Method of manufacturing semiconductor apparatus

Patent metadata

Field	Value
Publication number	US-9466640-B2
Application number	US-201514614664-A
Country	US
Kind code	B2
Filing date	Feb 5, 2015
Priority date	Feb 20, 2014
Publication date	Oct 11, 2016
Grant date	Oct 11, 2016

Abstract

A method of manufacturing a semiconductor apparatus, comprising forming a structure including an insulating layer on a substrate, and an electrode on the structure, forming an insulating first film covering the electrode and the structure, forming an opening in a projection, of the first film, formed by a step between upper faces of the electrode and the structure, to expose part of the upper face of the electrode as a first portion, forming a second film covering the first film and the first portion, forming a protective film in the opening by processing the second film, the protective film covering a side face defining the opening and the first portion and being not formed on an upper face of the projection, and forming a third film on the first film and the protective film by spin coating.

First claim

What is claimed is:

1. A method of manufacturing a solid-state imaging apparatus, including a plurality of photoelectric conversion portions arranged on a substrate, a plurality of microlenses formed to correspond to the plurality of photoelectric conversion portions, and a plurality of color filters of a plurality of colors formed between the substrate and the plurality of microlenses,
the method comprising:
forming a structure including an insulating layer on the substrate, and forming an electrode on the structure;
forming a first film covering the electrode and the structure, the first film being insulative;
forming an opening in a projection of the first film, the projection being formed by a step between an upper face of the electrode and an upper face of the structure out of the first film, such that a first portion which is part of the upper face of the electrode is exposed;
forming a second film covering the first film and the first portion;
forming a protective film in the opening and a first color filter having one of the plurality of colors, simultaneously, by processing the second film, the protective film covering the first portion and a side face defining the opening, and being not formed on an upper face of the projection of the first film; and
forming a third film on the first film and the protective film by spin coating.

2. The method according to claim 1 , wherein the forming of the protective film and the first color filter includes patterning the second film by performing exposure processing and development processing of the second film.

3. The method according to claim 1 , wherein a height difference between the upper face of the projection of the first film and an upper face of the protective film is not more than 5,000 Å.

4. The method according to claim 1 , further comprising forming a second color filter having a color different from that of the first color filter by performing exposure processing and development processing of the third film.

5. The method according to claim 4 , further comprising, after the forming of the opening and before the forming of the second film, forming a fourth film covering the first film and the first portion, and forming a third color filter having a color different from those of the first color filter and the second color filter by performing exposure processing and development processing of the fourth film.

6. The method according to claim 1 , further comprising, after the forming of the third film, removing the protective film such that at least a part of the first portion is exposed.

7. The method according to claim 1 , wherein a film thickness of the first film and a film thickness of the second film are equal.

8. The method according to claim 1 , further comprising, after the forming of the opening and before the forming of the second film, forming, on the first film, a film of an organic material for bonding the first film and the second film.

9. The method according to claim 8 , wherein a film thickness of the organic material film is 5 to 100 Å.

10. The method according to claim 8 , wherein the organic material is an epoxy resin.

11. A method of manufacturing a solid-state imaging apparatus, including a plurality of photoelectric conversion portions arranged on a substrate, a plurality of microlenses formed to correspond to the plurality of photoelectric conversion portions, and a plurality of color filters of a plurality of colors formed between the substrate and the plurality of microlenses,
the method comprising:
forming, on the substrate, a structure in which an electrode is embedded in an insulating member;
forming a first film covering the structure, the first film being insulative;
forming an opening in the first film by removing a portion of the first film and a portion of the insulating member, such that a first portion which is part of an upper face of the electrode is exposed;
forming a second film covering the first film and the first portion;
forming a protective film in the opening and a first color filter having one of the plurality of colors, simultaneously, by processing the second film, the protective film covering the first portion and a side face defining the opening, and being not formed on an upper face of the first film; and
forming a third film on the first film and the protective film by spin coating.

12. The method according to claim 11 , further comprising forming a second color filter having a color different from that of the first color filter, by performing exposure processing and development processing of the third film.

13. The method according to claim 12 , further comprising, after the forming of the opening and before the forming of the second film, forming a fourth film covering the first film and the first portion, and forming a third color filter having a color different from those of the first color filter and the second color filter, by performing exposure processing and development processing on the fourth film.

14. A method of manufacturing a solid-state imaging apparatus, including a plurality of photoelectric conversion portions arranged on a substrate, a plurality of microlenses formed to correspond to the plurality of photoelectric conversion portions, and a plurality of color filters of a plurality of colors formed between the substrate and the plurality of microlenses,
the method comprising:
forming a structure including an insulating layer on the substrate, and forming an electrode on the structure;
forming a first film covering the electrode and the structure, the first film being insulative;
forming an opening by removing a portion of the first film and a portion of the insulating member, such that a first portion which is part of an upper face of the electrode is exposed;
forming a second film covering the first film and the first portion;
forming an exposure pattern and a first color filter having one of the plurality of colors, simultaneously, by exposing the second film, the exposure pattern covering the first portion and a side face defining the opening, and being not formed on an upper face of the first film; and
forming a third film on the first film and the exposure pattern by spin coating.

15. The method according to claim 14 , further comprising forming a second color filter having a color different from that of the first color filter by performing exposure processing and development processing on the third film.

16. The method according to claim 15 , further comprising, after the forming of the third film, forming a fourth film covering the first film and the first portion, and forming a third color filter having a color different from those of the first color filter and the second color filter by performing exposure processing and development processing on the fourth film.

Assignees

• Canon Kk

Inventors

• Inatani Naoki
• Shimoyama Daisuke
• Aoki Kei
• Kurihara Masaki

Classifications

• H10F77/413

  directly associated or integrated with the devices, e.g. back reflectors (directly associated or integrated with photovoltaic cells H10F77/42) · CPC title

• H10F77/30

  Coatings (arrangements for preventing damage to photovoltaic cells caused by corpuscular radiation H10F77/80) · CPC title

• H10F39/8063

  Microlenses · CPC title

• H10F39/8053

  Colour filters · CPC title

• H10F39/026

  Wafer-level processing · CPC title