System and apparatus for efficient deposition of transparent conductive oxide

Patent metadata

Field	Value
Publication number	US-9460925-B2
Application number	US-201514933957-A
Country	US
Kind code	B2
Filing date	Nov 5, 2015
Priority date	Nov 5, 2014
Publication date	Oct 4, 2016
Grant date	Oct 4, 2016

Abstract

A substrate processing system that includes a substrate processing chamber having one or more sidewalls that at least partially define a substrate processing region and extend away from a bottom wall of the substrate processing chamber at an obtuse angle; a source material holder configured to hold a source material within the substrate processing region; a plasma gun operatively coupled to introduce a plasma beam into the substrate processing region; one or more magnets operatively arranged to generate a magnetic field that guides the plasma beam to the source material holder; and a substrate carrier configured to hold one or more substrates within the substrate processing region.

First claim

What is claimed is:

1. A substrate processing system comprising:
a substrate processing chamber having one or more sidewalls that at least partially define a substrate processing region and extend away from a bottom wall of the substrate processing chamber at an obtuse angle;
a source material holder configured to hold a source material within the substrate processing region;
a plasma gun operatively coupled to introduce a plasma beam into the substrate processing region;
one or more magnets operatively arranged to generate a magnetic field that guides the plasma beam to the source material holder;
a substrate carrier configured to hold one or more substrates within the substrate processing region; and
a substrate transport mechanism configured to move the substrate carrier through the substrate processing region during a substrate deposition process.

2. The substrate processing system of claim 1 wherein the one or more angled sidewalls include first and second opposing sidewalls spaced apart on opposite sides of the source material holder and wherein the plasma gun is positioned adjacent to the first opposing sidewall with the gun pointing in a direction perpendicular to the first opposing sidewall.

3. The substrate processing system of claim 1 wherein at least one of the one or more chamber sidewalls includes a first section that extends substantially vertically from a bottom of the chamber and a second section that extends from the first section towards a top of the chamber at the obtuse angle.

4. The substrate processing system of claim 1 wherein the one or more angled sidewalls include first and second opposing sidewalls spaced apart on opposite sides of the source material holder, each of the first and second opposing sidewalls including a first section that extends substantially vertically from a bottom of the chamber and a second section that extends from the first section towards a top of the chamber at the obtuse angle.

5. The substrate processing system of claim 1 wherein the substrate carrier holds a plurality of substrates and has first and second opposing ends that define a length of the substrate carrier and a width that is greater than the length.

6. The substrate processing system of claim 5 further comprising a substrate transport mechanism configured to move the substrate carrier through the substrate processing region during a substrate deposition process along a linear path at a constant speed such that the substrate carrier enters the substrate processing region with its first end and exits the substrate processing region with its second end.

7. The substrate processing system of claim 1 wherein the substrate carrier comprises a plurality of panels connected to each other by hinges, wherein each panel extends along a length of the substrate carrier and is configured to hold a plurality of substrates.

8. The substrate processing system of claim 7 wherein the substrate transport mechanism configured to move the substrate carrier through the substrate processing region during a substrate deposition process such that the panels of the substrate carrier are in a domed-shape as the substrate carrier passes through the substrate processing region.

9. The substrate processing system of claim 1 wherein the substrate transport carrier is configured to hold a plurality of substantially flat substrates in the substrate processing region in a dome-shaped arrangement such that a difference in distance between substrates at outer edges of the substrate carrier and the source material and between substrates in a center of the carrier and the source material is reduced.

10. The substrate processing system of claim 1 wherein the substrate transport mechanism configured to transport the plurality of substrates such that the plurality of substrates enter and exit the substrate processing chamber in a substantially flat arrangement and proceed through the substrate processing region in a dome-shaped arrangement.

11. The substrate processing system of claim 10 wherein the dome-shaped arrangement comprises four rows of substantially flat substrates with the substrates in each row being angled with respect to the substrates in an adjacent row.

12. A substrate processing system comprising:
a substrate processing chamber having one or more sidewalls that at least partially define a substrate processing region and extend away from a bottom wall of the substrate processing chamber at an obtuse angle;
a source material holder configured to hold a source material within the substrate processing region;
a plasma gun operatively coupled to introduce a plasma beam into the substrate processing region;
one or more magnets operatively arranged to generate a magnetic field that guides the plasma beam to the source material holder; and
a substrate carrier configured to hold one or more substrates within the substrate processing region;
wherein the substrate processing region of the chamber is at least 100% wider than it is long and the one or more angled walls include first and second opposing walls that define a length of the substrate processing chamber within the substrate processing region.

13. A substrate processing system comprising:
a substrate processing chamber having one or more sidewalls that at least partially define a substrate processing region;
a plurality of source material holders positioned within the substrate processing region, each configured to hold source material;
a plurality of plasma guns corresponding to the plurality of source material holders, each plasma gun in the plurality of plasma guns being operatively coupled to introduce a plasma beam into the substrate processing region;
a plurality of magnets operatively arranged to generate magnetic fields that, for each plasma beam generated by a plasma gun in the plurality of plasma guns, directs the plasma beam to its corresponding source material holder;
a substrate carrier configured to hold a plurality of substrates; and
a substrate transport mechanism configured to move the substrate carrier through the substrate processing chamber such that the plurality of substrates are moved through the substrate processing region.

14. The substrate processing system of claim 13 wherein the one or more angled sidewalls include first and second opposing sidewalls spaced apart on opposite sides of the plurality of source material holders, each extending away from a bottom wall of the substrate processing chamber at an obtuse angle, and wherein a first set of the plasma guns is positioned adjacent to the first opposing sidewall with the gun pointing in a direction perpendicular to the first opposing sidewall and a second set of the plasma guns is positioned adjacent to the second opposing sidewall with the gun pointing in a direction perpendicular to the second opposing sidewall.

15. The substrate processing system of claim 13 wherein the plurality of source material holders are positioned in an evenly-spaced staggered relationship such that a distribution of source material from each adjacent source material holder overlaps.

16. The substrate processing system of claim 13 wherein the substrate carrier holds a plurality of substrates and has first and second opposing ends that define a length of the substrate carrier and a width that is greater than the length and wherein the substrate processing system further comprises a substrate transport mechanism configured to move the substrate carrier through the substrate processing region during a substrate deposition process along a linear path at a constant speed such that the subst

Assignees

• Solarcity Corp

Inventors

• Wang Wei
• Fu Jianming
• Xu Zheng
• Reynolds Kenneth Reese
• Lefevre Ollivier Jacky

Classifications

• H10P32/1406

  by ion implantation · CPC title

• H10P32/171 Primary

  being group IV material · CPC title

• H01J37/32009 Primary

  Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources (plasma generation in general H05H1/24) · CPC title

• H10F77/244

  made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers · CPC title

• H10F71/138

  Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes · CPC title