with the first side frames and a plurality of second support plates perpendicularly connected to the plurality of first support plates, and the second support plates are located below the plurality of supports; the support frame is located on the plurality of first delivery rollers and the plurality of second delivery rollers, and the carrier is located on the support frame, wherein, a first distance formed between two of the plurality of first support plates is greater than a second distance formed between the two first side frames, and only the plurality of first support plates of the support frame are located on the plurality of first delivery rollers and the plurality of second delivery rollers; the support frame is made of polyfluortetraethylene (PTFE);
the substrate delivery device further comprises a plurality of lifting rollers parallel to one another in the cleaning chamber; a dimension of each of the lifting rollers is smaller than dimensions of the second delivery rollers; as the lifting rollers are relatively raised, the lifting rollers penetrate the hollow parts of the carrier to lift and deliver the substrate;
wherein cross sectional shapes of the plurality of supports are rectangular.

Assignees

• Shenzhen China Star Optoelect
• Shenzhen China Star Optoelect

Inventors

• Deng Haifeng
• Li Jia

Classifications

• H10P72/3314

  Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers · CPC title

• H10P72/3202 Primary

  Mechanical details, e.g. rollers or belts · CPC title

• C09K13/08

  containing a fluorine compound · CPC title

• B65G49/064

  in a horizontal position (B65G49/066 takes precedence) · CPC title

• C03C15/00

  Surface treatment of glass, not in the form of fibres or filaments, by etching (etching or surface-brightening compositions, in general C09K13/00) · CPC title