Methods and apparatuses for template cooling

Patent metadata

Field	Value
Publication number	US-9454090-B2
Application number	US-201213596683-A
Country	US
Kind code	B2
Filing date	Aug 28, 2012
Priority date	Aug 28, 2012
Publication date	Sep 27, 2016
Grant date	Sep 27, 2016

Abstract

Disclosed are cooling apparatus and methods of cooling a template. The cooling apparatus includes a reticle and an optical cooling material. The reticle includes patterning for at least partially reflecting patterning radiation incident on a first side of the reticle. The optical cooling material is in thermally-conductive coupling with the reticle mount and is configured to produce cooling when exposed to a laser radiation. More particularly, the optical cooling material includes a glass material that exhibits anti-Stokes fluorescence that produces cooling of the glass material when exposed to an infrared laser beam. In some embodiments, the cooling apparatus may be incorporated with a reticle mount. The reticle mount is in thermally-conductive coupling with a second side of the reticle.

First claim

What is claimed is:

1. A cooling apparatus, comprising:
a template having a first major surface and a second major surface opposite the first major surface, the template including patterning on the first major surface thereof for at least partially reflecting patterning radiation incident on the first major surface of the template;
a template mount having a first major surface and a second major surface opposite the first major surface, the first major surface of the template mount thermally coupled with the second major surface of the template; and
an optical cooling material comprising an optical fiber thermally coupled with the second major surface of the template mount, wherein the optical fiber is configured to produce a cooling effect when the exposed second major surface of the optical cooling material is exposed to a radiation.

2. The cooling apparatus of claim 1 , wherein the optical cooling material comprises a glass material formed on the second major surface of the template mount, wherein the glass material is configured to produce the cooling effect when exposed to infrared laser radiation.

3. The cooling apparatus of claim 2 , further comprising an infrared-reflective and thermally conductive material disposed between the glass material and the second major surface of the template.

4. The cooling apparatus of claim 1 , wherein the optical cooling material comprises a glass material selected from the group consisting of Yb:ZBLAN, Yb:ZBLANP, and Tm:ZBLANP.

5. The cooling apparatus of claim 1 , further comprising at least one infrared laser configured to generate the radiation with a wavelength between about one micron and about two microns.

6. The cooling apparatus of claim 1 , wherein the template comprises a mask.

7. The cooling apparatus of claim 1 , wherein the template comprises a reticle.

8. A method for cooling an optical element of a lithographic process, comprising:
applying a radiation to an optical cooling material comprising an optical fiber in thermally conductive coupling with a template mount to reduce a temperature of the optical fiber, the template mount, and a template in thermally conductive coupling with the template mount.

9. The method of claim 8 , wherein the optical cooling material comprises an infrared reflective cladding material on the optical fiber.

10. The method of claim 8 , wherein applying the radiation to the optical cooling material comprising an optical fiber comprises generating an infrared radiation with a wavelength between about one micron and about two microns.

11. A cooling apparatus, comprising:
a template comprising a template substrate, an opaque material over the template substrate, and a phase-shift material between the template substrate and the opaque material;
an optical fiber disposed between the template substrate and the opaque material, the optical fiber comprising a glass material configured for producing cooling when exposed to infrared radiation and disposed between a first infrared reflective material and a second infrared reflective material; and
a pattern of cavities formed through the opaque material and the phase-shift material.

12. The cooling apparatus of claim 11 , wherein the optical fiber is disposed between the template substrate and the phase-shift material.

13. The cooling apparatus of claim 11 , wherein the optical fiber is disposed between the phase-shift material and the opaque material.

14. The cooling apparatus of claim 11 , wherein the glass material comprises a material selected from the group consisting of Yb:ZBLAN, Yb:ZBLANP, and Tm:ZBLANP.

15. The cooling apparatus of claim 11 , wherein the first infrared reflective material and the second infrared reflective material each comprise a material selected from the group consisting of gold and aluminum.

16. The cooling apparatus of claim 11 , wherein the template comprises a mask and the template substrate comprises a mask substrate.

17. The cooling apparatus of claim 11 , wherein the template comprises a reticle and the template substrate comprises a reticle substrate.

18. A method of forming a cooling template, comprising:
forming a phase-shift material over a template substrate;
forming an opaque material over the phase-shift material;
forming an infrared guiding structure comprising an optical fiber between the template substrate and the opaque material; and
forming a pattern of cavities through the opaque material and the phase-shift material.

Assignees

• Sun Hongqian
• Zhou Jianming
• Temchenko Volodymyr
• Micron Technology Inc

Inventors

• Sun Hongqian
• Zhou Jianming
• Temchenko Volodymyr

Classifications

• G03F7/70716 Primary

  Stages · CPC title

• G03F7/70875

  Temperature, e.g. temperature control of masks or workpieces via control of stage temperature · CPC title

• Y10T428/24802

  Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] · CPC title

• G03F7/7095

  Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient · CPC title