Diffraction element and method of manufacturing diffraction element

Patent metadata

Field	Value
Publication number	US-9465149-B2
Application number	US-201313954003-A
Country	US
Kind code	B2
Filing date	Jul 30, 2013
Priority date	Aug 13, 2012
Publication date	Oct 11, 2016
Grant date	Oct 11, 2016

Abstract

Provided is an immersion diffraction element that prevents decrease of diffraction efficiency thereof so as to satisfy optical performance. A reflection type diffraction element is made of a material transmitting a light, beam having a predetermined wavelength. An echelle diffraction grating covered with a reflecting film that prevents transmission of the light beam is formed on one surface of the material. A diffraction grating is formed off in a repeated manner, a blazed surface facing incident light and a non-blazed surface connecting the blazed surface to a neighboring blazed surface. An angle formed between the blazed surface and the non-blazed surface is an acute angle. A defect generated at a grating vertex of the blazed surface fails in a shadow of the neighboring blazed surface so as to prevent the incident light from becoming scattered light due to the defect portion.

First claim

What is claimed is:

1. A diffraction element, comprising:
a plurality of blazed surfaces formed on a brittle material, the plurality of blazed surfaces comprising a first blazed surface and a second blazed surface adjacent to the first blazed surface;
a non-blazed surface connecting the first blazed surface and the second blazed surface; and
a metal reflecting film formed on the plurality of blazed surfaces,
wherein the diffraction element permits light to pass into the diffraction element and to be reflected by the metal reflecting film formed on the plurality of blazed surfaces so that beams of the light reflected interfere, by the plurality of blazed surfaces, with each other and pass out of the diffraction element for spectral separation of the light,
wherein an angle formed between the non-blazed surface and the first blazed surface is an acute angle of 86° or more, and
wherein a chip or crack formed between the non-blazed surface and the first blazed surface falls in a shadow of the second blazed surface.

2. The diffraction element according to claim 1 , wherein the metal reflecting film comprises gold or aluminum.

3. The diffraction element according to claim 1 , wherein the plurality of blazed surfaces each comprise a part that does not reflect the light, and
wherein a height of the part that does not reflect the light is 10 μm or more and 15 μm or less.

4. The diffraction element according to claim 1 , wherein the brittle material comprises an infrared transmissive crystalline material.

5. The diffraction element according to claim 1 , wherein the brittle material comprises (1) a material including cadmium telluride and zinc or (2) a material including thallium bromide and thallium iodide.

6. The diffraction element according to claim 1 , wherein the brittle material comprises germanium (Ge), silicon (Si), gallium arsenide (GaAs), cadmium telluride (CdTe), cadmium zinc telluride (CdZnTe), zinc selenide (ZnSe), zinc sulfide (ZnS), or iodide bromide thallium.

7. The diffraction element according to claim 1 , wherein the acute angle is 87° or less.

8. A method of manufacturing a diffraction element by forming a plurality of blazed surfaces and a non-blazed surface on a brittle material, the plurality of blazed surfaces comprising a first blazed surface and a second blazed surface adjacent to the first blazed surface, the non-blazed surface comprising a first non-blazed surface connecting the first blazed surface and the second blazed surface, the method comprising forming the plurality of blazed surfaces and the non-blazed surface by cutting a surface of a base material formed of the brittle material with ridgeline cutting edges of a tool so that an angle formed between the first blazed surface and the first non-blazed surface is an acute angle of 86° or more,
wherein a chip or crack formed between the first non-blazed surface and the first blazed surface falls in a shadow of the second blazed surface.

9. The method of manufacturing a diffraction element according to claim 8 , wherein a depth of the cutting is 0.1 μm or more and 0.5 μm or less.

10. The method of manufacturing a diffraction element according to claim 9 , wherein the base material comprises (1) a material including cadmium telluride and zinc or (2) a material including thallium bromide and thallium iodide.

11. The method of manufacturing a diffraction element according to claim 8 , wherein the brittle material comprises germanium (Ge), silicon (Si), gallium arsenide (GaAs), cadmium telluride (CdTe), cadmium zinc telluride (CdZnTe), zinc selenide (ZnSe), zinc sulfide (ZnS), or iodide bromide thallium.

12. The method of manufacturing a diffraction element according to claim 8 , wherein the acute angle is 87° or less.

13. An immersion diffraction element comprising:
a plurality of blazed surfaces formed on an inclined surface of a triangular prism formed of a brittle material and including two bottom surfaces, two side surfaces, and the inclined surface, the two side surfaces being perpendicular to each other, and the blazed surface being parallel to either one of the two side surfaces, the plurality of blazed surfaces comprising a first blazed surface and a second blazed surface adjacent to the first blazed surface; and
a non-blazed surface connecting the first blazed surface and the second blazed surface,
wherein the diffraction element permits light to pass into the diffraction element and to be reflected by the plurality of blazed surfaces so that beams of the light reflected by the plurality of blazed surfaces interfere with each other and pass out of the diffraction element for spectral separation of the light,
wherein an angle formed between the non-blazed surface and the first blazed surface is an acute angle of 86° or more, and
wherein a chip or crack formed between the non-blazed surface and the first blazed surface falls in a shadow of the second blazed surface.

14. An infrared spectroscopic apparatus comprising the immersion diffraction element according to claim 13 .

15. The immersion diffraction element according to claim 13 , wherein the brittle material comprises germanium (Ge), silicon (Si), gallium arsenide (GaAs), cadmium telluride (CdTe), cadmium zinc telluride (CdZnTe), zinc selenide (ZnSe), zinc sulfide (ZnS), or iodide bromide thallium.

16. The immersion diffraction element according to claim 13 , wherein the acute angle is 87° or less.

Assignees

• Canon Kk

Inventors

• Sugiyama Shigeru
• Tanaka Masato

Classifications

• Y10T83/05

  With reorientation of tool between cuts · CPC title

• G02B5/1861

  Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials (G02B5/1809, G02B5/1828, G02B5/1833, G02B5/1838 and G02B5/1847 take precedence) · CPC title

• G02B5/1852 Primary

  using mechanical means, e.g. ruling with diamond tool, moulding · CPC title