Inspection apparatus and inspection method

Patent metadata

Field	Value
Publication number	US-9450536-B2
Application number	US-201514620130-A
Country	US
Kind code	B2
Filing date	Feb 11, 2015
Priority date	Feb 18, 2014
Publication date	Sep 20, 2016
Grant date	Sep 20, 2016

Abstract

An inspection apparatus includes an irradiation part that emits plural pieces of pulse light having different wavelengths to irradiate a multi-junction type solar cell; a wavelength setting part that sets the wavelengths of the plural pieces of pulse light with which the multi-junction type solar cell is irradiated by the irradiation part; and a detection part that detects an electric field intensity of an electromagnetic wave emitted from the multi-junction type solar cell in response to the plural pieces of pulse light with which the multi-junction type solar cell is irradiated by the irradiation part. The irradiation part includes a delay element that delays a time the multi-junction type solar cell is irradiated with the pulse light by a time Δt 11 relative to the pulse light.

First claim

What is claimed is:

1. An inspection apparatus that inspects a photo device, the inspection apparatus comprising:
an irradiation part that emits a plurality of pieces of pulse light having different wavelengths to irradiate a photo device;
a setting part that sets said wavelengths of said plurality of pieces of pulse light with which said photo device is irradiated by said irradiation part; and
a detection part that detects an electric field intensity of an electromagnetic wave emitted from said photo device in response to said plurality of pieces of pulse light with which said photo device is irradiated by said irradiation part, wherein
said irradiation part irradiates said photo device with pulse light having a second wavelength different from a first wavelength after a time Δt elapses since said photo device is irradiated with pulse light having said first wavelength, and
said time Δt is longer than a generation time for one pulse of said electromagnetic wave emitted by said pulse light.

2. The inspection apparatus according to claim 1 , further comprising a delay part that delays a time a detector detects said electromagnetic wave relative to a time said detector receives said pulse light,
said detection part includes said detector that detects said electromagnetic wave by receiving said pulse light emitted from said irradiation part.

3. The inspection apparatus according to claim 1 , further comprising:
a scanning mechanism that scans said photo device with said plurality of pieces of pulse light with which said photo device is irradiated by said irradiation part; and
an image generation part that generates an image indicating an electric field intensity distribution in said photo device based on said electric field intensity of said electromagnetic wave detected by said detection part.

4. The inspection apparatus according to claim 1 , wherein
said photo device is constructed by stacking materials having different absorption wavelength regions.

5. The inspection apparatus according to claim 4 , wherein
said photo device includes a first layer, and a second layer having an absorption wavelength region different from that of said first layer, said second layer being provided below said first layer, and
said plurality of pieces of pulse light having said different wavelengths includes first light having energy higher than an energy gap of said first layer and second light having energy that is higher than an energy gap of said second layer and is lower than said energy gap of said first layer.

6. The inspection apparatus according to claim 4 , wherein
said photo device is a multi junction type solar cell.

7. An inspection method for inspecting a photo device, the inspection method comprising the steps of:
emitting a plurality of pieces of pulse light having different wavelengths to irradiate a photo device;
setting said wavelengths of said plurality of pieces of pulse light with which said photo device is irradiated in said irradiation step; and
detecting an electromagnetic wave emitted from said photo device in response to said plurality of pieces of pulse light with which said photo device is irradiated in said irradiation step,
wherein said irradiation step includes the step of irradiating said photo device with pulse light having a second wavelength different from a first wavelength after a time Δt elapses since said photo device is irradiated with pulse light having said first wavelength, and
said time Δt is longer than a generation time for one pulse of said electromagnetic wave emitted by said pulse light.

Assignees

• Screen Holdings Co Ltd
• Univ Osaka

Inventors

• Nakanishi Hidetoshi
• Ito Akira
• Kawayama Iwao
• Tonouchi Masayoshi

Classifications

• H02S50/15 Primary

  using optical means, e.g. using electroluminescence · CPC title

• G01N2201/06113

  Coherent sources; lasers · CPC title

• G01N21/3581

  using far infrared light; using Terahertz radiation · CPC title

• G01N2201/0697

  Pulsed lasers · CPC title

• G01N21/95

  characterised by the material or shape of the object to be examined (G01N21/89 - G01N21/91, G01N21/94 take precedence) · CPC title