Charged particle beam instrument and sample container

Patent metadata

Field	Value
Publication number	US-9449784-B2
Application number	US-201414520754-A
Country	US
Kind code	B2
Filing date	Oct 22, 2014
Priority date	Oct 28, 2013
Publication date	Sep 20, 2016
Grant date	Sep 20, 2016

Abstract

A charged particle beam instrument is offered which can introduce cooled samples easily into a sample chamber. The charged particle beam instrument ( 100 ) of the present invention has: a sample container ( 10 ) that accommodates samples (S) and a refrigerant ( 6 ) for cooling the samples (S); an evacuated sample chamber ( 20 ); a sample exchange chamber ( 30 ) connected with the sample chamber ( 20 ); a partition valve ( 40 ) disposed between the sample exchange chamber ( 30 ) and the sample container ( 10 ); and vacuum pumping equipment ( 50 ) for evacuating the sample container ( 10 ). The sample container ( 10 ) can be connected with the sample exchange chamber ( 30 ) via the partition valve ( 40 ). The sample container ( 10 ) is evacuated by the vacuum pumping equipment ( 50 ) while the partition valve ( 40 ) is closed.

First claim

The invention claimed is:

1. A charged particle beam instrument comprising:
a sample container that accommodates samples and a refrigerant for cooling the samples;
an evacuated sample chamber;
a sample exchange chamber connected with the sample chamber;
a partition valve disposed between the sample exchange chamber and the sample container; and
vacuum pumping equipment for evacuating the sample container;
wherein the sample container can be connected by connecting means with the sample exchange chamber and brought into communication with the sample exchange chamber via the partition valve and can be evacuated by the vacuum pumping equipment while the partition valve is closed wherein said sample container has a sample-receiving space for receiving the samples, a liquefied gas refrigerant-receiving space for receiving the refrigerant, and a thermally conductive member that partitions the sample-receiving space and the refrigerant-receiving space from each other, and wherein the thermally conductive member is provided with communication holes for placing the sample-receiving space and the refrigerant-receiving space in communication with each other, such that when said refrigerant-receiving space is evacuated by said vacuum pumping equipment the refrigerant becomes solidified.

2. The charged particle beam instrument as set forth in claim 1 , wherein said sample exchange chamber has a sample storage portion capable of holding the samples, and wherein there is further provided a cooling portion for cooling the sample storage portion.

3. The charged particle beam instrument as set forth in claim 2 , further comprising a first transfer rod for conveying the samples between said sample container and said sample exchange chamber and a second transfer rod for conveying the samples between the first transfer rod and the sample storage portion.

4. The charged particle beam instrument as set forth in claim 3 , wherein said second transfer rod further operates to convey the samples between said sample storage portion and said sample chamber.

5. The charged particle beam instrument as set forth in claim 1 , wherein said refrigerant is any one of liquid nitrogen, liquid methane, liquid ethane, and liquid butane.

6. A sample container capable of being connected via a partition valve with a sample exchange chamber in a charged particle beam instrument, said sample container comprising:
a sample-receiving space for receiving samples;
a refrigerant-receiving space for receiving a refrigerant; and
a thermally conductive member that partitions the sample-receiving space and the refrigerant-receiving space from each other, the thermally conductive member being provided with communication holes for placing the sample-receiving space and the refrigerant-receiving space in communication with each other such that when said refrigerant-receiving space is evacuated the refrigerant is solidified.

7. The sample container as set forth in claim 6 , wherein said refrigerant is any one of liquid nitrogen, liquid methane, liquid ethane, and liquid butane.

Assignees

• Jeol Ltd

Inventors

• Naruse Tatsuo

Classifications

• H01J2237/26

  Electron or ion microscopes · CPC title

• H01J37/20 Primary

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• H01J37/261

  Details · CPC title

• H01J2237/002

  Cooling arrangements · CPC title

• H01J37/18

  Vacuum locks {; Means for obtaining or maintaining the desired pressure within the vessel} · CPC title