Semiconductor structure and fabricating process for the same

Patent metadata

Field	Value
Publication number	US-9444398-B2
Application number	US-201313750997-A
Country	US
Kind code	B2
Filing date	Jan 25, 2013
Priority date	Jan 25, 2013
Publication date	Sep 13, 2016
Grant date	Sep 13, 2016

Abstract

A semiconductor structure and a fabricating process for the same are provided. The semiconductor structure includes a micro battery cell coupled to a solar cell by a semiconductor fabricating process.

First claim

What is claimed is:

1. A rechargeable battery assembly, comprising:
a semiconductor substrate;
a micro battery cell formed on the semiconductor substrate, wherein the micro battery cell comprises a cathode and an anode that extends from the cathode to an anode contact on a top surface of the micro battery cell, and wherein the cathode comprises a flange that extends from beneath the anode within the micro battery cell; and
a solar charger coupled to the micro battery cell, wherein the solar charger has a front contact and a back contact,
wherein the back contact of the solar charger is disposed proximal to the anode contact and wherein the cathode is connected to the front contact of the solar charger at least in part by a through-silicon-via that extends from the flange of the cathode within the micro battery cell to the top surface of the micro battery cell.

2. The rechargeable battery assembly according to claim 1 , wherein the anode further comprises a metal portion formed on the anode.

3. The rechargeable battery assembly according to claim 2 , further comprising a bonding interface formed between the metal portion and the back contact.

4. The rechargeable battery assembly according to claim 3 , wherein the metal portion comprises a Ge, an AlCu, a Cu, an Au, or a Sn.

5. The rechargeable battery assembly according to claim 1 , wherein the micro battery cell has an isolation layer and a substrate, and the isolation layer is formed between the substrate and one selected from a group consisting of a cathode, an anode and a liquid electrolyte.

6. The rechargeable battery assembly according to claim 5 , wherein the cathode and the anode are one of a pair of oxidation electrodes and a pair of reduction electrodes.

7. A rechargeable battery assembly, comprising:
a semiconductor substrate;
a micro battery cell formed on the semiconductor substrate, comprising a cathode and an anode; and
a photovoltaic cell coupled to the micro battery cell, comprising a front contact and a back contact,
wherein the anode of the micro battery cell is in contact with the back side of the photovoltaic cell, and the cathode is connected to the front contact at least partially through a through-micro battery-via that extends from a top surface of the micro battery cell to a cathode flange disposed within the micro battery cell.

8. The rechargeable battery assembly according to claim 3 , further comprising a wire from a top surface of the through-silicon-via to the front contact.

9. The rechargeable battery assembly according to claim 3 , wherein a top surface of the through-silicon-via is free from coverage of the metal portion.

10. The rechargeable battery assembly according to claim 3 , wherein the through-silicon-via extends through the micro battery cell and the solar charger and from the cathode to the front contact.

11. The rechargeable battery assembly according to claim 10 , further comprising an insulation portion on the through-silicon-via.

12. The rechargeable battery assembly according to claim 10 , wherein the through-silicon-via penetrates through the metal portion.

13. The rechargeable battery assembly according to claim 12 , wherein the through-silicon-via penetrates through the back contact.

14. The rechargeable battery assembly according to claim 7 , wherein the micro battery cell further comprises a metal portion formed on the anode.

15. The rechargeable battery assembly according to claim 7 , wherein the through-micro battery-via extends from a portion of the cathode disposed within the micro battery cell through the micro battery cell, through a bonding pad disposed between the anode and the back contact, and through the back contact to the front contact.

Assignees

• Taiwan Semiconductor Mfg Co Ltd
• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Ni Chyi-Tsong
• Wang I-Shi
• Chiu Yi-Hsun
• Su Ching-Hou

Classifications

• H10W42/00

  Arrangements for protection of devices (arrangements for thermal protection H10W40/00) · CPC title

• H10F10/00

  Individual photovoltaic cells, e.g. solar cells (electrolytic light-sensitive devices, e.g. dye-sensitised solar cells, H01G9/20) · CPC title

• H01M10/0585

  of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators · CPC title

• H01L2924/00

  Electricity · mapped topic

• H01M10/052

  Li-accumulators · CPC title