Electron beam imaging with dual Wien-filter monochromator

Patent metadata

Field	Value
Publication number	US-9443696-B2
Application number	US-201514711607-A
Country	US
Kind code	B2
Filing date	May 13, 2015
Priority date	May 25, 2014
Publication date	Sep 13, 2016
Grant date	Sep 13, 2016

Abstract

One embodiment relates to a dual Wien-filter monochromator. A first Wien filter focuses an electron beam in a first plane while leaving the electron beam to be parallel in a second plane. A slit opening allows electrons of the electron beam having an energy within an energy range to pass through while blocking electrons of the electron beam having an energy outside the energy range. A second Wien filter focuses the electron beam to become parallel in the first plane while leaving the electron beam to be parallel in the second plane. Other embodiments, aspects and features are also disclosed.

First claim

What is claimed is:

1. An electron beam imaging apparatus comprising:
an emitter-source tip that emits electrons;
a gun electron lens that focuses the electrons to form an electron beam that is parallel in that the electron beam has electron trajectories that are parallel;
a first Wien filter that focuses the electron beam in a first plane while leaving the electron beam to be parallel in a second plane;
a slit opening of a slit aperture, wherein the slit opening has a width in the first plane and a length in the second plane, and wherein the width is narrower than the length; and
a second Wien filter that focuses the electron beam to become parallel in the first plane while leaving the electron beam to be parallel in the second plane.

2. The apparatus of claim 1 , wherein the first Wien filter focuses the electron beam to a first crossover in the first plane.

3. The apparatus of claim 2 , wherein the first crossover in the first plane lies within the slit opening.

4. The apparatus of claim 3 , wherein the slit opening allows electrons having an energy within an energy range to pass through while blocking electrons having an energy outside the energy range.

5. The apparatus of claim 1 , wherein the slit opening is positioned so as to be equidistant from the first and second Wien filters, and wherein a focusing strength of the first and second Wien filters are equal.

6. The apparatus of claim 1 , wherein a monochromator comprises the first Wien filter, the slit aperture, and the second Wien filter, and wherein the monochromator is electrically floating.

7. The apparatus of claim 6 , wherein said electrically floating of the monochromator is accomplished by an outer conductive surrounding feature that is electrically grounded and an inner conductive surrounding feature to which a direct-current (DC) voltage is applied.

8. The apparatus of claim 1 , further comprising:
a condenser lens that focuses the electron beam to a second crossover; and
an objective lens focuses the electron beam so as to form a beam spot on a surface of a target substrate.

9. The apparatus of claim 8 , further comprising:
a scanning system for deflecting the electron beam so as to scan the beam spot over an area of a target substrate being imaged.

10. The apparatus of claim 9 , wherein the scanning system comprises:
a pre-scan deflector that deflects the electron beam before the second crossover is formed; and
a main scan deflector that deflects the electron beam before the electron beam reaches the objective lens.

11. The apparatus of claim 8 , further comprising:
a third Wien filter that deflects secondary electrons from the surface of the target substrate; and
a detector that detects the secondary electrons to obtain image data.

12. A method of imaging using an electron beam, the method comprising:
emitting electrons from an emitter source;
focusing the electrons by a gun lens to form an electron beam that is parallel in that the electron beam has electron trajectories that are parallel;
focusing the electron beam by a first one-dimensional Wien filter to a first crossover in a first plane while leaving the electron beam to be parallel in a second plane, wherein the first crossover coincides with a slit opening;
passing electrons of the electron beam with energies within an energy range through the slit opening, while blocking electrons of the electron beam with energies outside the energy range; and
focusing the electron beam by a second one-dimensional Wien filter to become parallel in the first plane while leaving the electron beam to be parallel in the second plane.

13. The method of claim 12 , wherein the slit opening is positioned so as to be equidistant from the first and second Wien filters, and wherein a focusing strength of the first and second Wien filters are equal.

14. The method of claim 12 , wherein the first one-dimensional Wien filter, the slit aperture, and the second one-dimensional Wien filter are electrically floating.

15. The method of claim 12 , further comprising:
deflecting the electron beam by a pre-scan deflector;
focusing the electron beam to a second crossover;
deflecting the electron beam by a main scan deflector; and
focusing the electron beam so as to form a beam spot on a surface of a target substrate.

16. The method of claim 15 , further comprising:
extracting secondary electrons from the surface of the target substrate;
deflecting the secondary electrons away from the electron beam; and
detecting the secondary electrons to obtain image data.

17. A dual Wien-filter monochromator comprising:
a first Wien filter that focuses an electron beam in a first plane while leaving the electron beam to be parallel in a second plane;
a slit opening of a slit aperture, wherein the slit opening allows electrons of the electron beam having an energy within an energy range to pass through while blocking electrons of the electron beam having an energy outside the energy range; and
a second Wien filter that focuses the electron beam to become parallel in the first plane while leaving the electron beam to be parallel in the second plane.

18. The monochromator of claim 17 , wherein the first Wien filter focuses the electron beam to a first crossover in the first plane.

19. The monochromator of claim 18 , wherein the first crossover in the first plane lies within the slit opening.

20. The monochromator of claim 17 , wherein the slit opening is positioned so as to be equidistant from the first and second Wien filters, and wherein a focusing strength of the first and second Wien filters are equal.

21. The monochromator of claim 17 , wherein the monochromator is electrically floating.

22. The monochromator of claim 21 , wherein said electrically floating of the monochromator is accomplished by an outer conductive surrounding feature that is electrically grounded and an inner conductive surrounding feature to which a direct-current (DC) voltage is applied.

Assignees

• Kla Tencor Corp

Inventors

• Jiang Xinrong
• Han Liqun

Classifications

• H01J37/06

  Electron sources; Electron guns · CPC title

• H01J2237/057

  Energy or mass filtering · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J37/05 Primary

  Electron or ion-optical arrangements for separating electrons or ions according to their energy {or mass}(particle separator tubes H01J49/00) · CPC title

• H01J37/26 Primary

  Electron or ion microscopes; Electron or ion diffraction tubes · CPC title