Diagonal openings in photodefinable glass

Patent metadata

Field	Value
Publication number	US-9446590-B2
Application number	US-201214421975-A
Country	US
Kind code	B2
Filing date	Aug 16, 2012
Priority date	Aug 16, 2012
Publication date	Sep 20, 2016
Grant date	Sep 20, 2016

Abstract

In one example, a method for making diagonal openings in photodefinable glass includes exposing part of a body of photodefinable glass to a beam of light oriented diagonally to a surface of the body at an angle of 5° or greater measured with respect to a normal to the surface of the body and removing some or all of the part of the body exposed to the light beam to form a diagonal opening in the body.

First claim

What is claimed is:

1. A method, comprising:
concurrently forming a plurality of spaced nonparallel bundles of nonparallel rays; exposing part of a body of photodefinable glass to the plurality of nonparallel bundles of nonparallel rays, each bundle oriented diagonally to a surface of the body at an angle of 5° or greater measured with respect to a plane normal to the surface of the body; and
removing some or all of the part of the body exposed to the plurality of nonparallel bundles of nonparallel rays to form a diagonal opening in the body.

2. The method of claim 1 , wherein the body comprises a photodefinable glass plate, wherein each bundle is oriented diagonally to a surface of the plate at an angle in the range of 5-50° measured with respect to a plane normal to the surface of the plate and wherein the removing comprises removing some or all of the part of the glass plate exposed to the light beam to form a diagonal opening in the glass plate.

3. The method of claim 2 , wherein
a full thickness of the glass plate is exposed to the plurality of nonparallel bundles of nonparallel rays, wherein each of the plurality of nonparallel bundles of nonparallel rays are expanding and wherein the removing comprises removing the part of the glass plate exposed to the plurality of nonparallel bundles of nonparallel rays to form openings through the glass plate, each of the openings expanding from a smaller dimension at one surface of the plate to a larger dimension at an opposite surface of the plate.

4. The method of claim 1 , where the removing comprises:
heating the glass body to change the composition of the part of the glass body exposed to the light beam; and then
etching the glass body to remove some or all of the changed part of the glass body.

5. The method of claim 1 , wherein the nonparallel bundles of nonparallel rays diverge through the body.

6. The method of claim 1 , wherein the nonparallel bundles of nonparallel rays converge through the body.

7. The method of claim 1 comprising directing light through an optical arrangement to concurrently form the plurality of spaced nonparallel bundles of nonparallel rays, the optical arrangement being selected from a group of optical arrangements consisting of: (1) a phase shifting mask; (2) a diffraction grating; (3) a two-sided mask and lenses; (4) a negative cylindrical lens and a mask; (5) a positive cylindrical lens and a mask; and (6) a mask, a negative lens and a positive lens.

8. A method, comprising: concurrently forming a plurality of spaced nonparallel bundles of nonparallel rays; exposing part of a body of photodefinable glass plate to the plurality of nonparallel bundles of nonparallel rays, each of the plurality of nonparallel bundles of nonparallel rays being oriented diagonally to a surface of the plate at a different angle within the range of 5-50° measured with respect to a plane normal to the surface of the plate, and
removing some or all of each part of the glass plate exposed to the plurality of nonparallel bundles of nonparallel rays to form multiple openings through the glass plate, each of the multiple openings being oriented diagonally to the surface of the plate at a different angle.

9. The method of claim 8 , wherein each of the plurality of nonparallel bundles of nonparallel rays is expanding and wherein the removing comprises removing some or all of each part of the glass plate exposed to the plurality of nonparallel bundles of nonparallel rays to form multiple openings through the glass plate, each of the multiple openings being oriented diagonally to the surface of the plate at a different angle and expanding from a smaller dimension at one surface of the plate to a larger dimension at an opposite surface of the plate.

10. The method of claim 8 , wherein each of the plurality of nonparallel bundles of nonparallel rays is contracting; and wherein the removing comprises removing some or all of each part of the glass plate exposed to the plurality of nonparallel bundles of nonparallel rays to form multiple openings through the glass plate, each of the multiple openings being oriented diagonally to the surface of the plate at a different angle and contracting from a larger dimension at one surface of the plate to a smaller dimension at an opposite surface of the plate.

Assignees

• Chen Chien-Hua
• Choy Silam J
• Dahlgren Brett E
• Hewlett Packard Development Co Lp

Inventors

• Chen Chien-Hua
• Choy Silam J
• Dahlgren Brett E

Classifications

• B41J2002/14419

  Manifold · CPC title

• B41J2/1629

  wet etching · CPC title

• B41J2/1634

  laser machining · CPC title

• Y10T428/24314

  Slit or elongated · CPC title

• B41J2/1433 Primary

  Structure of nozzle plates · CPC title