Ring modulators with low-loss and large free spectral range (fsr) on a silicon-on-insulator (soi) platform
US-2024369864-A1 · Nov 7, 2024 · US
US9470952B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9470952-B2 |
| Application number | US-201414891934-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 12, 2014 |
| Priority date | Jun 13, 2013 |
| Publication date | Oct 18, 2016 |
| Grant date | Oct 18, 2016 |
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Electro-optical modulators and methods of fabrication are disclosed. An electro-optical modulator includes a Mach-Zehnder interferometer formed in a substrate removed semiconductor layer and a coplanar waveguide. Signals from the coplanar waveguide are capacitively coupled to the Mach-Zehnder interferometer through first and second dielectric layers having strong dielectric constant dispersion.
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It is claimed: 1. An electro-optical modulator comprising: a Mach-Zehnder interferometer formed in a substrate removed semiconductor layer; and a coplanar waveguide, wherein signals from the coplanar waveguide are capacitively coupled to the Mach-Zehnder interferometer through first and second dielectric layers having strong dielectric constant dispersion. 2. The electro-optical modulator of claim 1 , wherein the dielectric layers have an index of refrac…
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