Electromagnetic chuck for OLED mask chucking

Patent metadata

Field	Value
Publication number	US-9463543-B2
Application number	US-201414463254-A
Country	US
Kind code	B2
Filing date	Aug 19, 2014
Priority date	Jun 2, 2014
Publication date	Oct 11, 2016
Grant date	Oct 11, 2016

Abstract

An electromagnetic mask chuck is described herein. The electromagnetic mask chuck includes a body with a plurality of electromagnets formed therein. The electromagnets can then deliver a magnetic force to a mask to position and hold the mask over or on the substrate for further deposition. The electromagnets are controlled using a power source, to deliver a controlled magnetic field to the mask.

First claim

What is claimed is:

1. A processing system comprising:
a process chamber configured to deposit a material on the substrate;
a carrier positioning element disposed in the process chamber, the carrier positioning element configured to receive and position a removable substrate carrier in the process chamber; and
an electromagnetic mask chuck positioned in the process chamber, aligned with the carrier positioning element, the electromagnetic mask chuck comprising:
a plurality of electromagnets operable to chuck a mask to the substrate on the substrate carrier through the substrate carrier; and
a power source coupled to the plurality of electromagnets.

2. The processing system of claim 1 , wherein the electromagnetic mask chuck is operable to sequential increase a magnetic field from the plurality of electromagnets.

3. The processing system of claim 2 , wherein the electromagnetic mask chuck is operable to generate more force in a center region of the electromagnetic mask chuck relative to a peripheral region of the electromagnetic mask chuck.

4. The processing system of claim 2 , wherein the electromagnetic mask chuck is operable to generate more force on one side of the electromagnetic mask chuck relative to an opposite side of the electromagnetic mask chuck.

5. The processing system of claim 1 , wherein a first electromagnet of the plurality of electromagnets is configured to deliver a magnetic field having a strength different than a second electromagnet.

6. The processing system of claim 1 , wherein the plurality of electromagnets are independently controllable.

7. The processing system of claim 1 , wherein the plurality of electromagnets are each configured to produce a magnetic field with unequal strength as compared between them, such that one portion of the mask is pulled with more force than another proportion of the mask.

8. A substrate carrier for use in a process chamber, the substrate carrier comprising:
a support base configured to transport a substrate into and out of the processing chamber, the support base having a substrate supporting surface and a plurality of electrodes operable to hold a substrate to the substrate supporting surface; and
an electromagnetic mask chuck coupled to the support base, the electromagnetic mask chuck comprising a plurality of electromagnets operable to chuck a mask to the substrate through the substrate carrier.

9. The substrate carrier of claim 8 , wherein the plurality of electromagnets are positioned equidistant from the substrate supporting surface.

10. The substrate carrier of claim 8 , wherein a distance between the electromagnets and the substrate supporting surface varies.

11. The substrate carrier of claim 8 , wherein the plurality of electromagnets are rectangular magnets.

12. The substrate carrier of claim 8 , wherein the electromagnets are independently controllable.

13. The substrate carrier of claim 8 , wherein the electromagnetic mask chuck is operable to sequentially increase a magnetic field from the plurality of electromagnets.

14. The substrate carrier of claim 8 , further comprising a power source coupled to the plurality of electromagnets.

15. The substrate carrier of claim 12 , wherein the chuck body comprises a ceramic material.

Assignees

• Applied Materials Inc

Inventors

• White John M
• Wang Zuoqian

Classifications

• C23C14/50

  Substrate holders · CPC title

• Y10T279/23

  with magnetic or electrostatic means · CPC title

• C23C14/042 Primary

  using masks · CPC title

• B23Q3/1546 Primary

  using permanent magnets · CPC title