Sensor structure having increased thermal stability
US-9196272-B1 · Nov 24, 2015 · US
US9454978B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9454978-B2 |
| Application number | US-201514884527-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 15, 2015 |
| Priority date | Oct 27, 2014 |
| Publication date | Sep 27, 2016 |
| Grant date | Sep 27, 2016 |
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A reader sensor having a dusting layer having a thickness less than 5 Angstroms between and in contact with the AFM layer and with the pinned layer. The dusting layer comprises a non-magnetic, electrically conducting material, such as ruthenium or iridium. The reader sensor has a free layer composed of a material free of nickel (Ni).
Opening claim text (preview).
What is claimed is: 1. A method comprising: providing a sensor stack having a non-continuous dusting layer between and in contact with but not magnetically coupled to an antiferromagnetic (AFM) layer and a pinned layer, and a free layer composed of a material free of nickel, the dusting layer having a thickness less than 5 Angstroms and comprising a non-magnetic electrically conducting material; and annealing the sensor stack at a temperature of 325° C. to 400° C. 2. The method of claim 1 wherein the dusting layer of the sensor stack comprises at least one of Ru or Ir. 3. The method of claim 1 , wherein the free layer of the sensor stack comprises CoFeTa, CoFeB, or CoTa. 4. The method of claim 1 , wherein the AFM layer has a thickness of 40 Angstroms or less. 5. A method comprising: providing a reader sensor stack having an antiferromagnetic (AFM) layer having a thickness of 40 Angstroms or less, a pinned layer, a non-magnetic electrically conducting, non-continuous dusting layer having a thickness no greater than 5 Angstroms between and in contact with the AFM layer and the pinned layer, and a free layer composed of a material free of nickel; and annealing the sensor stack at a temperature of 325° C. to 400° C. 6. The method of claim 5 wherein the thickness of the dusting layer is in the range of 1 to 3 Angstroms. 7. The method of claim 5 wherein the dusting layer comprises at least one of Ru or Ir. 8. The method of claim 5 , wherein the free layer comprises CoFeTa, CoFeB, or CoTa. 9. A method comprising: providing a reader sensor structure comprising an antiferromagnetic (AFM) layer comprising manganese (Mn), a pinned layer, a non-magnetic, electrically conducting dusting layer consisting of one of ruthenium (Ru) or iridium (Ir) and having a thickness no greater than 5 Angstroms with pinholes therethrough, the dusting layer between and in contact with both the AFM layer and the pinned layer, and a nickel-free (Ni-free) free layer; and annealing the sensor stack at a temperature of 325° C. to 400° C. 10. The method of claim 9 wherein the free layer comprises CoFe, CoFeB, or CoFeX, where X is a refractory material. 11. The method of claim 10 wherein the free layer comprises CoFeX and the refractory material is tantalum (Ta), niobium (Nb), hafnium (Hf), or zirconium (Zr). 12. The method of claim 10 , wherein the free layer comprises multiple layers. 13. The method of claim 9 , wherein the AFM layer has a thickness of 40 Angstroms or less.
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