Broad spectrum, endpoint detection monophase olefin copolymer window with specific composition in multilayer chemical mechanical polishing pad

Patent metadata

Field	Value
Publication number	US-9446497-B2
Application number	US-201313788892-A
Country	US
Kind code	B2
Filing date	Mar 7, 2013
Priority date	Mar 7, 2013
Publication date	Sep 20, 2016
Grant date	Sep 20, 2016

Abstract

A multilayer chemical mechanical polishing pad is provided, having: a polishing layer having a polishing surface, a counterbore opening, a polishing layer interfacial region parallel to the polishing surface; a porous subpad layer having a bottom surface and a porous subpad layer interfacial region parallel to the bottom surface; and, a broad spectrum, endpoint detection window block comprising, comprises an olefin copolymer; wherein the window block exhibits a uniform chemical composition across its thickness; wherein the polishing layer interfacial region and the porous subpad layer interfacial region form a coextensive region; wherein the multilayer chemical mechanical polishing pad has a through opening that extends from the polishing surface to the bottom surface of the porous subpad layer; wherein the counterbore opening opens on the polishing surface, enlarges the through opening and forms a ledge; and, wherein the window block is disposed within the counterbore opening.

First claim

We claim:

1. A multilayer chemical mechanical polishing pad for polishing a substrate selected from at least one of a magnetic substrate, an optical substrate and a semiconductor substrate; comprising:
a polishing layer having a polishing surface, a counterbore opening, an outer perimeter, a polishing layer interfacial region parallel to the polishing surface and an average non-interfacial region thickness, T P-avg , measured in a direction perpendicular to the polishing surface from the polishing surface to the polishing layer interfacial region;
a porous subpad layer having a bottom surface, an outer perimeter and a porous subpad layer interfacial region parallel to the bottom surface;
a pressure sensitive adhesive layer; and,
a broad spectrum, endpoint detection window block having a thickness, T W , along an axis perpendicular to a plane of the polishing surface;
wherein the broad spectrum, endpoint detection window block, consists of a monophase olefin copolymer; wherein the olefin copolymer is a random copolymer of:
20 to 90 wt % ethylene;
10 to 80 wt % of a branched or straight chain C 3-30 α-olefin selected from the group consisting of propylene, 1-butene, 1-pentene, 3-methyl-1-butene, 1-hexene, 4-methyl-1-pentene, 3-methyl-1-pentene, 1-octene, 1-decene, 1-dodecene, 1-tetradecene, 1-hexadecene, 1-octadecene, 1-eicosene and mixtures thereof;
0.1 to 5 wt % of a silane selected from the group consisting of vinyltrimethoxysilane, vinyltriethoxysilane, γ-(meth)acryloxy propyl trimethoxy silane and mixtures thereof; and,
0 to 10 wt % of an olefin selected from the group consisting of butadiene, isoprene, 4-methyl-1,3-pentadiene, 1,3-pentadiene, 1,4-pentadiene, 1,5-hexadiene, 1,4-hexadiene, 1,3-hexadiene, 1,3-octadiene, 1,4-octadiene, 1,5-octadiene, 1,6-octadiene, 1,7-octadiene, 7-methyl-1,6-octadiene, 4-ethylidene-8-methyl-1,7-nonadiene, 5,9-dimethyl-1,4,8-decatriene and mixtures thereof;

wherein the broad spectrum, endpoint detection window block exhibits a uniform chemical composition across its thickness, T W ; wherein the broad spectrum, endpoint detection window block exhibits a spectrum loss ≦60%;
wherein the polishing layer interfacial region and the porous subpad layer interfacial region form a coextensive region;
wherein the coextensive region secures the polishing layer to the porous subpad layer without the use of a laminating adhesive;
wherein the pressure sensitive adhesive layer is applied to the bottom surface of the porous subpad layer;
wherein the multilayer chemical mechanical polishing pad has a through opening that extends from the polishing surface to the bottom surface of the porous subpad layer;
wherein the counterbore opening opens on the polishing surface, enlarges the through opening and forms a ledge; wherein the ledge is parallel to the polishing surface;
wherein the counterbore opening has an average depth, D O-avg , from a plane of the polishing surface to the ledge measured in a direction perpendicular to the polishing surface;
wherein the average depth, D O-avg , is less than the average non-interfacial region thickness, T P-avg ;
wherein the broad spectrum, endpoint detection window block is disposed within the counterbore opening on the ledge;
wherein the broad spectrum, endpoint detection window block is bonded to the polishing layer; and,
wherein the polishing surface is adapted for polishing the substrate.

2. The multilayer chemical mechanical polishing pad of claim 1 , wherein the broad spectrum, endpoint detection window block has an average thickness, T W-avg , along an axis perpendicular to the plane of the polishing layer of 5 to 75 mils.

3. The multilayer chemical mechanical polishing pad of claim 1 , wherein the olefin copolymer is a random copolymer of:
60 to 90 wt % ethylene;
10 to 40 wt % of the branched or straight chain C 3-30 α-olefin;
0.1 to 3 wt % of the silane; and,
0 to 6 wt % the olefin.

4. The multilayer chemical mechanical polishing pad of claim 1 , wherein the olefin copolymer is a random copolymer of:
65 to 75 wt % ethylene;
20 to 35 wt % of the branched or straight chain C 3-30 α-olefin, wherein the branched or straight chain C 3-30 α-olefin is 1-octene;
1 to 3 wt % of the silane, wherein the silane is vinyltrimethoxysilane; and,
0 wt % of the olefin.

5. A method for manufacturing a multilayer chemical mechanical polishing pad for polishing a substrate selected from at least one of a magnetic substrate, an optical substrate and a semiconductor substrate; comprising:
providing a polishing layer having a polishing surface adapted for polishing the substrate, an outer perimeter, a polishing layer interfacial region parallel to the polishing surface and an average non-interfacial region thickness, T P-avg , measured in a direction perpendicular to the polishing surface from the polishing surface to the polishing layer interfacial region;
providing a porous subpad layer having a bottom surface, an outer perimeter and a porous subpad layer interfacial region parallel to the bottom surface;
providing a pressure sensitive adhesive layer;
providing a broad spectrum, endpoint detection window block; wherein the endpoint detection window block consists of a monophase olefin copolymer; wherein the olefin copolymer is a random copolymer of:
20 to 90 wt % ethylene;
10 to 80 wt % of an α-olefin selected from the group consisting of propylene, 1-butene, 1-pentene, 3-methyl-1-butene, 1-hexene, 4-methyl-1-pentene, 3-methyl-1-pentene, 1-octene, 1-decene, 1-dodecene, 1-tetradecene, 1-hexadecene, 1-octadecene, 1-eicosene and mixtures thereof;
0.1 to 5 wt % of a silane selected from the group consisting of vinyltrimethoxysilane, vinyltriethoxysilane, γ-(meth)acryloxy propyl trimethoxy silane and mixtures thereof; and,
0 to 10 wt % of an olefin selected from the group consisting of butadiene, isoprene, 4-methyl-1,3-pentadiene, 1,3-pentadiene, 1,4-pentadiene, 1,5-hexadiene, 1,4-hexadiene, 1,3-hexadiene, 1,3-octadiene, 1,4-octadiene, 1,5-octadiene, 1,6-octadiene, 1,7-octadiene, 7-methyl-1,6-octadiene, 4-ethylidene-8-methyl-1,7-nonadiene, 5,9-dimethyl-1,4,8-decatriene and mixtures thereof;

interfacing the polishing layer and the porous subpad layer forming a stack, wherein the outer perimeter of the polishing layer coincides with the outer perimeter of the porous subpad layer and wherein the polishing layer interfacial region and the porous subpad layer interfacial region form a coextensive region;
providing a through opening the extends through the stack from the polishing surface to the bottom surface;
providing a counterbore opening that opens on the polishing surface, enlarges the through opening and forms a ledge; wherein the counterbore opening has an average depth, D O-avg , from a plane of the polishing surface to the ledge measured in a direction perpendicular to the polishing surface; wherein the average depth, D O-avg , is less than the average non-interfacial region thickness, T P-avg ;
disposing the broad spectrum, endpoint detection window block within the counterbore opening and bonding the broad spectrum, endpoint detection window block to the polishing layer; and,
applying the pressure sensitive adhesive layer to the bottom surface of the porous subpad layer.

6. The method of claim 5 , further comprising:
providing a mating surface;
providing a stamper with a raised feature corresponding to the irreversibly collapsed, densified region;
placing the stack on the mating surface and pressing the stamper against the stack creating a critical compressive force to a region of the stack corresponding to the outer perimeter of the porous subpad layer, wherein the magnitude of the critical compressive force is sufficient to form an irreversibly collapsed, densified region in the porous subpad la

Assignees

• Rohm & Haas Elect Materials Cmp Holdings Inc
• Dow Global Technologies Llc

Inventors

• Repper Angus
• Leugers Mary A
• James David B
• Degroot Marty W

Classifications

• B24B37/205 Primary

  provided with a window for inspecting the surface of the work being lapped · CPC title

• B24B37/013

  Devices or means for detecting lapping completion · CPC title

• B24B37/22

  characterised by a multi-layered structure · CPC title