Nano structure including dielectric particle supporter

Patent metadata

Field	Value
Publication number	US-9455065-B2
Application number	US-201414312453-A
Country	US
Kind code	B2
Filing date	Jun 23, 2014
Priority date	Dec 19, 2013
Publication date	Sep 27, 2016
Grant date	Sep 27, 2016

Abstract

Provided are a nano structure, a fabrication method thereof, and an application device using the same. The nano structure includes a substrate; a dielectric particle supporter having a surface, wherein the dielectric particle supporter is formed over the substrate, and a linker bonded to the surface of the dielectric particle supporter; and a metallic nanoparticle bonded to the linker.

First claim

What is claimed is:

1. A nano structure, comprising:
a substrate;
a plurality of dielectric particle supporters formed over the substrate;
a plurality of linkers bonded to the dielectric particle supporters; and
one or more metallic nanoparticles bonded to the linkers.

2. The nano structure of claim 1 , wherein the metallic nanoparticles axe grown from metal ions bonded to the linkers.

3. The nano structure of claim 1 , wherein each of the dielectric particle supporters includes at least one material selected from the group including a silicon oxide, a hafnium oxide, an aluminum oxide, a zirconium oxide, a barium-titanium composite oxide, an yttrium oxide, a tungsten oxide, a tantalum oxide, a zinc oxide, a titanium oxide, a tin oxide, a barium-zirconium composite oxide, a silicon nitride, a silicon oxynitride, a zirconium silicate, and a hafnium silicate.

4. The nano structure of claim 1 , further comprising:
at least one of a dielectric organic material and an inorganic oxide that is bonded to a surface of the metallic nanoparticle.

5. The nano structure of claim 1 , wherein the metallic nanoparticle has an average particle diameter of about 2.0 nm to 3.0 nm.

6. The nano structure of claim 1 , further comprising an organic surfactant of one or more kinds bonded to the nanoparticle.

7. The nano structure of claim 6 , wherein the organic surfactant is a nitrogen-containing organic material or a sulfur-containing organic material.

8. The nano structure of claim 7 , wherein the metallic nanoparticle has an average particle diameter of about 1.3 nm to 1.9 nm.

9. The nano structure of claim 6 , wherein the organic surfactant includes a first organic material and a second organic material of different kinds, and
the first organic material is a nitrogen-containing organic material or a sulfur-containing organic material, and
the second organic material is a phase-transfer catalyst-based organic material.

10. The nano structure of claim 9 , wherein the metallic nanoparticle has an average particle diameter of about 0.5 nm to 1.2 nm.

11. The nano structure of claim 1 , wherein the linkers include a plurality of organic monomolecules bonded to surfaces of the dielectric particle supporters.

12. The nano structure of claim 1 , wherein the linkers include a plurality of first functional group bonded to the surfaces of the dielectric particle supporters, a plurality of second functional groups bonded to the one or more metallic nanoparticles, and a plurality of chain groups that connect the first functional groups and the second functional groups to each other.

13. The nano structure of claim 2 , wherein each of the linkers includes one functional group selected, from the group including an amine group, a carboxyl group and a thiol group as a functional group capable of being bonded to the metal ions.

14. The nano structure of claim 1 , wherein the metallic nanoparticle is selected from the group including a metal nanoparticle, a metal oxide nanoparticle, a metal nitride nanoparticle, a metal carbide nanoparticle, and an intermetallic compound nanoparticle.

15. The nano structure of claim 1 , wherein the metallic nanoparticles are arranged separately from one another and form a single monomolecular layer.

16. The nano structure of claim 1 , wherein the dielectric particle supporters that are bonded to the linker are arranged over the substrate to form a dielectric particle supporter layer.

17. The nano structure of claim 16 , further comprising:
a nanoparticle layer formed over the supporter layer, and
the nanoparticle layer includes:
a plurality of the metallic nanoparticles spaced apart from each other; and
a dielectric material bonded to a surface of each metallic nanoparticle.

18. The nano structure of claim 17 , wherein a plurality of the supporter layers and a plurality of the nanoparticle layers are stacked alternately and repeatedly to form a vertical multi-stack structure.

19. The nano structure of claim 17 , wherein the dielectric material includes at least one between a dielectric organic material and an inorganic oxide.

20. A nano structure, comprising:
a substrate;
a plurality of dielectric particle supporters disposed over the substrate;
a plurality of linkers formed on the dielectric particle supporters and suitable for coupling a plurality of metal ions with the dielectric particle supporters; and
one or more metallic nanoparticles formed to the linkers.

21. The nano structure of claim 20 , wherein each of the linkers includes one functional group selected from the group including an amine group, a carboxyl group, and a thiol group, as a functional group that is bonded to the metal ions.

22. The nano structure of claim 20 , further comprising:
an organic surfactant of one or more kinds bonded to the metal ions or the nanoparticles.

23. The nano structure of claim 20 , wherein the metallic nanoparticles have an average diameter of 0.5 nm to 3.0 nm.

24. The nano structure of claim 23 , wherein the metallic nanoparticles have a particle radius standard deviation of 20% or less.

Assignees

• Sk Innovation Co Ltd

Inventors

• Kim Jun-Hyung

Classifications

• Y10T428/31663

  As siloxane, silicone or silane · CPC title

• B82Y30/00

  Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title

• Y10T428/256

  Heavy metal or aluminum or compound thereof · CPC title

• C07F1/005

  without C-Metal linkages · CPC title

• C07F7/10

  containing nitrogen {having a Si-N linkage} · CPC title