Apparatus for generating a hollow cathode arc discharge plasma

Patent metadata

Field	Value
Publication number	US-9443703-B2
Application number	US-201214362397-A
Country	US
Kind code	B2
Filing date	Oct 17, 2012
Priority date	Dec 19, 2011
Publication date	Sep 13, 2016
Grant date	Sep 13, 2016

Abstract

An apparatus for generating a hollow cathode arc discharge plasma, including two plasma sources, each including a hollow cathode and an electrode which is associated with the hollow cathode and which has an opening that extends through the electrode, wherein the hollow cathodes of the two plasma sources are connected to a pulse generator which generates a bipolar, medium-frequency pulsed voltage between the two hollow cathodes. Here, in each of the two plasma sources, the hollow cathode is connected in an electrically conducting manner, directly or with interconnection of at least one current direction limiting component, to the associated electrode.

First claim

The invention claimed is:

1. Apparatus for generating a hollow cathode arc discharge plasma, comprising two plasma sources, each including a hollow cathode and an electrode which is associated with the hollow cathode and which has an opening that extends through the electrode, wherein the hollow cathodes of the two plasma sources are connected to a pulse generator, which generates a bipolar, medium-frequency pulsed voltage between the two hollow cathodes, wherein, in the two plasma sources, the hollow cathode is electrically connected directly to the associated electrode or the hollow cathode is electrically connected directly to a first node of a current direction limiting component and a second node of the current direction limiting component is electrically connected directly to the associated electrode.

2. Apparatus according to claim 1 , wherein the electrode is arranged before the outlet opening of the associated hollow cathode.

3. Apparatus according to claim 1 , wherein the tube of the hollow cathode protrudes through the opening of the associated electrode.

4. Apparatus according to claim 3 , wherein the hollow cathode is in mechanical contact with the electrode.

5. Apparatus according to claim 1 , wherein the electrode has a ring-shaped design.

6. Apparatus according to claim 5 , wherein the extended axes of the hollow cathode and of the ring-shaped electrode are identical.

7. Apparatus according to claim 1 , wherein each plasma source includes a separate magnetic coil which encloses the hollow cathode and the associated electrode.

8. Apparatus according to claim 7 , wherein the magnetic coil has a ring-shaped design.

9. Apparatus according to claim 8 , wherein the extended axes of the ring-shaped magnetic coil and of the tube of the hollow cathode are identical.

10. Apparatus according to claim 1 , wherein the bipolar, medium-frequency pulsed voltage has a frequency in the range from 1 Hz to 1 MHz.

11. Apparatus according to claim 10 , wherein the bipolar, medium-frequency pulsed voltage has a frequency in the range from 1 kHz to 100 kHz.

12. Apparatus according to claim 1 , wherein the current direction limiting component is a diode.

13. A system for generating a hollow cathode arc discharge plasma, comprising two plasma sources, each including a hollow cathode and an associated electrode having an opening, the hollow cathode extending through the opening of the associated electrode or having an opening that faces the associated electrode, wherein the hollow cathodes of the two plasma sources are connected to a pulse generator configured to generate an alternating pulsed voltage between the hollow cathodes, wherein, in each of the two plasma sources, the hollow cathode is electrically connected directly, or directly through at least one current direction limiting component to the associated electrode, wherein the at least one current direction limiting component permits a flow of current from the hollow cathode to the associated electrode and limits a flow of current from corresponding anode to the hollow cathode, wherein, in each of the two plasma sources, the hollow cathode and the associated electrode are configured to operate together as a cathode to the other of the two plasma sources and, alternatively, as an anode to the other of the two plasma sources depending on the alternating pulsed voltage.

14. The system of claim 13 , wherein, in each of the plasma sources, the hollow cathode is configured to be at the same electrical potential as the associated electrode.

Assignees

• Fraunhofer Ges Forschung

Inventors

• Morgner Henry
• Mattausch Gösta
• Metzner Christoph
• Junghähnel Michael
• Labitzke Rainer
• Klose Lars
• Werner Torsten
• Kubusch Jörg

Classifications

• H05H1/481

  Hollow cathodes · CPC title

• H01J37/32055 Primary

  Arc discharge · CPC title

• H01J2237/0822

  Multiple sources · CPC title

• H01J37/32669

  Particular magnets or magnet arrangements for controlling the discharge · CPC title

• H01J37/32807

  Construction (includes replacing parts of the apparatus) · CPC title