Presence sensing and position correction for wafer on a carrier ring

Patent metadata

Field	Value
Publication number	US-9446522-B2
Application number	US-201514703855-A
Country	US
Kind code	B2
Filing date	May 4, 2015
Priority date	May 22, 2014
Publication date	Sep 20, 2016
Grant date	Sep 20, 2016

Abstract

Embodiments of the invention include apparatuses and systems for determining the position of a carrier ring assembly supported by an end effector. In an embodiment, the position of the carrier ring assembly is determined by passing the carrier ring assembly through a plurality of through beam sensors. As the carrier ring passes through the sensors, a plurality of sensor transitions along points on the carrier ring assembly are detected. Each sensor transition indicates that one of the through beam sensors changed from an unblocked state to a blocked state, or changed from an blocked state to an unblocked state. The position of the end effector is recorded at each sensor transition and is associated with the sensor transition that caused the end effector position to be recorded. A position of the carrier ring assembly is then calculated from the plurality of sensor transitions and their associated end effector positions.

First claim

What is claimed is:

1. A method of determining a position of a carrier ring assembly supported by an end effector, comprising:
passing the carrier ring assembly supported by the end effector through a field of vision of a camera;
obtaining an image of the carrier ring assembly and the end effector from the camera;
determining a center point of the carrier ring assembly relative to a center point of the end effector from the image obtained from the camera.

2. The method of claim 1 , wherein the carrier ring assembly comprises a carrier ring having a layer of adhesive backing tape surrounded by the carrier ring, and a substrate supported by the backing tape.

3. The method of claim 2 , further comprising, determining a center point of the substrate relative to the center point of the carrier ring assembly with a second camera.

4. The method of claim 3 , wherein the center point of the substrate relative to the center point of the carrier ring assembly is determined with the second camera prior to the carrier ring assembly being supported by the end effector.

5. The method of claim 3 , wherein the adhesive backing tape is not transparent.

6. The method of claim 5 , wherein the carrier ring has one or more flat edges and one or more curved edges.

7. The method of claim 6 , further comprising determining an angle of rotation of the carrier ring assembly by detecting a plurality of sensor transitions along points on the carrier ring assembly, wherein each sensor transition indicates that one of a plurality of through beam sensors changed from an unblocked state to a blocked state, or changed from a blocked state to an unblocked state.

8. The method of claim 6 , further comprising determining an angle of rotation of the carrier ring assembly relative to the end effector with the image from the camera.

9. A method for transferring a carrier ring assembly from a first location to a second location, comprising:
lifting a carrier ring assembly from a first location with an end effector;
passing the carrier ring assembly supported by the end effector through a field of vision of a camera;
obtaining an image of the carrier ring assembly and the end effector from the camera;
determining a position of the carrier ring assembly with respect to the end effector position from the image obtained from the camera;
calculating an end effector corrective movement based on the position of the carrier ring assembly.

10. The method of claim 9 , wherein the first location is a FOUP and the second location is a chuck in a plasma processing chamber.

11. The method of claim 9 , wherein the carrier ring assembly comprises a carrier ring having a layer of adhesive backing tape surrounded by the carrier ring, and a substrate supported by the backing tape.

12. The method of claim 11 , further comprising, determining a center point of the substrate relative to the center point of the carrier ring assembly with a second camera.

13. The method of claim 12 , wherein the center point of the substrate relative to the center point of the carrier ring assembly is determined with the second camera prior lifting the carrier ring assembly from the first location with the end effector.

14. The method of claim 12 , wherein the end effector corrective movement is further based on the center point of the substrate relative to the center point of the carrier ring assembly.

15. A system for determining the position of a carrier ring assembly, comprising:
a robot with an end effector for supporting the carrier ring assembly;
a camera that includes a field of vision that is large enough to obtain an image of the end effector and the carrier ring assembly; and
a controller that is communicatively coupled to the robot and the camera, wherein the controller obtains an image of the end effector from the camera, and wherein the controller determines a position of the carrier ring assembly with respect to a position of the end effector from the image.

16. The system of claim 15 , wherein the robot includes a selective compliance articulated robot arm.

17. The system of claim 15 , further comprising a plurality of through beam sensors that are communicatively coupled to the controller, and wherein the controller records a position of the end effector when a sensor changes state from an unblocked state to a blocked state, or from a blocked state to an unblocked state.

18. The system of claim 15 , wherein the controller is integrated into a processing tool.

19. The system of claim 15 , wherein the end effector includes two prongs.

20. The system of claim 19 , wherein the end effector includes a through beam sensor, wherein a first prong includes an emitter, and a second prong includes a receiver.

Assignees

• Mazzocco John
• Greenberg Daniel
• Applied Materials Inc

Inventors

• Mazzocco John
• Greenberg Daniel

Classifications

• Y10S901/46

  Sensing device · CPC title

• B25J15/0014

  having fork, comb or plate shaped means for engaging the lower surface on a object to be transported · CPC title

• Y10S901/02

  Arm motion controller · CPC title

• G06T7/0004

  Industrial image inspection · CPC title

• G05B2219/37002

  Absence, detect absence, presence or correct position of workpiece · CPC title