Method for optimizing fluid flow across a sample within an electron microscope sample holder

Patent metadata

Field	Value
Publication number	US-9466459-B2
Application number	US-201514729547-A
Country	US
Kind code	B2
Filing date	Jun 3, 2015
Priority date	Jun 3, 2014
Publication date	Oct 11, 2016
Grant date	Oct 11, 2016

Abstract

A flow directing gasket for improving the flow of a gas or liquid across electron beam transparent membranes in environmental cells within a sample holder of an electron microscope, and uses of the sample holders comprising said flow directing gaskets.

First claim

What is claimed is:

1. A flow directing gasket comprising:
a first gasket having a first enclosed area, wherein the first gasket forms a seal on a first substantially planar surface;
a second gasket having a second enclosed area, wherein the second gasket forms a seal on a second substantially planar surface;
wherein the second enclosed area is smaller than the first enclosed area; and
at least one arm member that is attached to both the first and second gaskets, wherein the second gasket is on a plane that is different from that of the first gasket.

2. The gasket of claim 1 , wherein the at least one arm member has a first and a second end, wherein the first end is attached to the first gasket and second end is attached to the second gasket.

3. The gasket of claim 1 , wherein the gasket comprises two arm members.

4. The gasket of claim 1 , wherein the gasket comprises three arm members.

5. The gasket of claim 1 , wherein the gasket comprises four arm members.

6. The gasket of claim 1 , wherein the second gasket is substantially centered relative to the first gasket.

7. The gasket of claim 1 , wherein the second gasket is not substantially centered relative to the first gasket.

8. The gasket of claim 1 , wherein the at least one member comprises a step from a first plane of the first gasket to a second plane of the second gasket.

9. The gasket of claim 8 , wherein the step is shaped to form a seal at the edge of a MEMS chip such that fluid will not flow between the step and the edge of the MEMS chip.

10. The gasket of claim 8 , wherein the step is shaped to provide a holding force to a first MEMS device.

11. The gasket of claim 8 , wherein the step comprises a riser that has a height that is substantially similar to a depth of a MEMS chip.

12. The gasket of claim 1 , wherein the first area defines a circle, a square or a rectangle.

13. The gasket of claim 1 , wherein the second area defines a circle, a square or a rectangle.

14. The gasket of claim 1 , wherein the first substantially planar surface comprises a MEMS device selected from the group consisting of a window device, an electrical device, and a thermal device.

15. The gasket of claim 1 , wherein the second substantially planar surface comprises a MEMS device selected from the group consisting of a window device, an electrical device, and a thermal device.

16. The gasket of claim 1 , wherein the first gasket comprises at least one brace to provide a holding force to a second MEMS device.

17. A sample holder for an electron microscope, said sample holder comprising a sample holder body, a sample holder cover, and a gasket of claim 1 .

18. The sample holder of claim 17 , further comprising at least one MEMS chip.

19. A method of imaging a sample in a liquid and/or gaseous environment in an electron microscope, said method comprising inserting a sample in a sample holder, inserting the sample holder comprising the sample in an electron microscope, introducing a liquid and/or gas to the sample in the sample holder, and imaging the sample in the electron microscope, wherein the sample holder comprises a sample holder of claim 17 .

Assignees

• Protochips Inc

Inventors

• Gardiner Daniel Stephen
• Walden Ii Franklin Stampley
• Damiano Jr John

Classifications

• H01J37/20 Primary

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• F16J15/064

  the packing combining the sealing function with other functions · CPC title

• H01J2237/2006

  Vacuum seals · CPC title

• F16J15/022

  characterised by structure or material · CPC title

• F16J15/062

  characterised by the geometry of the seat · CPC title