Method of and apparatus for measuring the mass flow rate of a gas

Patent metadata

Field	Value
Publication number	US-9448094-B2
Application number	US-201113989246-A
Country	US
Kind code	B2
Filing date	Nov 28, 2011
Priority date	Nov 29, 2010
Publication date	Sep 20, 2016
Grant date	Sep 20, 2016

Abstract

There is provided a meter ( 200; 350 ) for measuring the mass flow rate of a gas. The meter comprises a conduit ( 206 ) through which the gas flows in use. The conduit has a flow restriction orifice ( 212 ) through which choked flow occurs in use. The flow restriction orifice divides the conduit into an upstream portion ( 214 ) upstream of said orifice and a downstream portion ( 216 ) downstream of said orifice. The meter further comprises a sensor assembly ( 204 ), the sensor assembly including a piezoelectric crystal oscillator ( 218 ) in said upstream portion such that said piezoelectric oscillator is in contact with said gas when the meter in use. The sensor assembly is arranged: to drive the piezoelectric crystal oscillator such that the piezoelectric crystal oscillator resonates at a resonant frequency; to measure said resonant frequency of said piezoelectric crystal oscillator; and to determine, from the resonant frequency, the mass flow rate through the orifice.

First claim

The invention claimed is:

1. A method of measuring the mass flow rate of a gas through a conduit comprising an orifice through which choked flow is occurring, the orifice dividing the conduit into an upstream portion upstream of said orifice and a downstream portion downstream of said orifice, the orifice having a cross-sectional area, the method comprising:
a) driving a piezoelectric crystal oscillator in contact with the gas upstream of the orifice such that the piezoelectric crystal oscillator resonates at a resonant frequency, the piezoelectric crystal oscillator having at least two planar tines;
b) measuring the resonant frequency of the piezoelectric crystal oscillator and determining the density of the gas upstream of the orifice based on the measured resonant frequency; and
c) determining the mass flow rate of gas through the conduit based on the determined density of the gas upstream of the orifice, the cross-sectional area of the orifice, and the speed of sound in the gas.

2. A method of according to claim 1 , wherein the pressure upstream of said orifice is at least 0.5 bar higher than the pressure downstream of said orifice.

3. A method according to claim 1 , wherein the method further comprises determining the temperature of the gas upstream of the orifice and determining the speed of sound in the gas based on the determined temperature.

4. A method according to claim 1 , wherein said piezoelectric crystal oscillator comprises a quartz crystal oscillator.

5. A method according to claim 1 , wherein said piezoelectric crystal oscillator has a resonant frequency of 32 kHz or greater.

6. A method according to claim 1 , wherein the gas is dispensed from a pressure regulator or valve located upstream of the piezoelectric crystal oscillator.

7. A method according to claim 6 , wherein the pressure regulator or valve is electronically controlled in response to the measured mass flow rate of gas through said orifice.

8. A computer program product executable by a programmable processing apparatus, comprising one or more software portions for performing the steps of claim 1 .

9. A computer usable storage medium having a computer program product according to claim 8 stored thereon.

10. A meter for measuring the mass flow rate of a gas through a conduit, comprising:
a flow restriction orifice dividing the conduit into an upstream portion upstream of said orifice and a downstream portion downstream of said orifice, the orifice having a cross-sectional area, wherein in use choked flow of the gas occurs through the orifice;
a sensor assembly including a piezoelectric crystal oscillator comprising at least two planar tines in said upstream portion such that said piezoelectric crystal oscillator is in contact with said gas when the meter is in use, said sensor assembly being arranged:
to drive the piezoelectric crystal oscillator such that the piezoelectric crystal oscillator resonates at a resonant frequency;
to measure said resonant frequency of said piezoelectric crystal oscillator and to determine the density of the gas upstream of the orifice based on the measured resonant frequency; and
to determine the mass flow rate through the conduit based on the determined density of the gas upstream of the orifice, the cross-sectional area of the orifice, and the speed of sound in the gas.

11. A meter according to claim 10 , wherein the meter further comprises a drive circuit comprising a Darlington pair arranged in a feedback configuration from a common emitter amplifier.

12. A meter according to claim 10 , further comprising a temperature sensor arranged to determine the temperature of gas adjacent said piezoelectric crystal oscillator; wherein the sensor assembly is further arranged to determine the speed of sound in the gas based on the determined temperature.

13. A meter according to claim 10 , wherein said piezoelectric crystal oscillator comprises a quartz crystal oscillator.

14. A meter according to claim 10 , wherein said piezoelectric crystal oscillator has a resonant frequency of 32 kHz or greater.

15. A meter according to claim 10 , wherein the meter is arranged downstream of a pressure regulator or valve.

16. A meter according to claim 15 , wherein the meter is arranged to control electronically the pressure regulator or valve in response to be measured mass flow rate through the flow restriction orifice.

Assignees

• Downie Neil Alexander
• Air Prod & Chem

Inventors

• Downie Neil Alexander

Classifications

• G01F1/78

  Direct mass flowmeters · CPC title

• G01F1/86 Primary

  Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure · CPC title

• G01F15/125

  Filters · CPC title

• G01F15/043

  using electrical means · CPC title

• Y10T137/7759

  Responsive to change in rate of fluid flow · CPC title