Magnetic bearing assembly formed by measuring first and second order transverse stray magnetic fields

Patent metadata

Field	Value
Publication number	US-9464667-B2
Application number	US-201214112457-A
Country	US
Kind code	B2
Filing date	May 4, 2012
Priority date	May 6, 2011
Publication date	Oct 11, 2016
Grant date	Oct 11, 2016

Abstract

Stray magnetic fields created by non-symmetrical magnetisation of the permanent magnets in a rotating magnet array of a magnetic bearing assembly, when used in turbo molecular pumps, can cause significant problems to devices such as scanning electron microscopes. In order to minimise the stray fields, at least the dipole and quadrupole moments of each magnet in the array is first measured. The magnets in the array are then arranged relative to one another such that both the dipole and quadrupole moments are minimised, thus minimising the stray magnetic field when the magnet array rotates in the turbomolecular pump.

First claim

The invention claimed is:

1. A method of assembling a rotatable permanent magnet array of a magnetic bearing arrangement, said rotating array comprising at least four permanent ring magnets, the method comprising the steps of:
measuring at least the first and second order transverse stray magnetic field vectors for each of the at least four ring magnets in relation to a reference point on the ring magnets;
calculating the relative angular orientation and relative magnetic polarity direction for each magnet within the array such that, when the at least four magnets are assembled and rotated, the time-varying magnetic field is minimised; and
assembling the array of magnets according to the calculation.

2. The method of assembling a rotatable magnet array according to claim 1 , comprising the additional step of measuring the first and second order transverse stray magnetic field vector of the array once assembled according to the calculation step.

3. A rotatable magnet array of a permanent magnet bearing arrangement, comprising at least four permanent ring magnets, assembled according to a method comprising:
measuring at least the first and second order transverse stray magnetic field vectors for each of the at least four ring magnets in relation to a reference point on the ring magnets;
calculating the relative angular orientation and relative magnetic polarity direction for each magnet within the array such that, when the at least four magnets are assembled and rotated, the time-varying magnetic field is minimized; and
assembling the array of magnets according to the calculation.

4. A high speed rotational device comprising a bearing arrangement formed through a process comprising:
measuring at least the first and second order transverse stray magnetic field vectors for each of at least four ring magnets in relation to a reference point on the ring magnets;
calculating the relative angular orientation and relative magnetic polarity direction for each magnet within the array such that, when the at least four magnets are assembled and rotated, the time-varying magnetic field is minimized; and
assembling the array of magnets according to the calculation.

5. The high speed rotational device of claim 4 wherein the high speed rotation device comprises a turbomolecular pump.

Assignees

• Brewster Barrie Dudley
• Waye Andrew
• Edwards Ltd

Inventors

• Brewster Barrie Dudley
• Waye Andrew

Classifications

• G01P3/487

  delivered by rotating magnets · CPC title

• Y10T29/49004

  including measuring or testing of device or component part · CPC title

• H01F7/0236

  Magnetic suspension or levitation (for vehicles B60L13/04; magnetic bearings F16C39/063) · CPC title

• F16C32/0425 Primary

  for radial load mainly · CPC title

• F16C32/04 Primary

  using magnetic or electric supporting means · CPC title