Electromechanical effect in metal oxides

Patent metadata

Field	Value
Publication number	US-9450172-B2
Application number	US-201113877662-A
Country	US
Kind code	B2
Filing date	Oct 5, 2011
Priority date	Oct 5, 2010
Publication date	Sep 20, 2016
Grant date	Sep 20, 2016

Abstract

This invention provides an electromechanical device comprising an active material comprising a metal oxide such as Ce0.8Gd0.2O1.9 wherein the elastic modulus of metal oxide can be modulated by applying external electric field. The Ce0.8Gd0.2O1.9 layer in a substrate\electrode\Ce0.8Gd0.2O1.9\electrode structure or conductive substrate\Ce0.8Gd0.2O1.9\electrode structure develops a stress upon applying an electric field. This invention provides methods for tailoring the elastic modulus of materials using an electric field for the generation of an electromechanical response.

First claim

What is claimed is:

1. An electromechanical device comprising a ceria (cerium oxide) based material wherein said ceria-based material is doped by a metal ion and represented by the following formula Ce X M Y O (2-δ) wherein M is a metal ion having a valency of less than four: wherein 0<x<1, 0≦y<1, and 0≦δ<1, and has a centrosymmetric structure and has oxygen vacancies, wherein said ceria-based material is electrostrictive such that upon application of an electric field said ceria-based material generates displacement, stress or a combination thereof.

2. The device of claim 1 , wherein said metal ion is a lanthanide.

3. The device of claim 2 , wherein said metal ion is Gd.

4. The device of claim 3 , wherein said ceria-based material is Ce x Gd y O z wherein said x ranges between 0.95 and 0.63, said y ranges between 0.05 and 0.37 and said z ranges between 2 and (y/2).

5. The device of claim 4 , wherein said Ce x Gd y O z is Ce 0.8 Gd 0.2 O 1.9 .

6. The device of claim 1 , wherein said electric field is constant (DC) electric field, alternating (AC) electric field or combination thereof.

7. The device of claim 1 , wherein said ceria-based material is strain-free.

8. The device of claim 1 , wherein the in-plane strain of said ceria-based material ranges between 0.1%-0.4%.

9. The device of claim 1 , wherein said ceria-based material is poled.

10. The device of claim 1 , wherein said device further comprises conductive contacts.

11. The device of claim 10 , wherein said conductive contacts comprising Cr, Al, Ag, Ti, or combination thereof.

12. The device of claim 11 , wherein the thickness of said conductive contacts ranges between 50 nm and 150 nm.

13. The device of claim 1 , wherein said device is supported by a substrate.

14. The device of claim 1 , wherein said substrate comprising glass.

15. The device of claim 14 , wherein the thickness of said glass ranges between 50 micrometers and 500 micrometers.

16. The device of claim 1 , wherein the thickness of said ceria based material ranges between 0.35 and 1.0 micrometers.

17. A sensor comprising the device of claim 1 .

18. An actuator comprising the device of claim 1 .

19. The device of claim 1 , wherein said ceria-based material is a bulk material or a thin film.

Assignees

• Lubomirsky Igor
• Korobko Roman
• Kossoy Anna
• Tuller Harry L
• Yeda Res & Dev

Inventors

• Lubomirsky Igor
• Korobko Roman
• Kossoy Anna
• Tuller Harry L

Classifications

• Y10T29/42

  Piezoelectric device making · CPC title

• H01L41/27

  Electricity · mapped topic

• H01L41/187 Primary

  Electricity · mapped topic

• H01L41/094

  Electricity · mapped topic

• H01L41/316

  Electricity · mapped topic