Fabrication method for small-scale structures with non-planar features

Patent metadata

Field	Value
Publication number	US-9448336-B1
Application number	US-201414548070-A
Country	US
Kind code	B1
Filing date	Nov 19, 2014
Priority date	Jan 17, 2011
Publication date	Sep 20, 2016
Grant date	Sep 20, 2016

Abstract

The fabrication of small-scale structures is disclosed. A unit-cell of a small-scale structure with non-planar features is fabricated by forming a membrane on a suitable material. A pattern is formed in the membrane and a portion of the substrate underneath the membrane is removed to form a cavity. Resonators are then directionally deposited on the wall or sides of the cavity. The cavity may be rotated during deposition to form closed-loop resonators. The resonators may be non-planar. The unit-cells can be formed in a layer that includes an array of unit-cells.

First claim

What is claimed is:

1. A method for fabricating a structure, the method comprising:
forming a membrane on a substrate;
forming one or more unit patterns in the membrane, each said unit pattern consisting of one or more holes;
forming a respective cavity in the substrate under the membrane beneath each said unit pattern; and
depositing one or more resonators on at least one surface of each said cavity through its respective unit pattern in the membrane;
wherein the depositing of the one or more resonators comprises:
exposing the membrane to a flux of deposition material from a deposition source such that a portion of the flux of deposition material passes through the respective unit pattern and forms, by impingement on a surface of the respective cavity, a unit image pattern consisting of one or more deposited spots; and
rotating and/or angling the substrate relative to the deposition source while exposing the membrane to the flux of deposition material such that while depositing the deposition material, relative motion is taking place between the substrate and the deposition source that causes each unit image pattern to dynamically follow a predetermined path on at least one surface of it respective cavity, thereby drawing a continuous pattern of deposited material along the predetermined path.

2. The method of claim 1 , wherein the deposition source is a source for evaporative deposition.

3. The method of claim 2 , wherein depositing the one or more resonators comprises rotating the substrate such that the one or more resonators include at least one closed-loop resonator after the deposition of the one or more resonators.

4. The method of claim 1 , wherein forming a respective cavity comprises isotropically etching the substrate through the respective unit pattern to remove some of the substrate underneath the membrane and wherein the respective cavity is self-aligned with the respective unit pattern.

5. The method of claim 1 , wherein each said cavity has a shape that is one of hemispherical, ellipsoidal, cubic, clover-shaped, pyramidal, or star-shaped, and wherein each of the one or more resonators is non-planar.

6. The method of claim 1 , wherein a plurality of unit patterns are formed in the membrane, and wherein one or more resonators are formed at the same time on a surface or on surfaces of each of a plurality of cavities through respective unit patterns.

7. The method of claim 1 , wherein each cavity, together with the one or more resonators deposited therein, constitutes a unit cell of a metamaterial or a unit cell of a nano-antenna or a unit-cell of a micro-lens.

8. The method of claim 1 , further comprising removing the membrane.

9. The method of claim 1 , wherein forming each respective cavity comprises:
forming an initial cavity before forming the membrane; and
backfilling the initial cavity with a sacrificial material; and
wherein the respective cavity beneath each said unit pattern is formed by removing the sacrificial material.

10. The method of claim 1 , wherein:
the substrate comprises silicon, SU-8, a developable polyimide, or an oxide;
the membrane comprises photoresist, polymethyl methacrylate, an oxide film, a nitride film, aluminum nitride, or titanium nitride; and
the deposition material comprises a metal.

11. The method of claim 1 , wherein: the substrate is mounted on a turntable that rotates the substrate relative to the deposition source, the turntable is set at a tilt angle, and the tilt angle of the turntable and an orientation of the deposition source determine where on a wall of a cavity beneath each unit pattern at least one resonator is placed.

12. The method of claim 1 , wherein the predetermined path is a closed curve and the continuous pattern of deposited material is drawn as a closed curve.

13. The method of claim 1 , wherein the predetermined path is a closed curve, and wherein the method further comprises using a shutter to interrupt the flux of deposition material such that the continuous pattern of deposited material is drawn as an open loop.

14. The method of claim 1 , further comprising drawing at least one further continuous pattern of deposited material on at least one surface of each said cavity by repeating, at least one further time, the operations of exposing the membrane to a flux of deposition material and rotating and/or angling the substrate relative to the deposition source while exposing the membrane to the flux of deposition material.

15. The method of claim 1 , wherein each continuous pattern of deposited material is drawn on a non-flat surface such that the said continuous pattern of deposited material is disposed over at least two different planes.

16. The method of claim 1 , wherein the holes are circular.

17. The method of claim 1 , wherein the holes are linear.

18. The method of claim 1 , wherein each said cavity has a diameter in the range 1-10 μm.

19. The method of claim 1 , wherein each said cavity has a diameter in the range 1-10 μm and each said continuous pattern of deposited material has a width in the range 1-20 nm.

20. The method of claim 1 , wherein the rotating and/or angling of the substrate while exposing the membrane to the flux of deposition material comprises varying an angle of incidence of the flux of deposition material on the membrane.

Assignees

• Sandia Corp

Inventors

• Burckel David Bruce
• Ten Eyck Gregory A

Classifications

• H01L51/0011

  Electricity · mapped topic

• H01P11/008

  Manufacturing resonators · CPC title

• H01L51/001

  Electricity · mapped topic

• G02B3/0012 Primary

  characterised by the manufacturing method · CPC title

• C23C14/24

  Vacuum evaporation · CPC title