Methods for doping fin field-effect transistors
US-9209280-B2 · Dec 8, 2015 · US
US9450100B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9450100-B2 |
| Application number | US-201314763407-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 12, 2013 |
| Priority date | Feb 8, 2013 |
| Publication date | Sep 20, 2016 |
| Grant date | Sep 20, 2016 |
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A semiconductor arrangement that includes: a substrate; a back gate formed on the substrate; fins formed on opposite sides of the back gate; and back gate dielectric layers interposed between the back gate and the respective fins. The back gate has opposite end portions recessed with respect to a middle portion thereof between the end portions, so that an overlap area between each of the end portions and each of the fins is smaller than an overlap area between the middle portion and the fin.
Opening claim text (preview).
I claim: 1. A semiconductor arrangement, comprising: a substrate; a back gate formed on the substrate; fins formed on opposite sides of the back gate; and back gate dielectric layers interposed between the back gate and the respective fins, wherein the back gate has opposite end portions recessed with respect to a middle portion thereof between the end portions, so that an overlap area between each of the end portions and each of the fins is smaller than an overlap area be…
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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