Deposition apparatus, organic light emitting display apparatus, and method of manufacturing organic light emitting display apparatus using the deposition apparatus

Patent metadata

Field	Value
Publication number	US-9455170-B2
Application number	US-201414230523-A
Country	US
Kind code	B2
Filing date	Mar 31, 2014
Priority date	Apr 18, 2013
Publication date	Sep 27, 2016
Grant date	Sep 27, 2016

Abstract

A deposition apparatus includes a deposition unit including a plurality of deposition assemblies, which are separated from a substrate at a predetermined distance and deposit a material onto the substrate while a first transfer unit transfers the substrate. Each of the plurality of deposition assemblies includes a patterning slit sheet facing a deposition source nozzle unit, a positional information obtaining unit obtaining positional information regarding a position of the substrate transferred by the first transfer unit, and a sheet stage adjusting a position of the patterning slit sheet with respect to the substrate transferred by the first transfer unit according to the positional information.

First claim

What is claimed is:

1. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
transferring a moving unit into a chamber by a first transfer unit that is installed so as to enter the chamber in a state where a substrate is fixed to the moving unit;
forming a layer by causing deposition materials discharged from a plurality of deposition assemblies to be sequentially deposited onto the substrate while the first transfer unit transfers the substrate with respect to the plurality of deposition assemblies in a state where the substrate is separated from the plurality of deposition assemblies disposed within the chamber at a predetermined distance; and
returning the moving unit separated from the substrate by a second transfer unit that is installed so as to enter the chamber,
wherein each of the plurality of deposition assemblies includes:
a deposition source configured to emit the deposition material;
a deposition source nozzle unit that is disposed toward the first transfer unit from the deposition source and has a deposition source nozzle formed therein;
a patterning slit sheet that is disposed so as to face the deposition source nozzle unit and in which a plurality of patterning slits are disposed in one direction;
a positional information obtaining unit configured to obtain positional information regarding a position of the substrate on the moving unit transferred by the first transfer unit; and
a sheet stage configured to adjust a position of the patterning slit sheet with respect to the substrate on the moving unit transferred by the first transfer unit, and
wherein the forming of a layer includes depositing material onto the substrate while adjusting the position of-the patterning slit sheet by the sheet stage, according to the positional information obtained by the positional information obtaining unit.

2. The method as claimed in claim 1 , wherein the forming of a layer includes forming a layer by causing, in each of the plurality of deposition assemblies, the positional information obtaining unit to obtain the positional information regarding the position of the substrate on the moving unit transferred by the first transfer unit before the substrate on the moving unit transferred by the first transfer unit reaches the patterning slit sheet.

3. The method as claimed in claim 2 , wherein the forming of a layer includes forming a layer by causing, in each of the plurality of deposition assemblies, the sheet stage to adjust the position of the patterning slit sheet before the substrate on the moving unit transferred by the first transfer unit reaches the patterning slit sheet, according to the positional information obtained by the positional information obtaining unit.

4. The method as claimed in claim 1 , wherein the forming of a layer includes forming a layer by causing the deposition materials discharged from a plurality of prior deposition assemblies to be sequentially deposited onto the substrate while the first transfer unit transfers the substrate with respect to the plurality of prior deposition assemblies in a state where the plurality of prior deposition assemblies disposed within the chamber are separated from the substrate at a predetermined distance, and then by causing the deposition materials discharged from the plurality of deposition assemblies to be sequentially deposited onto the substrate.

5. The method as claimed in claim 4 , wherein each of the plurality of prior deposition assemblies includes:
a deposition source configured to emit the deposition material;
a deposition source nozzle unit that is disposed toward the first transfer unit from the deposition source and has a deposition source nozzle formed therein;
a patterning slit sheet that is disposed so as to face the deposition source nozzle unit and has an opening extending in one direction.

6. The method as claimed in claim 4 , wherein the forming of a layer includes causing deposition to be performed in a state where the position of the patterning slit sheet of each of the plurality of prior deposition assemblies is fixed, while transferring the substrate on the moving unit by the first transfer unit through the patterning slit sheet of each of the plurality of prior deposition assemblies.

7. The method as claimed in claim 1 , wherein:
the sheet stage includes a first stage and a second stage, and
the patterning slit sheet is on the second stage.

8. The method as claimed in claim 7 , wherein adjusting the position of the patterning slit sheet by the sheet stage includes adjusting the position of the patterning slit sheet in an X-axis direction and a Y-axis direction using the first stage, the patterning slit sheet extending in the X-axis direction and the Y-axis direction.

9. The method as claimed in claim 8 , wherein adjusting the position of the patterning slit sheet in the X-axis direction and the Y-axis direction includes using a plurality of actuators included in the first stage.

10. The method as claimed in claim 8 , wherein adjusting the position of the patterning slit sheet by the sheet stage includes adjusting the position of the patterning slit sheet in a Z-axis direction using the second stage, the Z-axis direction being orthogonal to the X-axis direction and the Y-axis direction.

11. The method as claimed in claim 10 , wherein adjusting the position of the patterning slit sheet in the Z-axis direction includes using an actuator included in the second stage.

12. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
transferring a moving unit into a chamber by a first transfer unit that is installed so as to enter the chamber in a state where a substrate is fixed to the moving unit;
forming a layer by causing deposition materials discharged from a plurality of deposition assemblies to be sequentially deposited onto the substrate while the first transfer unit transfers the substrate with respect to the plurality of deposition assemblies in a state where the substrate is separated from the plurality of deposition assemblies disposed within the chamber at a predetermined distance; and
returning the moving unit separated from the substrate by a second transfer unit that is installed so as to enter the chamber,
wherein each of the plurality of deposition assemblies includes:
a deposition source configured to emit the deposition material;
a deposition source nozzle unit that is disposed toward the first transfer unit from the deposition source and has a deposition source nozzle formed therein;
a patterning slit sheet that is disposed so as to face the deposition source nozzle unit and in which a plurality of patterning slits are disposed in one direction;
a positional information obtaining unit configured to obtain positional information regarding a position of the substrate on the moving unit transferred by the first transfer unit; and
a sheet stage configured to adjust a position of the patterning slit sheet with respect to the substrate on the moving unit transferred by the first transfer unit,
wherein the forming of a layer includes forming a layer while adjusting the position of the patterning slit sheet by the sheet stage, according to the positional information obtained by the positional information obtaining unit, and
wherein adjusting the position of the patterning slit sheet by the sheet stage includes adjusting the position of the patterning slit sheet continuously while the substrate passes through the patterning slit sheet.

Assignees

• Samsung Display Co Ltd

Inventors

• Kim Sang-Youn
• Lee Myung-Ki
• Jeong Sang-Yong

Classifications

• H10P72/3314 Primary

  Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers · CPC title

• H01L21/6776 Primary

  Electricity · mapped topic

• H01L51/0011

  Electricity · mapped topic

• H05B33/10 Primary

  Apparatus or processes specially adapted to the manufacture of electroluminescent light sources · CPC title

• H10K71/166

  using selective deposition, e.g. using a mask · CPC title