Method for measuring concentration of a gas component in a measurement gas

Patent metadata

Field	Value
Publication number	US-9453765-B2
Application number	US-201314134518-A
Country	US
Kind code	B2
Filing date	Dec 19, 2013
Priority date	Dec 20, 2012
Publication date	Sep 27, 2016
Grant date	Sep 27, 2016

Abstract

A method in which the wavelength of the light of a tunable light source is varied periodically over an absorption line of interest for the gas component to measure the concentration of a gas component in a measurement gas based on one of two measurement methods of direct absorption spectroscopy and wavelength modulation spectroscopy and, where in the case of wavelength modulation spectroscopy, the wavelength of the light is additionally sinusoidally modulated at a high frequency and with a small amplitude, where the intensity of the light is detected after transradiation of the measurement gas and processed to yield a measurement result, and where in order to increase the accuracy and reliability of the measurement, the two measurement methods are applied simultaneously during each period, or alternately in consecutive periods, and their results are combined by averaging to form the measurement result.

First claim

What is claimed is:

1. A method for measuring concentration of a gas component in a measurement gas based on two measurement methods comprising direct absorption spectroscopy and wavelength modulation spectroscopy, comprising:
varying a wavelength of light of a tunable light source periodically over an absorption line of interest for the gas component;
additionally sinusoidally modulating a wavelength of the light of the tunable light source at a high frequency and with a small amplitude in cases of wavelength modulation spectroscopy; and
detecting an intensity of the light after transradiation of the measurement gas and processing the light to yield a measurement result, the two measurement methods being applied simultaneously during each period, or alternately in consecutive periods, and their results being combined by averaging to form the measurement result;
wherein results of the two measurement methods are weighted differently in the averaging; and
wherein the results of the two measurement methods are weighted aided by a ratio of their measuring accuracies.

2. The method as claimed in claim 1 , wherein the two measurement methods are applied alternately in a plurality of consecutive periods, and their results from the plurality of consecutive periods are combined by averaging to yield the measurement result.

3. The method as claimed in claim 1 , wherein the modulation of the tunable light source is switched off during direct absorption spectroscopy.

4. The method as claimed in claim 1 , wherein the modulation of the tunable light source is retained during direct absorption spectroscopy, and a detection signal obtained during detection of the intensity of the light is subjected to lowpass filtering.

5. The method as claimed in claim 1 , wherein two different detectors with different downstream signal processing devices are implemented.

6. The method as claimed in claim 1 , wherein a single detector is implemented.

7. The method as claimed in claim 6 , wherein two different signal processing devices are arranged downstream of the detector and a controllable switchover device is arranged between the two different signal processing devices and the detector.

8. The method as claimed in claim 1 , wherein, during direct absorption spectroscopy, an absorption maximum and a half-value width of the absorption line are evaluated so as to determine separate results for the concentration to be measured for the gas component which are combined by averaging to yield the result of the direct absorption spectroscopy.

Assignees

• Depenheuer Daniel
• Hankiewicz Thomas
• Probst Frank
• Siemens Ag

Inventors

• Depenheuer Daniel
• Hankiewicz Thomas
• Probst Frank

Classifications

• G01N21/47

  Scattering, i.e. diffuse reflection (G01N21/25, G01N21/41 take precedence {G01N21/55 takes precedence}) · CPC title

• G01J3/433

  Modulation spectrometry; Derivative spectrometry · CPC title

• G01J3/4338 Primary

  Frequency modulated spectrometry · CPC title

• G01N21/39

  using tunable lasers · CPC title

• G01J3/42 Primary

  Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry (beam switching arrangements G01J3/08) · CPC title