Seal ring inductor and method of forming the same

Patent metadata

Field	Value
Publication number	US-9460840-B2
Application number	US-201113040096-A
Country	US
Kind code	B2
Filing date	Mar 3, 2011
Priority date	Mar 3, 2011
Publication date	Oct 4, 2016
Grant date	Oct 4, 2016

Abstract

Apparatuses and methods for providing inductance are disclosed. In one embodiment, a method for providing an inductor includes forming an electrical circuit on a substrate, forming a seal ring around the perimeter of the electrical circuit, providing a break in at least one layer of the seal ring, and electrically connecting the seal ring such that the seal ring operates as an inductor.

First claim

What is claimed is:

1. An electronic system comprising:
an integrated circuit (IC) including a substrate, a circuit area disposed on the substrate, and a seal ring disposed on the substrate and surrounding the perimeter of the circuit area, the circuit area including a first capacitor configured to receive a radio frequency (RF) signal generated by the IC and electrically connected to an antenna or a first RF circuit that is external to the IC, the seal ring including a first coil in a first conductive layer, the first coil having a first break defining a first end and a second end of the first coil, the first end of the first coil including a first end of the seal ring, the first end of the seal ring forming a single electrical node at which the seal ring is electrically connected to the first capacitor and to the antenna or the first RF circuit, the seal ring configured to operate as an inductive component.

2. The electronic system of claim 1 wherein the seal ring further includes a second coil in a second conductive layer that is adjacent the first conductive layer, the second coil including a second break.

3. The electronic system of claim 2 wherein the second break defines a first end and a second end of the second coil.

4. The electronic system of claim 3 further comprising a via for electrically connecting the second end of the first coil to the first end of the second coil.

5. The electronic system of claim 2 wherein the first break and the second break at least partially overlap when the first and second conductive layers are viewed from above the substrate.

6. The electronic system of claim 1 wherein the substrate is a gallium arsenide (GaAs) substrate.

7. The electronic system of claim 1 wherein the first end of the seal ring is connected to the first RF circuit, the first RF circuit further includes a bias circuit, the seal ring is configured to prevent high frequency signal components of the first RF circuit from reaching the bias circuit, and a second end of the seal ring is electrically connected to the bias circuit.

8. The electronic system of claim 1 wherein the IC further includes a pin, the first capacitor having a first end electrically connected to the pin.

9. The electronic system of claim 1 wherein the seal ring further includes a second end of the seal ring that is electrically connected to a ground supply.

10. The electronic system of claim 1 wherein the seal ring and the first capacitor of the IC are configured to protect the IC from an electrostatic discharge (ESD).

11. The electronic system of claim 1 wherein the seal ring and the first capacitor of the IC are configured to filter signals from the first RF circuit.

12. The electronic system of claim 1 further comprising a second capacitor having a first end electrically connected to a first end of the first capacitor and to the first end of the seal ring.

13. The electronic system of claim 1 further comprising a second RF circuit electrically connected to a first end of the first capacitor and to a second end of the seal ring.

14. An electronic system comprising:
an integrated circuit (IC) including a substrate means, a circuit area disposed on the substrate means, and a seal ring means disposed on the substrate means and surrounding the electronic circuit means, the circuit area including a first capacitor configured to receive a radio frequency (RF) signal generated by the IC and electrically connected to an antenna or a first RF circuit that is external to the IC, the seal ring means including a first coil in a first conductive layer, the first coil having a first break defining a first end and a second end of the first coil, the first end of the first coil including a first end of the seal ring means, the first end of the seal ring means forming a single electrical node at which the seal ring means is electrically connected to the first capacitor and to the antenna or the first RF circuit, the seal ring means configured to operate as an inductive component.

15. The apparatus of claim 14 wherein the seal ring means further includes a second coil in a second conductive layer that is adjacent the first conductive layer, the second coil having a second break.

16. The apparatus of claim 15 wherein the second break defines a first end and a second end of the second coil.

17. The apparatus of claim 16 further comprising a via for electrically connecting the second end of the first coil to the first end of the second coil.

18. A semiconductor die comprising:
a substrate;
a circuit area fabricated on a surface of the substrate, the circuit area including a first capacitor configured to receive a radio frequency (RF) signal generated in the circuit area and configured for electrical connection to an antenna or a first RF circuit that is external to the semiconductor die; and
a seal ring fabricated on the substrate and surrounding a perimeter of the circuit area, the seal ring including a first coil in a first conductive layer, the first coil including a first break defining a first end and a second end of the first coil, the first end of the first coil including a first end of the seal ring, the first end of the seal ring forming a single electrical node at which the seal ring is configured for electrical connection to the first capacitor and to the antenna or the first RF circuit, the seal ring configured to operate as an inductive component.

19. The semiconductor die of claim 18 wherein the seal ring is configured to inhibit moisture from reaching the circuit area.

20. The semiconductor die of claim 18 wherein the seal ring is configured to inhibit the substrate from cracking.

21. The semiconductor die of claim 18 wherein the seal ring further includes a second coil in a second conductive layer that is adjacent the first conductive layer, the second coil including a second break.

22. The semiconductor die of claim 21 wherein the first break and the second break at least partially overlap when the first and second conductive layers are viewed from above the substrate.

23. The semiconductor die of claim 22 wherein the first and second conductive layers are electrically connected to one another using a first plurality of vias.

24. The semiconductor die of claim 23 wherein the seal ring further includes a third coil in a third conductive layer that is adjacent the second conductive layer, the third coil including a third break at least partially overlapping the first and second breaks, the second and third conductive layers electrically connected to one another using a second plurality of vias.

25. The semiconductor die of claim 18 wherein the first end and the second end of the first coil are separated by a distance in the range of about 10 μm to about 20 μm.

Assignees

• Altunkilic Fikret
• Cebi Haki
• Skyworks Solutions Inc

Inventors

• Altunkilic Fikret
• Cebi Haki

Classifications

• H10W44/248

  for antennas · CPC title

• H10W44/231

  Arrangements for applying bias · CPC title

• H10W44/20

  at high-frequency [HF] or radio frequency [RF] · CPC title

• H10W42/121 Primary

  protecting against mechanical damage (H10W76/00, H10W74/00 take precedence) · CPC title

• H10W42/60

  protecting against electrostatic charges or discharges, e.g. Faraday shields (integrated devices comprising arrangements for electrical protection H10D89/60) · CPC title