Purification system with manifold assembly and removable filter cassette

Patent metadata

Field	Value
Publication number	US-9468872-B2
Application number	US-201314432741-A
Country	US
Kind code	B2
Filing date	Sep 30, 2013
Priority date	Oct 1, 2012
Publication date	Oct 18, 2016
Grant date	Oct 18, 2016

Abstract

The present disclosure relates to modular purification systems using removable purifier cassettes for purifying liquids including, for example, liquids used in semiconductor manufacturing. A purification system may include a removable purifier cassette having a purifier inlet port and a purifier outlet port, and a manifold assembly. The manifold assembly can include a plurality of connection systems to that provide manifold ports to provide fluid to/from the cassette. In some embodiments, the connection systems may use connection nuts that can provide 360 degrees of thread engagement with less than 360 degrees of rotation.

First claim

What is claimed is:

1. A purification system comprising:
a generally rectangular removable purifier cassette, the purifier cassette further comprising:
a purifier body comprising a first sidewall, a second sidewall, a third sidewall and a fourth sidewall, the first sidewall opposite the second sidewall and the third sidewall opposite the fourth sidewall, the purifier body defining a media cavity;
one or more tension members coupled to the first sidewall and the second sidewall of the media cavity, the one or more tension members dividing the media cavity into a plurality of sections;
a purifier element disposed in each of the plurality of sections;
a first purifier port fitting providing a first purifier port fluidly connected to an upstream portion of the media cavity;
a second purifier port fitting providing a second purifier port fluidly connected to a downstream portion of the media cavity;

a manifold assembly into which rectangular purifier cassettes can be inserted and from which the rectangular purifier cassette can be removed for replacement, the manifold assembly comprising a plurality of connection systems providing manifold ports, the manifold ports comprising:
a first manifold port coupled to the first purifier port fitting;
a second manifold port coupled to the second purifier port fitting; wherein the manifold assembly is configured to receive the purifier cassette through horizontal translation through a front side of the manifold assembly and adapted to allow an operator to seal or unseal the purifier cassette from the front side of the manifold assembly and wherein the purifier cassette is adapted to be inserted and removed from the manifold assembly through horizontal translation through the front side of the manifold assembly, and
wherein:
the plurality of connection systems comprises a first connection system that includes
a first connection housing defining a first connection housing first opening, and
a first connection nut disposed in the first connection housing first opening and rotatable in the first connection housing around a first manifold fitting,

the manifold assembly comprises a second connection nut rotatable around a second manifold fitting, and
a gear assembly is operatively coupled to the first connection nut and the second connection nut such that the first connection nut and second connection nut rotate simultaneously.

2. The purification system of claim 1 , wherein each purifier element comprises a compressed generally rectangular pleat pack arranged with a first set of tips facing the downstream portion of the media cavity.

3. The purification system of claim 1 , wherein the purifier body is configured with a plurality of hoop-like structures about the plurality of sections to distribute stress.

4. The purification system of claim 1 , further wherein the purifier cassette further comprises a first set of flow channels disposed along the first sidewall and a second set of flow channels disposed along the second sidewall, the first set of flow channels and second set of flow channels on opposite sides of the plurality of sections, each of the first set of flow channels fluidly coupled to the first purifier port and configured to distribute fluid to a first side of the plurality of sections and each of the second set of flow channels fluidly coupled to the second purifier port and configured to receive fluid from a second side of the plurality of sections.

5. The purification system of claim 4 , further comprising a first series of reinforcing arches disposed along the first sidewall and a second series of reinforcing arches disposed along the second sidewall.

6. The purification system of claim 5 , wherein the first series of reinforcing arches provide the first set of flow channels and the second series of reinforcing arches provide the second set of flow channels.

7. The purification system of claim 1 , wherein the first purifier port and second purifier port are rear facing ports and wherein the plurality of connection systems are configured to allow a user to seal the rear facing ports from a front side of the purifier cassette.

8. The purification system of claim 1 , wherein the plurality of connection systems are configured to simultaneously seal multiple purifier ports.

9. The purification system of claim 1 , wherein the manifold assembly comprises an alignment feature to align the purifier cassette with the manifold assembly.

10. The purification system of claim 9 , wherein the alignment feature comprises one or more guide arms.

11. The purification system of claim 1 , wherein
the first connection nut comprises a set of first connection nut internal threads, the set of first connection nut internal threads configured to engage a set of first purifier port fitting external threads to create a seal between the first manifold fitting and the first purifier port fitting with less than 360 degrees of rotation of the first connection nut.

12. The purification system of claim 11 , wherein the set of first connection nut internal threads and the set of first purifier port fitting external threads are multi-start threads configured to create at least 360 degrees of threaded engagement with less than 360 degrees of rotation of the first connection nut.

13. The purification system of claim 11 , wherein the first connection housing comprises a set of first connection housing internal threads and the first connection nut comprises a set of first connection nut external threads, wherein the set of first connection nut external threads engage the set of first connection housing internal threads.

14. The purification system of claim 11 , wherein
the second connection nut comprises a set of second connection nut internal threads, the second connection nut internal threads configured to engage a set of second purifier port fitting external threads to create a seal between the second manifold fitting and the second purifier port fitting with less than 360 degrees of rotation.

15. The purification system of claim 14 , wherein the second connection nut is disposed in the first connection housing or a second connection housing.

16. The purification system of claim 1 , wherein the first purifier port fitting and second purifier port fitting face the manifold assembly and wherein the first connection system comprises a rotation member that extends past the purifier cassette, the rotation member operatively coupled to the gear assembly such that rotation of the rotation member rotates the first connection nut and the second connection nut.

17. The purification system of claim 16 , wherein the rotation member comprises a gear arm coupled to the first connection nut, the gear arm comprising:
gear teeth engaging a gear operatively coupled to the second connection nut; and
an arm portion extending past the purifier cassette.

18. The purification system of claim 17 , wherein the first connection system further comprises a drive handle and the drive handle comprises:
a drive shaft received in a drive shaft passage of the arm portion, the drive shaft translatable in the drive shaft passage from a fully retracted position to a fully inserted position; and
an alignment post received in an alignment opening of the purifier cassette, the alignment post providing a pivot point for the drive shaft.

19. The purification system of claim 18 , wherein the alignment opening is keyed such that the drive shaft is inserted a first distance, then rotated about the pivot point a selected angular distance and then ful

Assignees

• Entegris Inc

Inventors

• Laverdiere Marc
• Kuwabara Hirokazu
• Kurata Koichi
• Puglia John P
• Lee Ben Mai Pak
• Barrows Jr Louis
• Madhavaram Kalyan
• Menn Dmitri
• Niermeyer J Karl
• Martland Craig Wallace

Classifications

• B01D63/14 Primary

  Pleat-type membrane modules · CPC title

• B01D2313/21

  Specific headers, end caps · CPC title

• F16L19/025

  the pipe ends having integral collars or flanges · CPC title

• B01D29/52 Primary

  in parallel connection · CPC title

• B25B17/02

  providing for torque amplification · CPC title