Surface plasma wave coupled detectors

Patent metadata

Field	Value
Publication number	US-9466739-B1
Application number	US-201414213691-A
Country	US
Kind code	B1
Filing date	Mar 14, 2014
Priority date	Oct 21, 2009
Publication date	Oct 11, 2016
Grant date	Oct 11, 2016

Abstract

The present disclosure relates to an electromagnetic energy detector. The detector can include a substrate having a first refractive index; a metal layer; an absorber layer having a second refractive index and disposed between the substrate and the metal layer; a coupling structure to convert incident radiation to a surface plasma wave; additional conducting layers to provide for electrical contact to the electromagnetic energy detector, each conducting layer characterized by a conductivity and a refractive index; and a surface plasma wave (“SPW”) mode-confining layer having a third refractive index that is higher than the second refractive index disposed between the substrate and the metal layer.

First claim

What is claimed is:

1. An electromagnetic infrared (IR) energy detector, comprising:
a substrate having a first refractive index;
a metal layer;
an absorber layer having a second refractive index and disposed between the substrate and the metal layer;
a coupling structure to convert incident radiation to a surface plasma wave;
additional conducting layers to provide for electrical contact to the electromagnetic energy detector, each conducting layer characterized by a conductivity and a refractive index; and
a surface plasma wave (“SPW”) mode-confining layer having a third refractive index that is higher than the second refractive index at IR wavelengths disposed between the substrate and the metal layer.

2. The electromagnetic infrared energy detector of claim 1 , wherein the SPW mode-confining layer is disposed between the substrate and the absorber layer.

3. The electromagnetic infrared energy detector of claim 1 , wherein the SPW mode-confining layer is disposed between the absorber layer and the metal layer.

4. The electromagnetic infrared energy detector of claim 1 further comprising a top contact layer comprising a dielectric layer having a fourth refractive index that is lower than the second refractive index and disposed between the substrate and the metal layer.

5. The electromagnetic infrared energy detector of claim 4 further comprising a bottom contact layer comprising a dielectric layer having a fifth refractive index that is lower than the second refractive index and the fourth refractive index and disposed between the substrate and the metal layer.

6. The electromagnetic infrared energy detector of claim 1 further comprising a top contact layer.

7. The electromagnetic infrared energy detector of claim 6 further comprising a bottom contact layer.

8. The electromagnetic infrared energy detector of claim 1 , wherein the absorber layer comprises a strained layer super lattice (“SLS”).

9. The electromagnetic infrared energy detector of claim 8 , wherein the SLS comprises InAs: GaSb having a thickness ˜0.09 μm.

10. The electromagnetic infrared energy detector of claim 1 , wherein the absorber layer comprises a plurality of quantum dots.

11. The electromagnetic infrared energy detector of claim 1 , wherein the metal layer comprises Au or Ag.

12. The electromagnetic infrared energy detector of claim 1 , wherein the coupling structure comprises a hole array.

13. The electromagnetic infrared energy detector of claim 1 , wherein the coupling structure comprises a semiconductor layer with post structures etched or deposited therein and the metal layer comprises a continuous metal layer.

14. The electromagnetic infrared energy detector of claim 1 , wherein the coupling structure is patterned and the metal layer comprises a corrugated metal layer.

15. The electromagnetic infrared energy detector of claim 1 , further comprising at least one doped contact layer.

16. The electromagnetic infrared energy detector of claim 1 , further comprising at least one etch-stop layer.

17. The electromagnetic infrared energy detector of claim 1 , wherein the SPW mode-confining layer comprises Ge.

18. The electromagnetic infrared energy detector of claim 1 , wherein the substrate comprises GaSb.

Assignees

• Brueck Steven R J
• Krishna Sanjay
• Lee Seung-Chang
• Stc Unm

Inventors

• Brueck Steven R J
• Krishna Sanjay
• Lee Seung-Chang

Classifications

• H10F77/1248

  having three or more elements, e.g. GaAlAs, InGaAs or InGaAsP · CPC title

• H10F71/1272

  comprising at least three elements, e.g. GaAlAs or InGaAsP · CPC title

• H10F77/1433

  Quantum dots · CPC title

• H10F77/703

  of the semiconductor bodies, e.g. textured active layers · CPC title

• H10F77/413 Primary

  directly associated or integrated with the devices, e.g. back reflectors (directly associated or integrated with photovoltaic cells H10F77/42) · CPC title